Diffusion Morning report 5/05/03

Ted Berg tberg at snf.stanford.edu
Mon May 5 08:13:29 PDT 2003

Good morning all,
    Lots of issues this morning.  Nitride had a leak on the recirc and
spewed all of its oil out. the pump stopped. that is being addressed
now.  LTO had some process issues as did poly.  SiGe and tystar seem to
be ok.  Epi has broken wafers that need to be removed. TEOS needs
cannister change.

Diffusion Date: 5/5/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up  8.5/30
Tylan 9-Poly Down testing- .35/30
Tylan 10-Nitride Up had bad recirc-leaked oil-pump kicked off 19.1/30
Tylan 11-BPSG-LTO Up  process issues 17.0/30
Tylan 12-FGA Up
Tystar Up   0/30
Doped Poly Down
TEOS Down Needs cannister changed
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw


SiH4 for furnaces   Change at 100PSI Currently 550- A(c7) on line

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