From tberg at snf.stanford.edu Mon Jun 2 06:39:16 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 02 Jun 2003 06:39:16 -0700 Subject: Diffusion Morning Report 6/02/03 Message-ID: <3EDB5384.6C16CD3E@snf.stanford.edu> Good Morning all , Looking good this morning. Someone put tube 4 down for broken wafer.i think it should have only been problem. Mike removed a small chip. everything else looking good. Diffusion Date: 6/2/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/30 Tylan 9-Poly Up 13.8/30 Tylan 10-Nitride Up 19.1/30 Tylan 11-BPSG-LTO Up 23.8/30 Tylan 12-FGA Up Tystar Up 3.5/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 440- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Jun 3 13:22:22 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 03 Jun 2003 13:22:22 -0700 Subject: Diffusion Morning Report 06/03/03 Message-ID: <3EDD037D.4912A8D9@snf.stanford.edu> Good Morning all, Looking pretty good this morning. Poly has a problem with the MFS 460 everything else looking good. Not sure whats going on with epi. Diffusion Date: 6/3/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/30 Tylan 9-Poly Down MFS 460 problems 13.8/30 Tylan 10-Nitride Up 19.4/30 Tylan 11-BPSG-LTO Up 25.6/30 Tylan 12-FGA Up Tystar Up 3.5/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 440- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jun 4 06:27:32 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 04 Jun 2003 06:27:32 -0700 Subject: Diffusion Morning Report 06/04/03 Message-ID: <3EDDF3C4.9D9EA6D1@snf.stanford.edu> Good Morning all, A few issues this morning, Poly has N2 problems, Epi still has a leak issue. Everything else looking good. Diffusion Date: 6/4/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/30 Tylan 9-Poly Down MFS 460 problems-n2 14.2/30 Tylan 10-Nitride Up 21.3/30 Tylan 11-BPSG-LTO Up 27.7/30 Tylan 12-FGA Up Tystar Up 3.5/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 420- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jun 5 06:29:47 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 05 Jun 2003 06:29:47 -0700 Subject: Diffusion Morning Report 6/5/03 Message-ID: <3EDF45CA.1CA5B108@snf.stanford.edu> Good Morning all, Things are looking pretty good, poly is back up thanks to Ray, mike is vacuuming flakes from LTO which is getting close to pull and clean. Epi still has haze although leak rate is better after disassembly of pump lines. Diffusion Date: 6/5/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/30 Tylan 9-Poly Up 14.4/30 Tylan 10-Nitride Up 23.3/30 Tylan 11-BPSG-LTO yellow some flaking-Mike vacuuming it 29.7/30 Tylan 12-FGA Up Tystar Up 3.5/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 410- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Jun 9 09:21:11 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 09 Jun 2003 09:21:11 -0700 Subject: Diffusion Morning report 06/09/03 Message-ID: <3EE4B3F7.54560E2@snf.stanford.edu> Good Morning all, Looking pretty good . Ray is looking at Poly to check on possible pressure issues. Epi is running again after contactor change. LTO and Nitride getting close to pull and clean. Diffusion Date: 6/9/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/30 Tylan 9-Poly yellow Possible pressure issues 20.8/30 Tylan 10-Nitride Up 25.8/30 Tylan 11-BPSG-LTO Up 31.7/30 Tylan 12-FGA Up Tystar Up 3.5/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 380- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Jun 10 07:19:18 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 10 Jun 2003 07:19:18 -0700 Subject: Diffusion Morning Report 06/10/03 Message-ID: <3EE5E8E5.E6AB72C3@snf.stanford.edu> Good Morning all, Looking good this morning, mike adjusted cantilever to address the issue on BPSG, we are checking out TYlan 4 H2/O2 issue. Epi is being tested by Maurice. Everything else SEEMS TO BE OK> Diffusion Date: 6/10/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 yellow No H2/O2 flow Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/30 Tylan 9-Poly Up 21.3/30 Tylan 10-Nitride Up 26.2/30 Tylan 11-BPSG-LTO Up 32.7/30 Tylan 12-FGA Up Tystar Up 3.5/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 370- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jun 11 06:40:58 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 11 Jun 2003 06:40:58 -0700 Subject: Diffusion Morning report 06/11/03 Message-ID: <3EE7316A.11F767DA@snf.stanford.edu> Good Morning All, Looking good this mornining evertything is