Diffusion Morning Report 05/08/03

Ted Berg tberg at snf.stanford.edu
Thu May 8 07:25:28 PDT 2003

Good morning all,
    Things are looking pretty good.  We are very close on Poly, Maurice
please clean at least 3 wafers so we can test .  Epi cylinder changes
are completed.  LTO is at 26 microns so will be going down for clean
next week.

Diffusion Date: 5/8/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up  8.5/30
Tylan 9-Poly Down SiH4 issues .35/30
Tylan 10-Nitride Up   19.5/30
Tylan 11-BPSG-LTO Up   26.2/30
Tylan 12-FGA Up
Tystar Up   0/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw


SiH4 for furnaces   Change at 100PSI Currently 545- A(c7) on line

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