Diffusion Morning report 02/27/03

Ted Berg tberg at snf.stanford.edu
Thu Feb 27 06:40:48 PST 2003


Good Morning all,
    All is looking good. a few issues in sink land.

Diffusion Date: 2/27/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   7.04/30?
Tylan 9-Poly Up   7.6/30
Tylan 10-Nitride Up   14.35/30
Tylan 11-BPSG-LTO Up   21.3/30
Tylan 12-FGA Up
Tystar up   22.5/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently 515 PSI


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