Diffusion Morning report 05/27/03

Ted Berg tberg at snf.stanford.edu
Tue May 27 06:43:55 PDT 2003


Good Morning all,
    THings are looking ok,  Poly is down for some kind of MFC issue-few
details, Tylan 4 is down for door sensor issue.

Diffusion Date: 5/27/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 yellow Door interlock made with door open
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up  8.7/30
Tylan 9-Poly Down MFC problem??11.8/30
Tylan 10-Nitride Up   12/30
Tylan 11-BPSG-LTO Up  6/30
Tylan 12-FGA Up
Tystar Up   3.5/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently 465- A(c7) on line

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