From tberg at snf.stanford.edu Thu May 1 07:25:58 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 01 May 2003 07:25:58 -0700 Subject: Diffusion Morning Report 5/1/03 Message-ID: <3EB12E76.40F36FA5@snf.stanford.edu> Good Morning all, Looking better each day. LTO, Nitride up . Poly still thin but the fact that LTO is ok says SiH4 line is ok. Tystar and SiGe will be tested today. TEOS mfc changed and retaped-looks good now. Diffusion Date: 5/1/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe yellow testing 8.5/30 Tylan 9-Poly Down testing-too thin-running another coat 0/30 Tylan 10-Nitride Up 19.1/30 Tylan 11-BPSG-LTO Up good test 14.1/30 Tylan 12-FGA Up Tystar Down testing-Temp cal-needs test 0/30 Doped Poly Down TEOS yellow Testing Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 560- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri May 2 07:04:42 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 02 May 2003 07:04:42 -0700 Subject: Diffusion Morning Report 05/02/03 Message-ID: <3EB27AF9.F436C8FD@snf.stanford.edu> Good Morning all, Things are a bit weird today, Poly is still low-has anyone measured refractive index? Tystar came out high. Furnace 3 is ok. Everything else looks good. Diffusion Date: 5/2/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe yellow testing 8.5/30 Tylan 9-Poly Down testing-too thin-running another coat .15/30 Tylan 10-Nitride Up 19.1/30 Tylan 11-BPSG-LTO Up good test 14.1/30 Tylan 12-FGA Up Tystar Down testing--needs test 0/30 Doped Poly Down TEOS yellow Testing Tylan 16 N/A Burn Box Up checked this morning ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 560- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon May 5 08:13:29 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 05 May 2003 08:13:29 -0700 Subject: Diffusion Morning report 5/05/03 Message-ID: <3EB67F99.CCF02C9F@snf.stanford.edu> Good morning all, Lots of issues this morning. Nitride had a leak on the recirc and spewed all of its oil out. the pump stopped. that is being addressed now. LTO had some process issues as did poly. SiGe and tystar seem to be ok. Epi has broken wafers that need to be removed. TEOS needs cannister change. Diffusion Date: 5/5/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.5/30 Tylan 9-Poly Down testing- .35/30 Tylan 10-Nitride Up had bad recirc-leaked oil-pump kicked off 19.1/30 Tylan 11-BPSG-LTO Up process issues 17.0/30 Tylan 12-FGA Up Tystar Up 0/30 Doped Poly Down TEOS Down Needs cannister changed Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 550- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue May 6 06:59:31 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 06 May 2003 06:59:31 -0700 Subject: Diffusion Morning Report 05/06/03 Message-ID: <3EB7BFC2.59FE3A29@snf.stanford.edu> Good Morning all, Lots of issues once again. Poly still having SiH4 issues-looking into sensor problem. Nitride pumping slowly and pump making a lot of noise. Checked LTO nothing found. TEOS cannister changed yesterday. Diffusion Date: 5/6/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.5/30 Tylan 9-Poly Down SiH4 issues .35/30 Tylan 10-Nitride yellow Pumping slow 19.5/30- pump making a lot of noise Tylan 11-BPSG-LTO yellow process issues 17.0/30 Tylan 12-FGA Up Tystar Up 0/30 Doped Poly Down TEOS yellow Cannister changed yesterday Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 550- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed May 7 06:30:57 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 07 May 2003 06:30:57 -0700 Subject: Diffusion Morning Report 05/07/03 Message-ID: <3EB90A91.AE9C10F8@snf.stanford.edu> Good Morning all, Things are looking pretty good the only issues are POLY, SiH4 flow and Epi cylinder changes. Diffusion Date: 5/7/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.5/30 Tylan 9-Poly Down SiH4 issues .35/30 Tylan 10-Nitride Up 19.5/30 Tylan 11-BPSG-LTO Up 21.9/30 Tylan 12-FGA Up Tystar Up 0/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 550- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu May 8 07:25:28 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 08 May 2003 07:25:28 -0700 Subject: Diffusion Morning Report 05/08/03 Message-ID: <3EBA68D7.288ECC3B@snf.stanford.edu> Good morning all, Things are looking pretty good. We are very close on Poly, Maurice please clean at least 3 wafers so we can test . Epi cylinder changes are completed. LTO is at 26 microns so will be going down for clean next week. Diffusion Date: 5/8/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.5/30 Tylan 9-Poly Down SiH4 issues .35/30 Tylan 10-Nitride Up 19.5/30 Tylan 11-BPSG-LTO Up 26.2/30 Tylan 12-FGA Up Tystar Up 0/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 545- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri May 9 07:45:35 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 09 May 2003 07:45:35 -0700 Subject: Diffusion Morning Report 05/09/03 Message-ID: <3EBBBF0E.92530CEE@snf.stanford.edu> Good Morning all, Things are looking good all furnaces are up including Lps. Cleaned burn box and Nitride exhaust line this morning. Diffusion Date: 5/9/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.5/30 Tylan 9-Poly Up .5/30 Tylan 10-Nitride Up 20.6/30 Tylan 11-BPSG-LTO Up 26.2/30 Tylan 12-FGA Up ? Tystar Up 0/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 535- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon May 12 06:37:51 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 12 May 2003 06:37:51 -0700 Subject: Diffusion Morning Report 05/12/03 Message-ID: <3EBFA3AF.EFB3E6AA@snf.stanford.edu> Good Morning all, Things are looking good this morning. LTO going down tomorrow morning for pull and clean. Diffusion Date: 5/12/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.5/30 Tylan 9-Poly Up .9/30 Tylan 10-Nitride Up 21.8/30 Tylan 11-BPSG-LTO Up 27.9/30 Tylan 12-FGA Up Tystar Up ?/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 520- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue May 13 06:45:21 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 13 May 2003 06:45:21 -0700 Subject: Diffusion Morning report 5/13/03 Message-ID: <3EC0F6F0.C38D3342@snf.stanford.edu> Good Morning All, Nitride had issues yesterday so it is down for pull and clean. LTO is also going down for pull and clean today. All else looks good. Diffusion Date: 5/13/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.5/30 Tylan 9-Poly Up .9/30 Tylan 10-Nitride Down pull and clean-pump change 0/30 Tylan 11-BPSG-LTO Down pull and clean 0/30 Tylan 12-FGA Up Tystar Up ?/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Currently 520- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed May 14 06:53:14 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 14 May 2003 06:53:14 -0700 Subject: Diffusion Morning Report 05/14/03 Message-ID: <3EC24A4A.179EDF59@snf.stanford.edu> Good Morning all, Nitride is on its way back up, pull and clean and pump change completed as well as a coat-waiting test results. LTO is going back together. Copy software for Zygo Cd writer installed yesterday. Everything else looks pretty good. Diffusion Date: 5/14/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.5/30 Tylan 9-Poly Up 3.12/30 Tylan 10-Nitride unknown Pull and clean completed-coat done 0/30 Tylan 11-BPSG-LTO Down Pull and clean completed 0/30 Tylan 12-FGA Up Tystar Up ?/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw-copy program installed GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 520- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu May 15 06:37:46 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 15 May 2003 06:37:46 -0700 Subject: Diffusion Morning Report 05/15/03 Message-ID: <3EC3982A.C20FCA97@snf.stanford.edu> Good Morning all, Things are looking good today everything is up. Ray is out today. life is good for the moment. Diffusion Date: 5/15/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.5/30 Tylan 9-Poly Up 5.9/30 Tylan 10-Nitride Up .2/30 Tylan 11-BPSG-LTO Up 0/30 Tylan 12-FGA Up Tystar Up ?/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 520- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri May 16 06:50:05 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 16 May 2003 06:50:05 -0700 Subject: Diffusion Morning report 05/16/03 Message-ID: <3EC4EC8D.81F7121E@snf.stanford.edu> Good Morning all, Things are looking good. Everything is is up. Epis pump was off, turned back on doing leak check now. Diffusion Date: 5/16/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.5/30 Tylan 9-Poly Up 6.5/30 Tylan 10-Nitride Up 3.6/30 Tylan 11-BPSG-LTO Up 1.6/30 Tylan 12-FGA Up Tystar Up 3.5/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 500- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon May 19 06:45:17 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 19 May 2003 06:45:17 -0700 Subject: Diffusion Morning Report 05/19/03 Message-ID: <3EC8DFED.AF749802@snf.stanford.edu> Good Morning all , Things are looking good today . A frayed cable on BPSG has gotten a lot of e-mails we are looking into it. Everything else looking good. Diffusion Date: 5/19/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.5/30 Tylan 9-Poly Up 7.2/30 Tylan 10-Nitride Up 6.8/30 Tylan 11-BPSG-LTO yellow Frayed cable on boatloader 9.9/30 Tylan 12-FGA Up Tystar Up 3.5/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 490- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue May 20 06:46:02 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 20 May 2003 06:46:02 -0700 Subject: Diffusion Morning Report 05/20/03 Message-ID: <3ECA319A.79148CEE@snf.stanford.edu> Good Morning all, Things are looking good everything up in diffusion. Epi going down for pull and clean today. Nitride in yellow for no dummies-where oh where are the dummies?? Diffusion Date: 5/20/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.5/30 Tylan 9-Poly Up 7.2/30 Tylan 10-Nitride Up 4.3/30-missing dummies Tylan 11-BPSG-LTO Up 10.52/30 Tylan 12-FGA Up Tystar Up 3.5/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 490- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed May 21 06:22:00 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 21 May 2003 06:22:00 -0700 Subject: Diffusion Morning Report 05/21/03 Message-ID: <3ECB7D78.6A85604C@snf.stanford.edu> Good Morning all, Everything