From tberg at snf.stanford.edu  Thu Jan  2 11:44:22 2003
From: tberg at snf.stanford.edu (Ted Berg)
Date: Thu, 02 Jan 2003 11:44:22 -0800
Subject: Diffusion status at 11:45 AM
Message-ID: <3E149696.954536C8@snf.stanford.edu>

Here is morning status after turn on,
    Most furnaces checked operational, lps need tests for uniformity,
process gases on, all oxides had tca clean.

Diffusion Date: 1/2/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up ran newtca cln
Tylan 2 Up ran newtca cln
Tylan 3 Up ran newtca cln
Tylan 4 Up Ran trans cln
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up ran newtca cln
Tylan 8-SiGe Up   6.75?
Tylan 9-Poly yellow coated-needs test 0/30
Tylan 10-Nitride yellow coated-needs test 0/30
Tylan 11-BPSG-LTO yellow coated-needs test 0/30
Tylan 12-FGA yellow Boat issues
Tystar Up ran test 16.5/30???
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up Ordered CD RW , Flashed Bios, installed memory

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI  Currently @320 PSI

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From tberg at snf.stanford.edu  Fri Jan  3 06:56:41 2003
From: tberg at snf.stanford.edu (Ted Berg)
Date: Fri, 03 Jan 2003 06:56:41 -0800
Subject: Diffusion Morning Report 01/03/03
Message-ID: <3E15A4A9.B8AE0BDE@snf.stanford.edu>

Good morning all,
    Looks like the reservations are coming in for numerous tools.  We
are in good shape for now.  Happy New Year.

Diffusion Date: 1/3/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up ran newtca cln
Tylan 2 Up ran newtca cln
Tylan 3 Up ran newtca cln
Tylan 4 Up Ran trans cln Note: the system now has TRans-LC as an HCl
source.
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up ran newtca cln
Tylan 8-SiGe Up   6.75?
Tylan 9-Poly yellow coated-needs test 0/30
Tylan 10-Nitride yellow coated-needs test 0/30
Tylan 11-BPSG-LTO yellow coated-needs test 0/30
Tylan 12-FGA Up
Tystar yellow needs uniformity test 16.5/30???
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up Ordered CD RW , Flashed Bios, installed memory

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI  Currently @320 PSI

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From tberg at snf.stanford.edu  Mon Jan  6 07:01:50 2003
From: tberg at snf.stanford.edu (Ted Berg)
Date: Mon, 06 Jan 2003 07:01:50 -0800
Subject: Diffusion morning report
Message-ID: <3E199A5E.1727A11F@snf.stanford.edu>

Good morning all,
Nitride is down chiller is frozen-this explains Yyaos low dep rate i
think all the rest loks ok for now.

Diffusion Date: 1/3/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox
Tylan 8-SiGe Up   6.75?
Tylan 9-Poly Up   0/30
Tylan 10-Nitride Down Chiller for Dichlorosilane is frozen 0/30
Tylan 11-BPSG-LTO Up   0/30
Tylan 12-FGA Up
Tystar yellow needs uniformity test 16.5/30???
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Down installing CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI  Currently @300 PSI

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From tberg at snf.stanford.edu  Mon Jan  6 08:44:32 2003
From: tberg at snf.stanford.edu (Ted Berg)
Date: Mon, 06 Jan 2003 08:44:32 -0800
Subject: [Fwd: Diffusion morning report]
Message-ID: <3E19B270.F921187B@snf.stanford.edu>


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Subject: Diffusion morning report
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From tberg at snf.stanford.edu  Mon Jan  6 08:48:43 2003
From: tberg at snf.stanford.edu (Ted Berg)
Date: Mon, 06 Jan 2003 08:48:43 -0800
Subject: [Fwd: Diffusion morning report]
Message-ID: <3E19B36B.76733374@snf.stanford.edu>


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From tberg at snf.stanford.edu  Tue Jan  7 06:50:17 2003
From: tberg at snf.stanford.edu (Ted Berg)
Date: Tue, 07 Jan 2003 06:50:17 -0800
Subject: Diffusion Morning Report 1/07/02
Message-ID: <3E1AE929.4DC5CC71@snf.stanford.edu>

Here you go,
Tystar down for pull and Clean, Nitride OK.

Diffusion Date: 1/7/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.75?
Tylan 9-Poly Up   0/30
Tylan 10-Nitride Up Chiller still OK 0/30
Tylan 11-BPSG-LTO Up   0/30
Tylan 12-FGA Up
Tystar Down  Pull and clean 0/30???
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Down installing CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI  Currently @300 PSI

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From tberg at snf.stanford.edu  Wed Jan  8 08:24:32 2003
From: tberg at snf.stanford.edu (Ted Berg)
Date: Wed, 08 Jan 2003 08:24:32 -0800
Subject: Diffusion Morning Report 1/08/02
Message-ID: <3E1C50C0.116F9008@snf.stanford.edu>

Good morning all,
    Tystar down for pull and clean, waiting results on tylan 3, Aarons
thesis defense

Diffusion Date: 1/8/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.75?
Tylan 9-Poly Up .7/30
Tylan 10-Nitride Up Chiller still OK .7/30
Tylan 11-BPSG-LTO Up   ?/30
Tylan 12-FGA Up
Tystar Down  Pull and clean 0/30???
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Down installing CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI  Currently @300 PSI


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From tberg at snf.stanford.edu  Thu Jan  9 08:44:37 2003
From: tberg at snf.stanford.edu (Ted Berg)
Date: Thu, 09 Jan 2003 08:44:37 -0800
Subject: Diffusion Morning Report 1/09/03
Message-ID: <3E1DA6F5.A287F938@snf.stanford.edu>

Good morning all,
  Zygo is back up, tylan 3 is OK, testing Tystar.

Diffusion Date: 1/9/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up repaired loader
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.75?
Tylan 9-Poly Up   1.7/30
Tylan 10-Nitride Up Chiller still OK 2.13/30
Tylan 11-BPSG-LTO Up   2.0/30
Tylan 12-FGA Up
Tystar Down  Pull and clean completed, coated needs test 0/30???
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI  Currently @300 PSI

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From tberg at snf.stanford.edu  Fri Jan 10 07:04:29 2003
From: tberg at snf.stanford.edu (Ted Berg)
Date: Fri, 10 Jan 2003 07:04:29 -0800
Subject: Diffusion Morning report 01/10/03
Message-ID: <3E1EE0FD.D523A95@snf.stanford.edu>

Good morning all,
    Tystar is up everything looking good.  HCl for Epi will be changed
this morning.

Diffusion Date: 1/10/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.75?
Tylan 9-Poly Up   2.33/30
Tylan 10-Nitride Up   2.7/30
Tylan 11-BPSG-LTO Up   2.0/30
Tylan 12-FGA Up
Tystar Up   0/30???
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI  Currently @300 PSI

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From tberg at snf.stanford.edu  Mon Jan 13 06:42:24 2003
From: tberg at snf.stanford.edu (Ted Berg)
Date: Mon, 13 Jan 2003 06:42:24 -0800
Subject: Diffusion Morning Report 1/13/03
Message-ID: <3E22D050.14C82F9A@snf.stanford.edu>

here you go,
    Wafer flakes on boats-tylan 1.  Burn box down for check.

Diffusion Date: 1/13/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Yellow-wafer chips on boat
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.75?
Tylan 9-Poly Up   12.5/30
Tylan 10-Nitride Up   5.35/30
Tylan 11-BPSG-LTO Up   3.0/30
Tylan 12-FGA Up
Tystar Up   .12/30???
Doped Poly Down
TEOS yellow    Cleaned exhaust on Friday
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI  Currently @260 PSI

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From tberg at snf.stanford.edu  Tue Jan 14 07:24:55 2003
From: tberg at snf.stanford.edu (Ted Berg)
Date: Tue, 14 Jan 2003 07:24:55 -0800
Subject: Diffusion Morning report 1/14/03
Message-ID: <3E242BC7.6B57FBA0@snf.stanford.edu>

Here you go,

    Everything looks ok tylan 1 needs test.

Diffusion Date: 1/14/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Down needs test after TCA clean
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.75?
Tylan 9-Poly Up   12.5/30
Tylan 10-Nitride Up   6.35/30
Tylan 11-BPSG-LTO Up   4.7/30
Tylan 12-FGA Up
Tystar Up   .12/30
Doped Poly Down
TEOS yellow Cleaned exhaust on Friday
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI  Currently @240 PSI

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From tberg at snf.stanford.edu  Wed Jan 15 06:53:36 2003
From: tberg at snf.stanford.edu (Ted Berg)
Date: Wed, 15 Jan 2003 06:53:36 -0800
Subject: Diffusion Morning Report 1/14/03
Message-ID: <3E2575F0.99F18F8D@snf.stanford.edu>

Here you go all,
    Silane for the furnaces at 200 this morning and dropping. we need to
discuss change.

Diffusion Date: 1/14/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.87?
Tylan 9-Poly Up   15.3/30
Tylan 10-Nitride Up   7.3/30
Tylan 11-BPSG-LTO Up   4.8/30
Tylan 12-FGA Up
Tystar Up   .12/30???
Doped Poly Down
TEOS yellow Cleaned exhaust on Friday
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI  Currently @200 PSI

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From tberg at snf.stanford.edu  Thu Jan 16 07:20:45 2003
From: tberg at snf.stanford.edu (Ted Berg)
Date: Thu, 16 Jan 2003 07:20:45 -0800
Subject: Diffusion Morning Report 1/15/03
Message-ID: <3E26CDCD.2559743A@snf.stanford.edu>

Good morning all,
    SiH4 for furnaces being changed. All else looks ok.

Diffusion Date: 1/16/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Down Cylinder change SiH4 6.87?
Tylan 9-Poly Down Cylinder change SiH4 16.9/30
Tylan 10-Nitride Up   7.9/30
Tylan 11-BPSG-LTO Down Cylinder change SiH4 5.22/30
Tylan 12-FGA Up
Tystar Down Cylinder change SiH4 3.12/30???
Doped Poly Down
TEOS yellow Cleaned exhaust on Friday
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI  Currently  being Changed

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From tberg at snf.stanford.edu  Fri Jan 17 07:57:47 2003
From: tberg at snf.stanford.edu (Ted Berg)
Date: Fri, 17 Jan 2003 07:57:47 -0800
Subject: Diffusion Morning report 1/17/03
Message-ID: <3E2827FB.E134DF18@snf.stanford.edu>

Good Friday morning, Have a good Holiday on Monday.  SiH4 changed and
pressure checked Testing Poly now.

Diffusion Date: 1/17/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe yellow Cylinder change SiH4 back on waiting test 6.87?
Tylan 9-Poly Down Cylinder change SiH4-testing 16.9/30
Tylan 10-Nitride Up   7.9/30
Tylan 11-BPSG-LTO yellow Cylinder change SiH4-back on waiting test
5.22/30
Tylan 12-FGA Up
Tystar Down Cylinder change SiH4-waiting test 6.3/30???
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Changed 680 PSI

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From tberg at snf.stanford.edu  Tue Jan 21 06:42:00 2003
From: tberg at snf.stanford.edu (Ted Berg)
Date: Tue, 21 Jan 2003 06:42:00 -0800
Subject: Diffusion morning Report 1/21/02
Message-ID: <3E2D5C38.8B619463@snf.stanford.edu>

Welcome back all,
    Poly is getting close to pull and clean with over 10 microns added
this last weekend.

Diffusion Date: 1/21/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.87?
Tylan 9-Poly Up   26.5/30
Tylan 10-Nitride Up   9.3/30
Tylan 11-BPSG-LTO Up   8.7/30
Tylan 12-FGA Up
Tystar up   10.0/30???
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently @680 PSI


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From tberg at snf.stanford.edu  Wed Jan 22 06:47:24 2003
From: tberg at snf.stanford.edu (Ted Berg)
Date: Wed, 22 Jan 2003 06:47:24 -0800
Subject: Diffusion Morning Report 1/22/03
Message-ID: <3E2EAEFC.45C686BA@snf.stanford.edu>

here you go,
    Looks like Poly change on Tues. morning baring any crisis.

Diffusion Date: 1/22/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.87?
Tylan 9-Poly Up   27.2/30
Tylan 10-Nitride Up   9.75/30
Tylan 11-BPSG-LTO Up   9.65/30
Tylan 12-FGA Up
Tystar up   10.0/30???
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently680 PSI

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From tberg at snf.stanford.edu  Thu Jan 23 07:33:07 2003
From: tberg at snf.stanford.edu (Ted Berg)
Date: Thu, 23 Jan 2003 07:33:07 -0800
Subject: Diffusion Morning report
Message-ID: <3E300B33.95396340@snf.stanford.edu>

Here you go,
    Mike removing flakes from BPSG. Poly at 29+ microns heading for
Tuesday clean.

Diffusion Date: 1/23/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.87?
Tylan 9-Poly Up   29.5/30
Tylan 10-Nitride Up   11.0/30
Tylan 11-BPSG-LTO Up Removing  Flakes 12.7/30
Tylan 12-FGA Up
Tystar up   11.25/30???
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently 680 PSI

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From seymour at snf.stanford.edu  Fri Jan 24 07:14:46 2003
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Fri, 24 Jan 2003 07:14:46 -0800
Subject: Diffusion Morning report
Message-ID: <3E315866.F5D509AD@snf.stanford.edu>

Poly going down for a pull and clean on Tuesday now at 29.5 microns.

Diffusion   Date 1/24/03
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.87?
Tylan 9-Poly Up   29.5/30
Tylan 10-Nitride Up   12.96/30
Tylan 11-BPSG-LTO Up 12.73/30
Tylan 12-FGA Up
Tystar up   11.25/30???
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently 680 PSI

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From seymour at snf.stanford.edu  Fri Jan 24 07:20:14 2003
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Fri, 24 Jan 2003 07:20:14 -0800
Subject: Diffusion Morning Report 
Message-ID: <3E3159AE.B31C1259@snf.stanford.edu>

Poly going down for a pull and clean on Tuesday now at 29.5 microns.

Diffusion   Date 1/24/03
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.87?
Tylan 9-Poly Up   29.5/30
Tylan 10-Nitride Up   12.96/30
Tylan 11-BPSG-LTO Up 12.73/30
Tylan 12-FGA Up
Tystar up   11.25/30???
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently 680 PSI




From tberg at snf.stanford.edu  Mon Jan 27 09:09:57 2003
From: tberg at snf.stanford.edu (Ted Berg)
Date: Mon, 27 Jan 2003 09:09:57 -0800
Subject: Diffusion Morning Report 1/27/03
Message-ID: <3E3567E4.DA1E308C@snf.stanford.edu>

Good morning all,

TEOS and POCl3 cannisters changed. TEOS back at temp, POCl3 running
dummy run.

Diffusion Date: 1/27/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 yellow Changed canister and valve running Dummy test
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.87?
Tylan 9-Poly Up   30/30
Tylan 10-Nitride Up   15/30
Tylan 11-BPSG-LTO Up   13.5/30
Tylan 12-FGA Up
Tystar up   12.56/30???
Doped Poly Down
TEOS yellow Changed Cannister
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently  640 PSI

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From tberg at snf.stanford.edu  Tue Jan 28 09:21:19 2003
From: tberg at snf.stanford.edu (Ted Berg)
Date: Tue, 28 Jan 2003 09:21:19 -0800
Subject: Diffusion Morning Report 1/28/03
Message-ID: <3E36BC0E.BD7DF516@snf.stanford.edu>

Here you go,
    Poly changed and leak checked heating up now. Digital gauges
installed on Epi.

Diffusion Date: 1/28/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.87?
Tylan 9-Poly Down 0/30  Scheduled Pull and clean in progress
Tylan 10-Nitride Up   15.7/30
Tylan 11-BPSG-LTO Up   14.1/30
Tylan 12-FGA Up
Tystar up   12.56/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently  630 PSI

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From tberg at snf.stanford.edu  Wed Jan 29 06:56:23 2003
From: tberg at snf.stanford.edu (Ted Berg)
Date: Wed, 29 Jan 2003 06:56:23 -0800
Subject: Diffusion Morning Report 1/29/03
Message-ID: <3E37EB97.8B250967@snf.stanford.edu>

Good morning all,

    Poly was completed yesterday needs test.

Diffusion Date: 1/29/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.87?
Tylan 9-Poly Down Waiting test 0/30
Tylan 10-Nitride Up   16.8/30
Tylan 11-BPSG-LTO Up   14.7/30
Tylan 12-FGA Up
Tystar up   15.6/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently  620 PSI

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From tberg at snf.stanford.edu  Thu Jan 30 07:24:06 2003
From: tberg at snf.stanford.edu (Ted Berg)
Date: Thu, 30 Jan 2003 07:24:06 -0800
Subject: Diffusion Morning Report 1/30/03
Message-ID: <3E394396.B7FBFE7F@snf.stanford.edu>

Good morning all,
    Everything looking good.

Diffusion Date: 1/30/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   13.3/30
Tylan 9-Poly Up   .7/30
Tylan 10-Nitride Up   17.4/30
Tylan 11-BPSG-LTO Up   15.5/30
Tylan 12-FGA Up
Tystar up   15.6/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently  620 PSI

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From tberg at snf.stanford.edu  Fri Jan 31 07:09:30 2003
From: tberg at snf.stanford.edu (Ted Berg)
Date: Fri, 31 Jan 2003 07:09:30 -0800
Subject: Diffusion Morning report 1/31/03
Message-ID: <3E3A91AA.795D4714@snf.stanford.edu>

Greetings all,
    Tylan 1 possible uniformity issues. No problems reported by
subsequent user??

Diffusion Date: 1/31/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 yellow Uniformity issues?
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.9/30
Tylan 9-Poly Up   .77/30
Tylan 10-Nitride Up   18.6/30
Tylan 11-BPSG-LTO Up   15.5/30
Tylan 12-FGA Up
Tystar up   15.6/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently  620 PSI

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