Diffusion Morning Report 5/23/03

Ted Berg tberg at snf.stanford.edu
Fri May 23 07:23:39 PDT 2003

Good Morning all,
    Happy Friday Nancy have fun in Hawaii and don't worry about us
slaving away here. Things are pretty much the same as yesterday. LTO is
waiting for the pump, TYlan 4 has a door interlock problem . Burn box
cleaned this morning. TEOS pump line cleaned this morning. Epi in Limbo.

Diffusion Date: 5/23/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 yellow Door interlock made with door open
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up  8.7/30
Tylan 9-Poly Up   9.7/30
Tylan 10-Nitride Up    10.1/30
Tylan 11-BPSG-LTO Down Problem with pump 13.2/30
Tylan 12-FGA Up
Tystar Up   8.5/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up


SiH4 for furnaces   Change at 100PSI Currently 480- A(c7) on line

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