Diffusion Morning Report 05/20/03

Ted Berg tberg at snf.stanford.edu
Tue May 20 06:46:02 PDT 2003


Good Morning all,
    Things are looking good everything up in diffusion. Epi going down
for pull and clean today. Nitride in yellow for no dummies-where oh
where are the dummies??

Diffusion Date: 5/20/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up  8.5/30
Tylan 9-Poly Up   7.2/30
Tylan 10-Nitride Up    4.3/30-missing dummies
Tylan 11-BPSG-LTO Up   10.52/30
Tylan 12-FGA Up
Tystar Up   3.5/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently 490- A(c7) on line

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