From tberg at snf.stanford.edu Mon Mar 3 07:23:05 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 03 Mar 2003 07:23:05 -0800 Subject: Diffusion morning Report 03/03/03 Message-ID: <3E637359.63346007@snf.stanford.edu> Good morning all, A few issues this morning: tystar coming back from pull and clean, POCl3 is dirty and will soon need a clean, BPSG is flaking and needs to be vacuumed. Diffusion Date: 3/3/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 yellow dirty Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 7.04/30 Tylan 9-Poly Up 11.4/30 Tylan 10-Nitride Up 16.35/30 Tylan 11-BPSG-LTO yellow flaking 25.6/30 Tylan 12-FGA Up Tystar Down Pull and clean 0/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 480 psi -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Mar 4 06:53:51 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 04 Mar 2003 06:53:51 -0800 Subject: Diffusion Morning Report 03/04/03 Message-ID: <3E64BDFF.B397D18B@snf.stanford.edu> Good Morning all, Looking pretty good, POCl3 is dirty , Tystar is back up, BPSG going down for clean on Monday. Diffusion Date: 3/4/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 yellow dirty Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.0/30 Tylan 9-Poly Up 11.5/30 Tylan 10-Nitride Up 16.4/30 Tylan 11-BPSG-LTO Up 26.3/30 Tylan 12-FGA Up Tystar up Pulled and cleaned yesterday .5/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently@ 460 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Mar 5 06:40:21 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 05 Mar 2003 06:40:21 -0800 Subject: Diffusion Morning report 03/05/03 Message-ID: <3E660C55.F0E38FE9@snf.stanford.edu> Good Morning all, Lookinhg pretty good, some issues with BPSG- looking into it. POCl3 is dirty looking into seal ring for door. Diffusion Date: 3/5/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 yellow dirty Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.0/30 Tylan 9-Poly Up 11.9/30 Tylan 10-Nitride Up 17.4/30 Tylan 11-BPSG-LTO yellow flakes and 1 pump fail 27.9/30 Tylan 12-FGA Up Tystar up 4.5/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up cleaned yesterday ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently@ 430 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Mar 6 06:57:08 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 06 Mar 2003 06:57:08 -0800 Subject: Diffusion Morning report 03/06/03 Message-ID: <3E6761C3.12EA3A09@snf.stanford.edu> Good Morning all, Everything looking good. POCl3 still dirty, BPSG will go down on Monday for pull and clean. Burn box clean tomorrow morning. Diffusion Date: 3/6/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 yellow dirty Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.0/30 Tylan 9-Poly Up 11.9/30 Tylan 10-Nitride Up 17.7/30 Tylan 11-BPSG-LTO Up 28.9/30 Tylan 12-FGA Up Tystar up 4.5/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently@ 430 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From latta at snf.stanford.edu Thu Mar 6 09:53:13 2003 From: latta at snf.stanford.edu (Nancy Latta) Date: Thu, 06 Mar 2003 09:53:13 -0800 Subject: Diffusion meeting summary 03/06/03 In-Reply-To: <3E6761C3.12EA3A09@snf.stanford.edu> References: <3E6761C3.12EA3A09@snf.stanford.edu> Message-ID: <3E678B09.3060200@snf.stanford.edu> This morning meeting; POCL3 is going to be cleaned on Mon. A fair bit of discussion about strating the pull and clean on tylanbpsg. Do we 'bump' users off thier reseved time and risk their wrath, or shut the system down to assure good film quality? We decided to clean the system. The flaking is at the poinr where it needs to be vacuumed every run. The lab member who was scheduled for the morning has been informed of the shutdown via email. Dat's it! -- Nancy Latta Stanford Nanofabrication Facility CIS Room 145 420 Via Palou Mall Stanford, CA 94305-4070 (650) 725-6727 latta at snf.stanford.edu From tberg at snf.stanford.edu Fri Mar 7 06:45:18 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 07 Mar 2003 06:45:18 -0800 Subject: Diffusion Morning Report 03/07/03 Message-ID: <3E68B07E.2D27F68F@snf.stanford.edu> Good morning all, Things are pretty calm. BPSG is being pulled and cleaned, burn box is being