Diffusion Morning Report 05/14/03

Ted Berg tberg at snf.stanford.edu
Wed May 14 06:53:14 PDT 2003

Good Morning all,
    Nitride is on its way back up, pull and clean and pump change
completed as well as a coat-waiting test results.  LTO is going back
together.  Copy software for Zygo Cd writer installed yesterday.
Everything else looks pretty good.

Diffusion Date: 5/14/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up  8.5/30
Tylan 9-Poly Up   3.12/30
Tylan 10-Nitride unknown Pull and clean completed-coat done 0/30
Tylan 11-BPSG-LTO Down Pull and clean completed 0/30
Tylan 12-FGA Up
Tystar Up   ?/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw-copy program installed


SiH4 for furnaces   Change at 100PSI Currently 520- A(c7) on line

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