Diffusion Morning report 5/28/03

Ted Berg tberg at snf.stanford.edu
Wed May 28 06:30:05 PDT 2003


Good Morning all,
    Looking pretty good this morning.  Tylan 4 still down looking into
door sensor, looking into epi leak rate.

Diffusion Date: 5/28/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4down- Door interlock made with door open
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up  8.7/30
Tylan 9-Poly Up   12.0/30
Tylan 10-Nitride Up    14.3/30
Tylan 11-BPSG-LTO Up   19.9/30
Tylan 12-FGA Up
Tystar Up   3.5/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently 460- A(c7) on line

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