Diffusion Morning Report 05/06/03

Ted Berg tberg at snf.stanford.edu
Tue May 6 06:59:31 PDT 2003

Good Morning all,
    Lots of issues once again.  Poly still having SiH4 issues-looking
into sensor problem.  Nitride pumping slowly and pump making a lot of
noise. Checked LTO nothing found. TEOS cannister changed yesterday.

Diffusion Date: 5/6/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up  8.5/30
Tylan 9-Poly Down SiH4 issues .35/30
Tylan 10-Nitride yellow Pumping slow 19.5/30- pump making a lot of noise

Tylan 11-BPSG-LTO yellow  process issues 17.0/30
Tylan 12-FGA Up
Tystar Up   0/30
Doped Poly Down
TEOS yellow Cannister changed yesterday
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw


SiH4 for furnaces   Change at 100PSI Currently 550- A(c7) on line

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