Diffusion Morning Report 05/09/03

Ted Berg tberg at snf.stanford.edu
Fri May 9 07:45:35 PDT 2003

Good Morning all,
    Things are looking good all furnaces are up including Lps.  Cleaned
burn box and Nitride exhaust line this morning.

Diffusion Date: 5/9/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up  8.5/30
Tylan 9-Poly Up   .5/30
Tylan 10-Nitride Up   20.6/30
Tylan 11-BPSG-LTO Up   26.2/30
Tylan 12-FGA Up   ?
Tystar Up   0/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw


SiH4 for furnaces   Change at 100PSI Currently 535- A(c7) on line

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