up. Epi is back to Maurice for process tweeking. Diffusion Date: 6/11/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/30 Tylan 9-Poly Up 21.8/30 Tylan 10-Nitride Up 26.2/30 Tylan 11-BPSG-LTO Up 32.7/30 Tylan 12-FGA Up Tystar Up 3.5/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 365- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jun 12 06:39:09 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 12 Jun 2003 06:39:09 -0700 Subject: Diffusion Morning Report 6/12/03 Message-ID: <3EE8827C.EF8D498@snf.stanford.edu> Good Morning all, Looking good everything is up except Epi. Tubes nitride and BPSG are going down next week for pull and clean. Burn box down tomorrow morning for clean. Diffusion Date: 6/12/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/30 Tylan 9-Poly Up 22.1/30 Tylan 10-Nitride Up 27.7/30 Tylan 11-BPSG-LTO Up 34.5/30 Tylan 12-FGA Up Tystar Up 3.6/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 360- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jun 13 07:08:00 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 13 Jun 2003 07:08:00 -0700 Subject: Diffusion Morning report 6/13/03 Message-ID: <3EE9DAC0.EE29C3CD@snf.stanford.edu> Good Morning all, Looking good this morning , everything is up life is good for the moment. Nitride is going down on Tuesday for pull and clean and LTO on Wednesday. Mike vacuumed flakes off LTO this morning. Burn box cleaned this morning Diffusion Date: 6/13/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/30 Tylan 9-Poly Up 22.8/30 Tylan 10-Nitride Up 27.9/30 Tylan 11-BPSG-LTO Up 39.0/30 Tylan 12-FGA Up Tystar Up 3.6/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 340- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Jun 16 06:36:35 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 16 Jun 2003 06:36:35 -0700 Subject: Diffusion Morning report 6/16/03 Message-ID: <3EEDC7E2.946C2FD8@snf.stanford.edu> Good morning all, Everything looking good this morning. Changing TEOS cannister. Nitride going down tomorrow for pull and clean with LTO on Wednesday. Diffusion Date: 6/16/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/30 Tylan 9-Poly Up 23.5/30 Tylan 10-Nitride Up 27.9/30 Tylan 11-BPSG-LTO Up 40.3/30 Tylan 12-FGA Up Tystar Up 3.6/30 Doped Poly Down TEOS yellow Changing cannister today Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 320- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Jun 17 06:33:45 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 17 Jun 2003 06:33:45 -0700 Subject: Diffusion Morning Report 6/17/03 Message-ID: <3EEF18B9.76BDA2C2@snf.stanford.edu> Good Morning all, Looking good this morning. Nitride down for pull and clean Tomorrow LTO going down. Everything else looking good. Diffusion Date: 6/17/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/30 Tylan 9-Poly Up 24.0/30 Tylan 10-Nitride Down Pull and clean 0/30 Tylan 11-BPSG-LTO Up 40.3/30 Tylan 12-FGA Up Tystar Up 3.6/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 310- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jun 18 06:42:45 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 18 Jun 2003 06:42:45 -0700 Subject: Diffusion Morning Report 6/18/03 Message-ID: <3EF06C55.1E5BE1CE@snf.stanford.edu> Good Morning all, Looking good . Nitride was pulled and cleaned yesterday. coating this morning. LTO is down for scheduled pull and clean. Everything else looking good. Diffusion Date: 6/17/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/30 Tylan 9-Poly Up 26.0/30 Tylan 10-Nitride Down Pull and clean Completed, coating 0/30 Tylan 11-BPSG-LTO Down Pull and clean 0/30 Tylan 12-FGA Up Tystar Up 3.6/30 ?? Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 290- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jun 19 06:46:05 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 19 Jun 2003 06:46:05 -0700 Subject: Diffusion Morning Report 6/19/03 Message-ID: <3EF1BE9C.30BE4FFD@snf.stanford.edu> Good Morning all, Looking good Nitride is back up after pull and clean and LTO is coated and ready for a test. Everything else looking OK. Diffusion Date: 6/19/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/30 Tylan 9-Poly Up 26.0/30 Tylan 10-Nitride Up .6/30 Tylan 11-BPSG-LTO Down Pull and clean and coat completed 0/30 Tylan 12-FGA Up Tystar Up 3.6/30 ?? Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 280- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jun 20 07:15:50 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 20 Jun 2003 07:15:50 -0700 Subject: Diffusion Morning Report 6/20/03 Message-ID: <3EF31716.8C93B4CC@snf.stanford.edu> Good Morning all, Things are loooking good this morning. LTO is waiting for a test after a few issues yesterday. Everything else looking good. Diffusion Date: 6/20/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/30 Tylan 9-Poly Up 26.0/30 Tylan 10-Nitride Up .7/30 Tylan 11-BPSG-LTO Down Pull and clean. Needs test 0/30 Tylan 12-FGA Up Tystar Up 3.6/30 ?? Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 280- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Jun 23 06:48:17 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 23 Jun 2003 06:48:17 -0700 Subject: Diffusion Morning report 6/23/03 Message-ID: <3EF70520.75EBC93@snf.stanford.edu> Good Morning all, Looking Ok this morning. Poly is down for pull and clean, LTO s uniformity is not great. it was run over the weekend don't know how the uniformity was. Everyhting else looks good. Diffusion Date: 6/23/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/30 Tylan 9-Poly Down Pull and clean 0/30 Tylan 10-Nitride Up .9/30 Tylan 11-BPSG-LTO yellow uniformity not great 6.3/30 Tylan 12-FGA Up Tystar Up 3.6/30 ?? Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 260- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Tue Jun 24 07:51:22 2003 From: seymour at snf.stanford.edu (Ray Seymour) Date: Tue, 24 Jun 2003 07:51:22 -0700 Subject: Diffusion morning report 2/24/03 Message-ID: <3EF8656A.BC87B25A@snf.stanford.edu> Diffusion Date: 6/24/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/30 Tylan 9-needs test after pull and clean 0/30 Tylan 10-Nitride Up 3.23/30 Tylan 11-BPSG-LTO yellow uniformity not great 7.27/30 Tylan 12-FGA Up Tystar Up 3.6/30 ?? Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 260- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jun 25 06:40:22 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 25 Jun 2003 06:40:22 -0700 Subject: Diffusion Morning Report 6/25/03 Message-ID: <3EF9A646.2FF3C937@snf.stanford.edu> Morning all, Not looking too good now . Lto and Nitride are both down for clean or leak. rest of the area looks fine stay tuned. Diffusion Date: 6/25/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/30 Tylan 9-Poly Up .6/30 Tylan 10-Nitride Down Tube dusted 0/30 Tylan 11-BPSG-LTO Down uniformity not great-injector change 7.3/30 Tylan 12-FGA Up Tystar Up 3.6/30 ?? Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 260- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jun 26 07:01:58 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 26 Jun 2003 07:01:58 -0700 Subject: Diffusion Morning Update 6/26/03 Message-ID: <3EFAFCD6.4C9C6070@snf.stanford.edu> Good morning all, Looking Ok this morning. Nitride is back up, LTO is changed and coated Needs test. Everything else is good. Diffusion Date: 6/26/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/30 Tylan 9-Poly Up .8/30 Tylan 10-Nitride Up Pull and clean completed .8/30 Tylan 11-BPSG-LTO Down tube changed needs test 0/30 Tylan 12-FGA Up Tystar Up 4.3/30 ?? Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 255- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jun 27 06:38:10 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 27 Jun 2003 06:38:10 -0700 Subject: Diffusion Morning report 6/27/03 Message-ID: <3EFC48C1.D33C0F65@snf.stanford.edu> Good Moning all, Things are looking good this morning everything is up. LTO uniformity not great but it should improve with more dep. Diffusion Date: 6/27/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/30 Tylan 9-Poly Up .9/30 Tylan 10-Nitride Up 1.3/30 Tylan 11-BPSG-LTO yellow up uniformity not great .6/30 Tylan 12-FGA Up Tystar Up 4.3/30 ?? Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 245- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Jun 30 06:39:05 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 30 Jun 2003 06:39:05 -0700 Subject: Diffusion Morning Report 6/30/03 Message-ID: <3F003D79.5DA4576F@snf.stanford.edu> Good Morning All, Things are looking good. LTO still has uniformity issues. Everything else looking good. Diffusion Date: 6/30/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/30 Tylan 9-Poly Up .9/30 Tylan 10-Nitride Up 2.1/30 Tylan 11-BPSG-LTO yellow up uniformity not great 1.1/30 Tylan 12-FGA Up Tystar Up 4.3/30 ?? Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 235- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: