Diffusion Morning report 5/13/03

Ted Berg tberg at snf.stanford.edu
Tue May 13 06:45:21 PDT 2003


Good Morning All,
    Nitride had issues yesterday so it is down for pull and clean. LTO
is also going down for pull and clean today.  All else looks good.

Diffusion Date: 5/13/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up  8.5/30
Tylan 9-Poly Up   .9/30
Tylan 10-Nitride Down pull and clean-pump change 0/30
Tylan 11-BPSG-LTO Down pull and clean 0/30
Tylan 12-FGA Up
Tystar Up   ?/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces    Currently 520- A(c7) on line

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