Diffusion Morning Report 5/1/03

Ted Berg tberg at snf.stanford.edu
Thu May 1 07:25:58 PDT 2003


Good Morning all,
    Looking better each day. LTO, Nitride up . Poly still thin but the
fact that LTO is ok says SiH4 line is ok.  Tystar and SiGe will be
tested today. TEOS mfc changed and retaped-looks good now.

Diffusion Date: 5/1/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe yellow testing 8.5/30
Tylan 9-Poly Down testing-too thin-running another coat 0/30
Tylan 10-Nitride Up   19.1/30
Tylan 11-BPSG-LTO Up  good test 14.1/30
Tylan 12-FGA Up
Tystar Down testing-Temp cal-needs test 0/30
Doped Poly Down
TEOS yellow Testing
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently 560- A(c7) on line

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