Diffusion Morning Report 05/22/03

Ted Berg tberg at snf.stanford.edu
Thu May 22 06:40:43 PDT 2003


Good Morning all,
    Few issues this morning- biggest is LTO pump fitting leak-looking
into it.  Tylan 4 door interlock made with door open. Epi leak rate a
bit high.

Diffusion Date: 5/22/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 yellow Door interlock made with door open
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up  8.7/30
Tylan 9-Poly Up   3.5/30
Tylan 10-Nitride Up    7.9/30
Tylan 11-BPSG-LTO Down Problem with pump 13.2/30
Tylan 12-FGA Up
Tystar Up   8.5/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently 490- A(c7) on line

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