Diffusion Morning report 2/28/03

Ray Seymour seymour at snf.stanford.edu
Fri Feb 28 07:15:33 PST 2003


Date: 2/28/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Yellow
Tylan 2 UP
Tylan 3 Yellow
Tylan 4 Down
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up                             8.0/30
Tylan 9-Poly Up                             8.07/30
Tylan 10-Nitride Up                       14.99/30
Tylan 11-BPSG-LTO Up               21.97/30
Tylan 12-FGA Up
Tystar Up  25.46/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up                                 Cleaned this morning
ZYGO UP
GAAS 22 UP
GAAS 23 UP



-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20030228/fb81beff/attachment.html>


More information about the diffusion mailing list