Diffusion Morning Report 05/29/03

Ted Berg tberg at snf.stanford.edu
Thu May 29 07:26:40 PDT 2003

Good Morning all,
    Looking ok. Tylan 1 had water coming out of the tube.  tylan 4 door
sensor still under investigation. Epi pump kicked off but it is back on
after oil pressure switch replaced.

Diffusion Date: 5/29/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 yellow water coming out of tube
Tylan 2 Up
Tylan 3 Up
Tylan 4 yellow Door interlock made with door open
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up  8.7/3012.
Tylan 9-Poly Up   12.5/30
Tylan 10-Nitride Up    14.7/3022.
Tylan 11-BPSG-LTO Up 22. 7/30
Tylan 12-FGA Up
Tystar Up   3.5/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up


SiH4 for furnaces   Change at 100PSI Currently 460- A(c7) on line

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