checked and we will address POCl3 next week. Diffusion Date: 3/7/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 yellow dirty Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.0/30 Tylan 9-Poly Up 11.9/30 Tylan 10-Nitride Up 18.1/30 Tylan 11-BPSG-LTO Down Pull and clean 0/30 Tylan 12-FGA Up Tystar up 4.5/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently@ 430 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Mar 11 08:48:21 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 11 Mar 2003 08:48:21 -0800 Subject: Diffusion Morning report 03/11/03 Message-ID: <3E6E1355.F1768C8C@snf.stanford.edu> Morning all, Nitride has a bad Lo NH3 MFC will replace ASAP. BPSG had abroken TC sheath. POCl3 is still dirty. tube cleaner is down waiting for Motor. Diffusion Date: 3/11/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 yellow dirty Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.0/30 Tylan 9-Poly Up 13.9/30 Tylan 10-Nitride yellow Problem with Lo NH3 18.75/30 Tylan 11-BPSG-LTO Down Broken TC sheath, leak 8.3/30 Tylan 12-FGA Up Tystar up 9.75/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently@ 320 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Mar 12 07:07:56 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 12 Mar 2003 07:07:56 -0800 Subject: Diffusion Morning Report 03/11/03 Message-ID: <3E6F4D4C.437D1A99@snf.stanford.edu> Good Morning all, Everything looking good except tube cleaner, still looking for parts. Thanks to Mike D. and Ray for all their efforts on getting BPSG and Nitride back up and to Gladys and Maurice for testing them after we were finished. Still waiting on POCl3. Diffusion Date: 3/12/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 yellow dirty Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.0/30 Tylan 9-Poly Up 13.9/30 Tylan 10-Nitride Up 19.15/30 Tylan 11-BPSG-LTO Up 10.0/30 Tylan 12-FGA Up Tystar up 9.75/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently@ 320 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Mar 13 06:55:09 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 13 Mar 2003 06:55:09 -0800 Subject: diffusion Morning Report 03/13/03 Message-ID: <3E709BCD.51B286DD@snf.stanford.edu> Good Morning All, Everything looking good , POCl3 is down for clean, burn box going down for clean tomorrow morning. Diffusion Date: 3/13/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Down dirty-pull and clean Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.0/30 Tylan 9-Poly Up 14.1/30 Tylan 10-Nitride Up 21.1/30 Tylan 11-BPSG-LTO Up 11.35/30 Tylan 12-FGA Up Tystar up 9.75/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently@ 300 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Mar 14 07:59:58 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 14 Mar 2003 07:59:58 -0800 Subject: Diffusion Morning report 03/14/03 Message-ID: <3E71FC7E.22C79389@snf.stanford.edu> Good morning all, Overall looking good, POCl3 tube has been replaced and is going back together, burn box pressure was quite high cleaned it. Someone was not logged on to CORAL but had a run in the poly tube even though we had reservations Diffusion Date: 3/14/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Down dirty-pull and clean in progress Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.0/30 Tylan 9-Poly Up 14.7/30 Tylan 10-Nitride Up 21.8/30 Tylan 11-BPSG-LTO Up 15.01/30 Tylan 12-FGA Up Tystar up 9.75/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up Cleaned this morning- it was quite high ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently@ 285 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Mar 17 06:49:15 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 17 Mar 2003 06:49:15 -0800 Subject: Diffusion Morning Report 03/17/03 Message-ID: <3E75E06B.C4F389AB@snf.stanford.edu> Good Morning all, Looking pretty good, tylan 4 down to replace door o-rings, everything else looking good. Diffusion Date: 3/17/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 down-replacing door o-rings-opened ok Tylan 5-BBr3 Up Tylan 6-POCl3 Up pull and clean completed Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.0/30 Tylan 9-Poly Up 15.6/30 Tylan 10-Nitride Up 22.77/30 Tylan 11-BPSG-LTO Up 15.5/30 Tylan 12-FGA Up Tystar up 9.85/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently@ 280 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Mar 18 06:43:34 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 18 Mar 2003 06:43:34 -0800 Subject: Diffusion Morning Report 3/18/03 Message-ID: <3E773096.40ED4789@snf.stanford.edu> Good Morning All, Everything looking good. SiH4 for tylans will be changed tomorrow Morning Diffusion Date: 3/18/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.0/30 Tylan 9-Poly Up 16/30 Tylan 10-Nitride Up 25/30 Tylan 11-BPSG-LTO Up 17.2/30 Tylan 12-FGA Up Tystar up 10.0/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently@ 250 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Mar 19 07:13:15 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 19 Mar 2003 07:13:15 -0800 Subject: diffusion Morning Report 3/19/03 Message-ID: <3E78890A.6DB7D371@snf.stanford.edu> Good morning all, All is looking good tylan BPSG, POLY, SiGE, Tystar down for cylinder change. Diffusion Date: 3/19/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Down SiH4 Cylinder Change 8.0/30 Tylan 9-Poly Down SiH4 Cylinder Change 16.7/30 Tylan 10-Nitride Up 26.6/30 Tylan 11-BPSG-LTO Down SiH4 Cylinder Change 19.2/30 Tylan 12-FGA Up Tystar Down SiH4 Cylinder Change 10.0/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently changing -------------- next part -------------- An HTML attachment was scrubbed... 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The USB Drives are compatible with Win98, ME, 2K, XP, Mac OS 9.2 & above, Linux 2.4.24 & Please visit us at http://on-click.net or by calling us at 562-856-0256 -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Mar 20 08:14:39 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 20 Mar 2003 08:14:39 -0800 Subject: Diffusion Morning Report 03/20/03 Message-ID: <3E79E8EF.8538D33F@snf.stanford.edu> Good Morning all, All is looking good, SiH4 change completed needs test. Tylan 3 back up after o-Ring Change and TCA clean. Diffusion Date: 3/20/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Orings on door changed and TCA clean done Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Down SiH4 Cylinder Change-completed needs test 8.0/30 Tylan 9-Poly Down SiH4 Cylinder Change-completed needs test 16.7/30 Tylan 10-Nitride Up 26.7/30 Tylan 11-BPSG-LTO Down SiH4 Cylinder Change-completed needs test 19.2/30 Tylan 12-FGA Up Tystar Down SiH4 Cylinder Change-completed needs test 10.0/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 700PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Mar 21 07:33:57 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 21 Mar 2003 07:33:57 -0800 Subject: Diffusion Morning Report 03/21/03 Message-ID: <3E7B30E5.3CEADC55@snf.stanford.edu> Good Morning all, Everything looking good, Burn box cleaned this morning, Tube 1 had O-rings and TCA clean yesterday. Changed TEOS cannister yesterday. Diffusion Date: 3/21/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Door o-rings changed yesterday Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.0/30 Tylan 9-Poly Up 17.3/30 Tylan 10-Nitride Up 26.8/30 Tylan 11-BPSG-LTO Up 19.82/30 Tylan 12-FGA Up Tystar Up 13.0/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up Cleaned this morning ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 680PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Mar 24 07:30:39 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 24 Mar 2003 07:30:39 -0800 Subject: Diffusion Morning Report 3/24/03 Message-ID: <3E7F249F.A4E8895F@snf.stanford.edu> Good morning all, TEOS dep rate dropped-pulling tube, bad uniformity on Tylan1, everything else looks ok. Nitride is gettng close to pull and clean. We are shooting for Thursday morning. Diffusion Date: 3/24/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow bad uniformity Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.0/30 Tylan 9-Poly Up 17.5/30 Tylan 10-Nitride Up 27.2/30 Tylan 11-BPSG-LTO Up 22.7/30 Tylan 12-FGA Up Tystar Up 13.6/30 Doped Poly Down TEOS Down Drop in dep rate-cleaning tube Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 660PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Mar 25 07:27:27 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 25 Mar 2003 07:27:27 -0800 Subject: Diffusion Morning Report 3/25/03 Message-ID: <3E80755E.68A39899@snf.stanford.edu> Good Morning all, Teos pull and clean completed, tylan 1 run yesterday- no inputs on uniformity. Everything else looking ok. Nitride getting close. Diffusion Date: 3/25/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow bad uniformity Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.0/30 Tylan 9-Poly Up 17.8/30 Tylan 10-Nitride Up 27.7/30 Tylan 11-BPSG-LTO Up 22.7/30 Tylan 12-FGA Up Tystar Up 13.6/30 Doped Poly Down TEOS yellow Pulled and cleaned tube and boats, checked temp Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 660PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Mar 26 08:13:17 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 26 Mar 2003 08:13:17 -0800 Subject: Diffusion Morning Report 3/26/03 Message-ID: <3E81D19D.36665B49@snf.stanford.edu> Good Morning all, Tylan 1 has bad uniformity, Changed canister again for TEOS. Everything else looking good. Maintenance has hazwoper training again today from 9:00am to 1:00pm. Diffusion Date: 3/26/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Down bad uniformity Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.0/30 Tylan 9-Poly Up 17.9/30 Tylan 10-Nitride Up 28.3/30 Tylan 11-BPSG-LTO Up 23.9/30 Tylan 12-FGA Up Tystar Up 13.6/30 Doped Poly Down TEOS yellow Changed canister again this morning Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 660PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Mar 27 07:40:47 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 27 Mar 2003 07:40:47 -0800 Subject: Diffusion Morning Report 3/27/03 Message-ID: <3E831B7E.5D8DAB6@snf.stanford.edu> Good Morning All, Looking pretty good,Changed injector on Tylan 1 and adjusted door. TEOS may still have dep rate Issues. Nitride will be down for pull and clean on Monday, LTO is not far behind. Burn box clean in the morning. Diffusion Date: 3/27/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Down bad uniformity-Changed Injector , TCA clean, Adjusted Door Needs test Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.0/30 Tylan 9-Poly Up 20.0/30 Tylan 10-Nitride Up 28.8/30 Tylan 11-BPSG-LTO Up 25.9/30 Tylan 12-FGA Up Tystar Up 14.3/30 Doped Poly Down TEOS yellow DEP Rate Issues Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 660PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Mar 28 06:54:20 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 28 Mar 2003 06:54:20 -0800 Subject: Diffusion Morning Report 3/28/03 Message-ID: <3E84621C.F7D82C68@snf.stanford.edu> Good Friday Morning All, Tylan 1 is back up, Burn box cleaned this Morning, Nitride to be cleaned on Monday, BPSG on Tues. TEOS may have a bad flow controller. Diffusion Date: 3/28/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.0/30 Tylan 9-Poly Up 22.0/30 Tylan 10-Nitride Up 29.0/30 Tylan 11-BPSG-LTO Up 28.5/30 Tylan 12-FGA Up Tystar Up 17.3/30 Doped Poly Down TEOS yellow DEP Rate Issues Tylan 16 N/A Burn Box Up Cleaned This Morning ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 660PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Mar 31 06:56:14 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 31 Mar 2003 06:56:14 -0800 Subject: Diffusion Morning Report 3/31/03 Message-ID: <3E88570E.7F34BD36@snf.stanford.edu> Good Morning all, Mike is back and will be busy pulling Nitride today and BPSG tomorrow. To Sheath or not to Sheath, that is the question?? Do we want to put BPSG back together with sheaths or not?? Tylan 3 had questionable uniformity last week Ray cheked it out and all loooks ok needs a test. TEOS may need MFC sent out for clean and cal. Diffusion Date: 3/31/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 yellow Possible bad uniformity-checked Friday needs test Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.0/30 Tylan 9-Poly Up 22.0/30 Tylan 10-Nitride Down Pull and clean 0/30 Tylan 11-BPSG-LTO Up High 31.8/30 Tylan 12-FGA Up Tystar Up 17.3/30 Doped Poly Down TEOS yellow DEP Rate Issues Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 660PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: