Diffusion Morning Report 05/19/03

Ted Berg tberg at snf.stanford.edu
Mon May 19 06:45:17 PDT 2003


Good Morning all ,
    Things are looking good today . A frayed cable on BPSG has gotten a
lot of e-mails we are looking into it. Everything else looking good.


Diffusion Date: 5/19/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up  8.5/30
Tylan 9-Poly Up   7.2/30
Tylan 10-Nitride Up    6.8/30
Tylan 11-BPSG-LTO yellow Frayed cable on boatloader 9.9/30
Tylan 12-FGA Up
Tystar Up   3.5/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently 490- A(c7) on line


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