looking good. Epi tube change went well Maurice is checking it out. Diffusion Date: 5/21/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.5/30 Tylan 9-Poly Up 7.6/30 Tylan 10-Nitride Up 7.9/30 Tylan 11-BPSG-LTO Up 13.2/30 Tylan 12-FGA Up Tystar Up 3.5/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 490- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu May 22 06:40:43 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 22 May 2003 06:40:43 -0700 Subject: Diffusion Morning Report 05/22/03 Message-ID: <3ECCD35A.57CD4FC7@snf.stanford.edu> Good Morning all, Few issues this morning- biggest is LTO pump fitting leak-looking into it. Tylan 4 door interlock made with door open. Epi leak rate a bit high. Diffusion Date: 5/22/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 yellow Door interlock made with door open Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/30 Tylan 9-Poly Up 3.5/30 Tylan 10-Nitride Up 7.9/30 Tylan 11-BPSG-LTO Down Problem with pump 13.2/30 Tylan 12-FGA Up Tystar Up 8.5/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 490- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri May 23 07:23:39 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 23 May 2003 07:23:39 -0700 Subject: Diffusion Morning Report 5/23/03 Message-ID: <3ECE2EEB.B699EF50@snf.stanford.edu> Good Morning all, Happy Friday Nancy have fun in Hawaii and don't worry about us slaving away here. Things are pretty much the same as yesterday. LTO is waiting for the pump, TYlan 4 has a door interlock problem . Burn box cleaned this morning. TEOS pump line cleaned this morning. Epi in Limbo. Diffusion Date: 5/23/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 yellow Door interlock made with door open Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/30 Tylan 9-Poly Up 9.7/30 Tylan 10-Nitride Up 10.1/30 Tylan 11-BPSG-LTO Down Problem with pump 13.2/30 Tylan 12-FGA Up Tystar Up 8.5/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 480- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue May 27 06:43:55 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 27 May 2003 06:43:55 -0700 Subject: Diffusion Morning report 05/27/03 Message-ID: <3ED36B9B.8E694CA9@snf.stanford.edu> Good Morning all, THings are looking ok, Poly is down for some kind of MFC issue-few details, Tylan 4 is down for door sensor issue. Diffusion Date: 5/27/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 yellow Door interlock made with door open Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/30 Tylan 9-Poly Down MFC problem??11.8/30 Tylan 10-Nitride Up 12/30 Tylan 11-BPSG-LTO Up 6/30 Tylan 12-FGA Up Tystar Up 3.5/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 465- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed May 28 06:30:05 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 28 May 2003 06:30:05 -0700 Subject: Diffusion Morning report 5/28/03 Message-ID: <3ED4B9DD.5E6D647A@snf.stanford.edu> Good Morning all, Looking pretty good this morning. Tylan 4 still down looking into door sensor, looking into epi leak rate. Diffusion Date: 5/28/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4down- Door interlock made with door open Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/30 Tylan 9-Poly Up 12.0/30 Tylan 10-Nitride Up 14.3/30 Tylan 11-BPSG-LTO Up 19.9/30 Tylan 12-FGA Up Tystar Up 3.5/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 460- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu May 29 07:26:40 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 29 May 2003 07:26:40 -0700 Subject: Diffusion Morning Report 05/29/03 Message-ID: <3ED6189F.6C265DF2@snf.stanford.edu> Good Morning all, Looking ok. Tylan 1 had water coming out of the tube. tylan 4 door sensor still under investigation. Epi pump kicked off but it is back on after oil pressure switch replaced. Diffusion Date: 5/29/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow water coming out of tube Tylan 2 Up Tylan 3 Up Tylan 4 yellow Door interlock made with door open Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/3012. Tylan 9-Poly Up 12.5/30 Tylan 10-Nitride Up 14.7/3022. Tylan 11-BPSG-LTO Up 22. 7/30 Tylan 12-FGA Up Tystar Up 3.5/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 460- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri May 30 07:05:44 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 30 May 2003 07:05:44 -0700 Subject: Diffusion Morning report 05/30/03 Message-ID: <3ED76537.C3B390A1@snf.stanford.edu> Good Morning all, A few issues this morning. Tylan 3 had a TC error-OK now. Tylan 4 has H2 ratio issues. Burn box has a cracked liner discovered during clean- being replaced now.LTO had boat issues checked ok Now. Diffusion Date: 5/30/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 yellow door sensor OK-H2 ratio problem Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.7/30 Tylan 9-Poly Up 12.9/30 Tylan 10-Nitride Up 15.3/30 Tylan 11-BPSG-LTO Up 23.4/30 Tylan 12-FGA Up Tystar Up 3.5/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Down Cracked liner ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 450- A(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: