From tberg at snf.stanford.edu Tue Jul 1 06:32:36 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 01 Jul 2003 06:32:36 -0700 Subject: Diffusion Morning report 7/01/03 Message-ID: <3F018D74.D4946847@snf.stanford.edu> Good Morning all, Happy 1st of July. Everything looking good. LTO uniformity still not great. everything else OK. Diffusion Date: 7/1/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/30 Tylan 9-Poly Up 1.0/30 Tylan 10-Nitride Up 2.1/30 Tylan 11-BPSG-LTO yellow up uniformity not great 1.1/30 Tylan 12-FGA Up Tystar Up 4.3/30 ?? Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 230- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jul 2 06:32:25 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 02 Jul 2003 06:32:25 -0700 Subject: Diffusion Morning report 7/02/03 Message-ID: <3F02DEE9.15E75B1@snf.stanford.edu> Good Morning all, Looking good everything is up .LTO still has poor uniformity. Diffusion Date: 7/2/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/30 Tylan 9-Poly Up 1.1/30 Tylan 10-Nitride Up 5.7/30 Tylan 11-BPSG-LTO yellow up uniformity not great 2.0/30 Tylan 12-FGA Up Tystar Up 4.3/30 ?? Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 200- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Thu Jul 3 08:04:52 2003 From: seymour at snf.stanford.edu (Ray Seymour) Date: Thu, 03 Jul 2003 08:04:52 -0700 Subject: Diffusion Morning Report Message-ID: <3F044613.B215C17F@snf.stanford.edu> Date: 7/3/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Yellow Tylan 2 UP Tylan 3 Yellow Tylan 4 Down Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.93/30 Tylan 9-Poly Up 1.12/30 Tylan 10-Nitride Up 6.39/30 Tylan 11-BPSG-LTO Yellow Uniformity issues 2.0/30 Tylan 12-FGA Up Tystar Up 4.23/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up Cleaned this morning ZYGO UP GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 170- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Jul 7 07:23:23 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 07 Jul 2003 07:23:23 -0700 Subject: Diffusion Morning Report 07/07/03 Message-ID: <3F09825B.A778733D@snf.stanford.edu> Good Morning all, Everything except LTO is looking good. Ray is checking out gas flows on LTO . Diffusion Date: 7/7/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/30 Tylan 9-Poly Up 1.1/30 Tylan 10-Nitride Up 7.5/30 Tylan 11-BPSG-LTO Down checking gas flows 2.0/30 Tylan 12-FGA Up Tystar Up 4.3/30 ?? Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 200- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Jul 8 07:33:30 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 08 Jul 2003 07:33:30 -0700 Subject: Diffusion Morning Report 07/07/03 Message-ID: <3F0AD63A.87A27AE0@snf.stanford.edu> Good Morning all, Interesting morning in CVD land. LTO has good uniformity but we don't know if is the same process, Poly had pressure issues we are running a test run after finding no leaks or pressure issues, Nitride had no problems with lonh378 but did with newlsn. Everything else looks ok. Diffusion Date: 7/8/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.9/30 Tylan 9-Poly Down Checked leak rate OK-running test 1.1/30 Tylan 10-Nitride yellow problem with newlsn recipe-lonh378 ok 8.8/30 Tylan 11-BPSG-LTO Down checked gas flows-needs test? 3.7/30 Tylan 12-FGA Up Tystar Up 5.1/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 190- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jul 9 07:28:48 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 09 Jul 2003 07:28:48 -0700 Subject: Diffusion Morning Report 07/09/03 Message-ID: <3F0C269F.F4067EDD@snf.stanford.edu> Good Morning all, Things are still a bit hazy this morning. LTO is ready for testing, Still questions about nitride and bubbles, poly should be fine we are still monitoring pressure. Everything else looks fine. Diffusion Date: 7/9/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.9/30 Tylan 9-Poly yellow monitoring 1.1/30 Tylan 10-Nitride yellow problem with newlsn recipe-lonh378 ok 9.3/30 Tylan 11-BPSG-LTO Down checked gas flows-needs test? 3.7/30 Tylan 12-FGA Up Tystar Up 5.1/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 190- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jul 10 06:56:59 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 10 Jul 2003 06:56:59 -0700 Subject: Diffusion Morning report 07/10/03 Message-ID: <3F0D70AB.6F2D38B8@snf.stanford.edu> Good Morning All, Everything looks good with the following exceptions, Lto is missing some desired recipes, Poly seems to be fine no pressure excursions, nitride bubble investigations ongoing. Diffusion Date: 7/10/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.9/30 Tylan 9-Poly yellow monitoring pressure 1.1/30 Tylan 10-Nitride yellow problem with newlsn recipe-lonh378 ok 9.4/30 Tylan 11-BPSG-LTO yellow missing recipe 3.7/30 Tylan 12-FGA Up Tystar Up 5.1/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 170- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jul 11 06:59:03 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 11 Jul 2003 06:59:03 -0700 Subject: Diffusion Morning Report 07/11/03 Message-ID: <3F0EC2A7.CF8AB2B5@snf.stanford.edu> Good Morning All, Things are still a littl messed up after yesterdays power failure, tylan1, 5, and sige have MFC zero errors giving false faults, polys element breaker was off. BPSG has uniformity issues and nitride still has bubble issues. Just a note to users: after a power glitch one should assume that any equipment they were running is down and should check coral for status before running. Maintenance has a big job after a power failure and cannot put notes on each piece of equipment that has issues. CORAL is our log. Diffusion Date: 7/11/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 red N2 flow fault Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 red N2 flow fault Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe yellow H2 leak alarm 9.2/30 Tylan 9-Poly red breaker off 1.1/30 Tylan 10-Nitride yellow problem with newlsn recipe-lonh378 ok 9.4/30 Tylan 11-BPSG-LTO yellow bad uniformity 3.7/30 Tylan 12-FGA Up Tystar Up 5.1/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up Cleaning this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 170- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jul 11 08:46:30 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 11 Jul 2003 08:46:30 -0700 Subject: Diffusion Update 07/11/03 Message-ID: <3F0EDBD6.6DB14152@snf.stanford.edu> Hello Again, Tylan1, tylan 5 and sige are back up after MFC zeroing. Poly and nitride are back at temp. TEOS pump has an issue now. stay tuned From tberg at snf.stanford.edu Mon Jul 14 06:58:24 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 14 Jul 2003 06:58:24 -0700 Subject: Diffusion Morning report 07/14/03 Message-ID: <3F12B700.209F52DA@snf.stanford.edu> Good Morning all, Several issues with furnaces since last weeks power outage, Tylan 2 and 4 breakers were off, Tylan 5 has TCU error 80. Nitride still has haze/bubble issues, LTO had issues with certain recipes. Diffusion Date: 7/14/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Down breaker off-Turned back on heating up Tylan 3 Up Tylan 4 Down breaker off-Turned back on heating up Tylan 5-BBr3 yellow TCU error 80-observation, no error now Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.2/30 Tylan 9-Poly Up 4.2/30 Tylan 10-Nitride yellow problem with newlsn recipe-lonh378 ok 10.8/30 Tylan 11-BPSG-LTO yellow missing recipe 19.6/30 Tylan 12-FGA Up Tystar Up 5.1/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 160- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Tue Jul 15 08:01:34 2003 From: seymour at snf.stanford.edu (Ray Seymour) Date: Tue, 15 Jul 2003 08:01:34 -0700 Subject: Diffusion Morning Report 7/15/03 Message-ID: <3F14174E.251E5CC2@snf.stanford.edu> Date: 7/15/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Yellow Tylan 2 UP Tylan 3 Yellow Tylan 4 Down Replacing SCR Fan Tylan 5-BBr3 yellow Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe yellow MFS460 alarms 9.27/30 Tylan 9-Poly Up 5.7/30 Tylan 10-Nitride yellow Problem with newlsn, lonh378 good 12.75/30 Tylan 11-BPSG-LTO yellow Recipe missing 20.25/30 Tylan 12-FGA Up Tystar Up 5.08/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO UP GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 160- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jul 16 06:50:40 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 16 Jul 2003 06:50:40 -0700 Subject: Diffusion Morning report 07/16/03 Message-ID: <3F15582F.9564BA41@snf.stanford.edu> Good Morning all, THings are looking good, we seem to be stable after all of our power issues. LTO and Nitride are still Yellow . Everything else looks good now. LP thicknesses are rising quickly. Diffusion Date: 7/16/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up SCR cooling fan replaced Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.2/30 Tylan 9-Poly Up 8.0/30 Tylan 10-Nitride yellow problem with newlsn recipe-lonh378 ok 13.5/30 Tylan 11-BPSG-LTO yellow missing recipe 22.2/30 Tylan 12-FGA Up Tystar Up 5.1/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 140- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jul 17 07:13:00 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 17 Jul 2003 07:13:00 -0700 Subject: Diffusion Morning Report 07/17/03 Message-ID: <3F16AEEC.104FEF37@snf.stanford.edu> Good Morning all, Everything is looking good. Any updates on LTO and Nitride??? everything else is fine. Diffusion Date: 7/17/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.2/30 Tylan 9-Poly Up 10.4/30 Tylan 10-Nitride yellow problem with newlsn recipe-lonh378 ok 13.8/30 Tylan 11-BPSG-LTO yellow missing recipe 23.4/30 Tylan 12-FGA Up Tystar Up 5.1/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 120- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jul 18 07:49:42 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 18 Jul 2003 07:49:42 -0700 Subject: Diffusion Morning Report 07/18/03 Message-ID: <3F180905.C02E6C3D@snf.stanford.edu> Good Friday Morning all, Things are looking good today LTO seems to be OK Nitride Bubbles/haze still under investigation. Everything else looks OK. Diffusion Date: 7/18/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.2/30 Tylan 9-Poly Up 13.5/30 Tylan 10-Nitride yellow bubbles/haze?? 14.0/30 Tylan 11-BPSG-LTO yellow 23.5/30 Tylan 12-FGA Up Tystar Up 5.1/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 105- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Jul 21 07:13:17 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 21 Jul 2003 07:13:17 -0700 Subject: Diffusion Morning Report 7/21/03 Message-ID: <3F1BF4FC.D9007D7C@snf.stanford.edu> Good Morning all, Everything is looking good this morning. Poly and LTO are getting close to pull and clean. I have made reservations for Thursday for the LTO Pull and clean. SiH4 for the Tylans is getting close to crossover . WE are watching it closely. Diffusion Date: 7/21/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 23.8/30 Tylan 10-Nitride yellow bubbles/haze?? 16.2/30 Tylan 11-BPSG-LTO yellow 25.6/30 boat issue Tylan 12-FGA Up Tystar Up 5.1/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 70- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Jul 22 07:02:33 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 22 Jul 2003 07:02:33 -0700 Subject: Diffusion Morning Report 07/22/03 Message-ID: <3F1D43F9.A491E064@snf.stanford.edu> Good Morning all, Things are looking pretty good. Thanks to Mary and Nancy for the e-mail clarifying the poly and nitride stati. Tubes poly and LTO coming up for Pull and clean later this week. Switched Tylan SiH4 cylinder to B. Diffusion Date: 7/22/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 26.45/30 Tylan 10-Nitride yellow bubbles/haze?? 16.8/30 Tylan 11-BPSG-LTO yellow 25.6/30 Tylan 12-FGA Up Tystar Up 6.0/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 750- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jul 23 07:40:03 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 23 Jul 2003 07:40:03 -0700 Subject: Diffusion Morning Report 7/23/03 Message-ID: <3F1E9E43.341A71B2@snf.stanford.edu> Good Morning All, Things are looking good this morning. Bob 101 reported low temp on poly but it looks like it is tracking ok now, will observe. Changed bad lamp on Epi. LTO and poly getting close to pull and clean. LTO going down tomorrow for pull and clean. Poly is not far behind, Scheduled for Monday. Diffusion Date: 7/23/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 26.65/30 Possible temp problem Tylan 10-Nitride yellow bubbles/haze?? 17.4/30 Tylan 11-BPSG-LTO yellow 27.6/30 Tylan 12-FGA Up Tystar Up 6.0/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 50- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From mw1200 at naver.com Thu Jul 24 19:22:55 2003 From: mw1200 at naver.com (곽미화) Date: Thu, 24 Jul 2003 20:22:55 -0600 Subject: (광고)사랑행ㅅ~~~~~~~`^^* Message-ID: An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Thu Jul 24 08:03:42 2003 From: seymour at snf.stanford.edu (Ray Seymour) Date: Thu, 24 Jul 2003 08:03:42 -0700 Subject: Diffusion Morning Report Message-ID: <3F1FF54E.FD9FD36E@snf.stanford.edu> LTO is down for a pull and clean. No further problems with Poly temp, reported or observed. Poly will be going down for a pull and clean on Monday. Date: 7/24/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Yellow Possible temp problems 27/30 Tylan 10-Nitride Yellow Bubbles/haze 21/30 Tylan 11-BPSG-LTO Down pull and clean Tylan 12-FGA Up Tystar Up 6.04/30 Doped Poly Down TEOS Yellow Tylan 16 N/A Burn Box Up Zygo Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 50- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jul 25 06:59:43 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 25 Jul 2003 06:59:43 -0700 Subject: Diffusion Morning Report 7/25/03 Message-ID: <3F2137CF.11E04150@snf.stanford.edu> Good Morning all, Everything looking good LTO is going back together, Poly is going down Monday for pull and clean . Burn box clean this morning. Diffusion Date: 7/25/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 27.5/30 Tylan 10-Nitride yellow bubbles/haze?? 21.3/30 Tylan 11-BPSG-LTO Down Pull and clean 0/30 Tylan 12-FGA Up Tystar Up 6.0/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up-Cleaning this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 50- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From latta at snf.stanford.edu Fri Jul 25 09:07:16 2003 From: latta at snf.stanford.edu (Nancy Latta) Date: Fri, 25 Jul 2003 09:07:16 -0700 Subject: Diffusion Morning Report 7/25/03 In-Reply-To: <3F2137CF.11E04150@snf.stanford.edu> References: <3F2137CF.11E04150@snf.stanford.edu> Message-ID: <3F2155B4.7060906@snf.stanford.edu> Folks, A couple of things to add and keep an eye on (and I admit that I erred in not putting them in problem mode- sorry). 1) The moan is back. Ray thinks that it is the pump at vent and by pulling at the door it goes away. 2) A user reported 'water coming out of tylan1'. There was a spray pattern on the deck under tylan 4. The program running was WET850, which is fairly low temp. Mike and Ray took a look at it, but no problem was identified. Nancy Ted Berg wrote: > Good Morning all, > Everything looking good LTO is going back together, Poly is going > down Monday for pull and clean . Burn box clean this morning. > > Diffusion Date: 7/25/2003 > Tube Name/Number Status Comments THICKNESS-Change at > Tylan 1 Up > Tylan 2 Up > Tylan 3 Up > Tylan 4 Up > Tylan 5-BBr3 Up > Tylan 6-POCl3 Up > Tylan 7-Dirty Ox Up > Tylan 8-SiGe Up *9.9/30* > Tylan 9-Poly Up * 27.5/30* > Tylan 10-Nitride *yellow bubbles/haze?? 21.3/30* > Tylan 11-BPSG-LTO* Down Pull and clean 0/30* > Tylan 12-FGA Up > Tystar Up *6.0/30* > Doped Poly Down > TEOS yellow > Tylan 16 N/A > Burn Box Up-*Cleaning this morning* > ZYGO Up > > GAAS 22 UP > GAAS 23 UP > > SiH4 for furnaces Change at 100PSI *Currently 50- A(c7) on line* > > -- Nancy Latta Stanford Nanofabrication Facility CIS Room 145 420 Via Palou Mall Stanford, CA 94305-4070 (650) 725-6727 latta at snf.stanford.edu From tberg at snf.stanford.edu Mon Jul 28 08:29:17 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 28 Jul 2003 08:29:17 -0700 Subject: Diffusion Morning Report 07/28/03 Message-ID: <3F25414D.65FF404D@snf.stanford.edu> Good morning all, Looking pretty good LTO had a broken Cantilever sheath. Mike is replacing it and then will be on to pull and clean on Poly. Epi may go down today for HCL and germane cylinder changes. Nitride saga continues. Everything else looks pretty good. Diffusion Date: 7/28/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Down Down for Pull and clean 0/30 Tylan 10-Nitride yellow problem with newlsn recipe-lonh378 ok 22.1/30 Tylan 11-BPSG-LTO Down broken cantilever sheath 3.1/30 Tylan 12-FGA Up Tystar Up 6.0/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 720- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Jul 29 07:56:15 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 29 Jul 2003 07:56:15 -0700 Subject: Diffusion Morning Report 7/29/03 Message-ID: <3F268B0F.F85EDE36@snf.stanford.edu> Good Morniing all, Looking Ok this morning, Poly pull and clean completed needs test, Nitride still has bubble issue. Two cylinders changed on Epi Yesterday-GE and HCl. the Ammonia that feeds Nitride and AG 4108 has some issues and Panel may need to be replaced. Diffusion Date: 7/29/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Down Pull and clean completed-needs test 0/30 Tylan 10-Nitride yellow bubble problem-possible NH3 panel change 22.6/30 Tylan 11-BPSG-LTO Up 5.2/30 Tylan 12-FGA Up Tystar Up 6.0/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 50- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jul 30 07:52:32 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 30 Jul 2003 07:52:32 -0700 Subject: Diffusion Morning Report 7/30/03 Message-ID: <3F27DBAF.4953F2B8@snf.stanford.edu> Good Morning All, Things are looking good. Burn box is back up. Poly is still waiting test. Nitride still has bubble issues. Both gas cylinders for epi held pressure. Everything else looking good. SiH4 for Tylans successfully switched to side B automatically. Diffusion Date: 7/30/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Down Pull and clean completed-needs test .4/30 Tylan 10-Nitride yellow bubble problem-possible NH3 panel change 23.3/30 Tylan 11-BPSG-LTO Up 6.6/30 Tylan 12-FGA Up Tystar Up 6.0/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up Bad CB-replaced with fuse temporarily ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 720- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From mw1200 at naver.com Thu Jul 31 11:38:40 2003 From: mw1200 at naver.com (곽미화) Date: Thu, 31 Jul 2003 12:38:40 -0600 Subject: (광고)"7월마지막 마무리 잘하세요~~~~~~`` Message-ID: An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jul 31 07:47:50 2003 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 31 Jul 2003 07:47:50 -0700 Subject: [Fwd: Diffusion Morning Report 07/31/03] Message-ID: <3F292C16.7020206@snf.stanford.edu> -------- Original Message -------- Subject: Diffusion Morning Report 07/31/03 Date: Thu, 31 Jul 2003 07:32:27 -0700 From: ted berg To: interested furnace people Good Morning all, Things are looking good this morning, all Lps up. Nitride going down Tues. for pull and clean and to check out NH3 flow on AG 4108. Diffusion Date: 7/31/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up .7/30 Tylan 10-Nitride yellow bubble problem-possible NH3 panel change 24.3/30 Tylan 11-BPSG-LTO Up 9.04/30 Tylan 12-FGA Up Tystar Up 9.0/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces switched to B automatically Currently 720- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: