Diffusion Morning report 05/30/03

Ted Berg tberg at snf.stanford.edu
Fri May 30 07:05:44 PDT 2003


Good Morning all,
    A few issues this morning.  Tylan 3 had a TC error-OK now. Tylan 4
has H2 ratio issues.  Burn box has a cracked liner discovered during
clean- being replaced now.LTO had boat issues checked ok Now.

Diffusion Date: 5/30/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 yellow door sensor OK-H2 ratio problem
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up  8.7/30
Tylan 9-Poly Up   12.9/30
Tylan 10-Nitride Up    15.3/30
Tylan 11-BPSG-LTO Up   23.4/30
Tylan 12-FGA Up
Tystar Up   3.5/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Down Cracked liner
ZYGO Up

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently 450- A(c7) on line

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