From tberg at snf.stanford.edu Wed Oct 1 06:35:32 2003 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 01 Oct 2003 06:35:32 -0700 Subject: Diffusion Morning Report 10/01/03 Message-ID: <3F7AD824.5060502@snf.stanford.edu> Good Morning all, Looking good this morning. Not much going on except Nitride investigation. Everything else looking good. Diffusion Date: 10/1/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 10.9/30 Tylan 9-Poly Up 2.1/30 Tylan 10-Nitride yellow bubbles- Investigating 11.1/30 Tylan 11-BPSG-LTO Up 12.7/30 Tylan 12-FGA Up Tystar Up 21.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 540- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Oct 2 08:01:24 2003 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 02 Oct 2003 08:01:24 -0700 Subject: Diffusion Morning Report 10/02/03 Message-ID: <3F7C3DC4.8030002@snf.stanford.edu> Good Morning All, Looking good this morning, Nitride investigating is ongoing. Process is testing oxide deps on Thermcos Diffusion Date: 10/2/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 11.3/30 Tylan 9-Poly Up 2.3/30 Tylan 10-Nitride yellow bubbles- Investigating 14.8/30 Tylan 11-BPSG-LTO Up 13.3/30 Tylan 12-FGA Up Tystar Up 21.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 540- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Oct 3 06:35:02 2003 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 03 Oct 2003 06:35:02 -0700 Subject: Diffusion Morning Report 10/03/03 Message-ID: <3F7D7B06.2090809@snf.stanford.edu> Good Morning all, All LPs down because of burn box alarm-cleaning and looking into alarm. Everything else looking good. Diffusion Date: 10/3/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe down Burn box 11.6/30 Tylan 9-Poly down Burn box 2.3/30 Tylan 10-Nitride down bubbles- Investigating-burn box 15.5/30 Tylan 11-BPSG-LTO down Burn box 13.3/30 Tylan 12-FGA Up Tystar down Burn box 21.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box down alarming this morning-cleaning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 540- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Oct 6 10:36:08 2003 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 06 Oct 2003 10:36:08 -0700 Subject: Diffusion Morning Report 10/05/03 Message-ID: <3F81A808.6000502@snf.stanford.edu> Good Morning all, Looking good this morning. Mike looked at Tylan 2 and it worked fine. Epi burn box is turned back on and heating back up. Everything else looks good.. Diffusion Date: 10/5/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 11.7/30 Tylan 9-Poly Up 3.52/30 Tylan 10-Nitride yellow bubbles- Investigating- 15.5/30 Tylan 11-BPSG-LTO down Burn box 13.3/30 Tylan 12-FGA Up Tystar Up 21.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 540- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Oct 7 06:30:28 2003 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 07 Oct 2003 06:30:28 -0700 Subject: Diffusion Morning Report 10/07/03 Message-ID: <3F82BFF4.9030304@snf.stanford.edu> Good Morning All, Things are looking pretty good this morning. Epi burn box will be torn apart to check element and liner. Still investigating Nitride issues. Diffusion Date: 10/7/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 11.7/30 Tylan 9-Poly Up 3.52/30 Tylan 10-Nitride yellow bubbles- Investigating- 16.0/30 Tylan 11-BPSG-LTO Up 13.3/30 Tylan 12-FGA Up Tystar Up 21.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 540- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From mw1200 at naver.com Wed Oct 8 09:46:07 2003 From: mw1200 at naver.com (곽미화) Date: Wed, 08 Oct 2003 10:46:07 -0600 Subject: (광고)보세요.......안보면 후회할껍니다 Message-ID: An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Oct 8 06:34:32 2003 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 08 Oct 2003 06:34:32 -0700 Subject: Diffusion Morning Report 10/08/03 Message-ID: <3F841268.40108@snf.stanford.edu> Good Morning All, Looking goood this morning. Thanks to Mike and Ray for the speedy burn box rebuild. Nitride testing on going. Everything else looking good. Diffusion Date: 10/8/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 11.7/30 Tylan 9-Poly Up 3.52/30 Tylan 10-Nitride yellow bubbles- Investigating- 16.1/30 Tylan 11-BPSG-LTO Up 13.3/30 Tylan 12-FGA Up Tystar Up 21.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 540- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Oct 9 06:37:53 2003 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 09 Oct 2003 06:37:53 -0700 Subject: Diffusion Morning Report 11/09/03 Message-ID: <3F8564B1.1000606@snf.stanford.edu> Good Morning all, Looking good this morning. Epi is back to normal. Nitride investigation is ongoing. Everything else looking good. Diffusion Date: 10/9/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 11.7/30 Tylan 9-Poly Up 3.52/30 Tylan 10-Nitride yellow bubbles- Investigating- 16.9/30 Tylan 11-BPSG-LTO Up 13.3/30 Tylan 12-FGA Up Tystar Up 21.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 540- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Oct 10 06:24:34 2003 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 10 Oct 2003 06:24:34 -0700 Subject: Diffusion Morning Report 10/10/03 Message-ID: <3F86B312.50904@snf.stanford.edu> Good Morning all, Things are looking ok . THe Nitride pump died yesterday afternoon we are changing it out this morning. We are cleaning the burn box this morning. Everything else looking good. Diffusion Date: 10/10/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 11.7/30 Tylan 9-Poly Up 3.52/30 Tylan 10-Nitride down bubbles- Investigating-bad mechanical Pump 16.9/30 Tylan 11-BPSG-LTO Up 14.9/30 Tylan 12-FGA Up Tystar Up 21.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up Cleaning this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 525- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Oct 13 06:35:45 2003 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 13 Oct 2003 06:35:45 -0700 Subject: Diffusin morning report 10/13/03 Message-ID: <3F8AAA31.3030808@snf.stanford.edu> Good Morning All, Looking good this morning. Mechanical pump replaced on Nitride-last Friday. Bubble/particle issue still ongoing. Epi has been dropping out intermittantly Everything else looking good.. Diffusion Date: 10/13/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 11.7/30 Tylan 9-Poly Up 3.58/30 Tylan 10-Nitride down bubbles- Investigating- 17.2/30 Tylan 11-BPSG-LTO Up 16.1/30 Tylan 12-FGA Up Tystar Up 21.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 520- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Oct 14 06:49:33 2003 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 14 Oct 2003 06:49:33 -0700 Subject: Diffusion Morning Report 10/14/03 Message-ID: <3F8BFEED.2000908@snf.stanford.edu> Good Morning All, Looking Fair this Morning. Epi is the problem child this morning. Burn box has a small water leak and is not reaching temp. Epi has also had several instances where monitor went blank and recipes were lost... Nitride investigation ongoing. Everything else looking OK. Diffusion Date: 10/14/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 11.7/30 Tylan 9-Poly Up 3.58/30 Tylan 10-Nitride down bubbles- Investigating- 18.3/30 Tylan 11-BPSG-LTO Up 16.1/30 Tylan 12-FGA Up Tystar Up 21.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 520- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Oct 15 07:21:50 2003 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 15 Oct 2003 07:21:50 -0700 Subject: Diffusion Morning Report 10/15/03 Message-ID: <3F8D57FE.4050106@snf.stanford.edu> Good Morning all, Things are looking pretty good this morning . No messages from EPI . Still investigating Nitride. Everything else looking OK. Diffusion Date: 10/15/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 11.7/30 Tylan 9-Poly Up 3.58/30 Tylan 10-Nitride down bubbles- Investigating- 18.3/30 Tylan 11-BPSG-LTO Up 22.2/30 Tylan 12-FGA Up Tystar Up 21.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 520- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Oct 16 06:44:20 2003 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 16 Oct 2003 06:44:20 -0700 Subject: Diffusion Morning Report 10/16/03 Message-ID: <3F8EA0B4.6080006@snf.stanford.edu> Good Morning All , Looking good this morning. Soft pump interlock for Nitride installed. looks like Epi still has dropout issues. Everything else looking OK. Diffusion Date: 10/16/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 11.7/30 Tylan 9-Poly Up 3.68/30 Tylan 10-Nitride down bubbles- Investigating- 18.6/30 Tylan 11-BPSG-LTO Up 17.5/30 Tylan 12-FGA Up Tystar Up 21.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 520- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Oct 17 06:35:44 2003 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 17 Oct 2003 06:35:44 -0700 Subject: Diffusion Morning report 10/17/03 Message-ID: <3F8FF030.8080108@snf.stanford.edu> Good Moring All, Looking pretty good . Nitride has a leak in the loader which we are addressing, Burn box is being cleaned this morning. Epi investigation is ongoing. Everything else looks ok. Diffusion Date: 10/17/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 11.7/30 Tylan 9-Poly Up 3.68/30 Tylan 10-Nitride down bubbles- Investigating-leak 19.8/30 Tylan 11-BPSG-LTO Up 17.5/30 Tylan 12-FGA Up Tystar Up 21.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up Cleaning this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 515- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Oct 20 09:35:29 2003 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 20 Oct 2003 09:35:29 -0700 Subject: Diffusion Morning REport 10/20/03 Message-ID: <3F940ED1.2000106@snf.stanford.edu> Good Morning All, Looking Fair this morning. Epi has multiple issues. Checked Nitride base and leak rate look Ok- increased pump down time slightly. It is back up after tube change last week. Diffusion Date: 10/20/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 11.7/30 Tylan 9-Poly Up 3.9/30 Tylan 10-Nitride yellow bubbles- Investigating-Checked leak rate 1.0/30 Tylan 11-BPSG-LTO Up 17.5/30 Tylan 12-FGA Up Tystar Up 21.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up Pressure is high-cleaned this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 515- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Oct 21 06:33:29 2003 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 21 Oct 2003 06:33:29 -0700 Subject: Diffusion Morning Report 10/21/03 Message-ID: <3F9535A9.7060302@snf.stanford.edu> Good Morning All, Looking Ok this morning. Epi still has issues. Nitride seems to be OK bubble issue still under investigation. Diffusion Date: 10/21/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 11.7/30 Tylan 9-Poly Up 4.1/30 Tylan 10-Nitride yellow bubbles- Investigating 2.3/30+ Tylan 11-BPSG-LTO Up 17.5/30 Tylan 12-FGA Up Tystar Up 25.6/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up Pressure is high-cleaned this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 515- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Oct 22 07:29:29 2003 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 22 Oct 2003 07:29:29 -0700 Subject: Diffusion Morning Report 10/22/03 Message-ID: <3F969449.9050809@snf.stanford.edu> Good Morning All, Epi has various issues including broken wafers inside chamber, floppies not working and the glitch iss. Boards have been ordered to hopefully address Glitch and floppy issues. They should be here next week. Nitride seems to be ok. Everything else looking good. Diffusion Date: 10/22/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 11.7/30 Tylan 9-Poly Up 4.3/30 Tylan 10-Nitride yellow bubbles- Investigating 3.1/30+ Tylan 11-BPSG-LTO Up 18.2/30 Tylan 12-FGA Up Tystar Up 25.6/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 515- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Thu Oct 23 08:29:48 2003 From: seymour at snf.stanford.edu (Ray Seymour) Date: Thu, 23 Oct 2003 08:29:48 -0700 Subject: Diffusion Morning Report Message-ID: <3F97F3EC.C369A897@snf.stanford.edu> Date:10/23/03 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 UP Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe 11.7/30 Tylan 9-Poly Up 5.03/30 Tylan 10-Nitride yellow Bubbles Investaging 3.45/30 Tylan 11-BPSG-LTO down Broken loader sheath, replaced and pumping now 18.57/30 Tylan 12-FGA Up Tystar Up 25.69/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP Silane for furnaces Auto Changeover working well Currently 500 B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Oct 24 06:50:48 2003 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 24 Oct 2003 06:50:48 -0700 Subject: Diffusion Morning Report 10/24/03 Message-ID: <3F992E38.9080707@snf.stanford.edu> Good Morning All, Epi still has issues, Boards on order. Nitride investigation Ongoing. Everything else looking good. Diffusion Date: 10/24/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 11.7/30 Tylan 9-Poly Up 5.0/30 Tylan 10-Nitride yellow bubbles- Investigating 5.9/30 Tylan 11-BPSG-LTO Up 18.6/30 Tylan 12-FGA Up Tystar Up 25.6/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 500- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Oct 27 07:03:42 2003 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 27 Oct 2003 07:03:42 -0800 Subject: Diffusion Morning Report 10/26/03 Message-ID: <3F9D33CE.5000002@snf.stanford.edu> Good Morning All, Everything looking pretty good this morning. Still investigating Nitride issues . Epi doesn't seem to have had any glitches since Floppy controller was removed Boards should be here this week. Tystar and LTO are getting close to change. Diffusion Date: 10/27/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 12.5/30 Tylan 9-Poly Up 5.13/30 Tylan 10-Nitride yellow bubbles- Investigating 6.5/30+ Tylan 11-BPSG-LTO Up 24.9/30 Tylan 12-FGA Up Tystar Up 28.7/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 500- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Oct 28 06:34:17 2003 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 28 Oct 2003 06:34:17 -0800 Subject: Diffusion Morning Report 10/28/03 Message-ID: <3F9E7E69.6030507@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Nitride issue still under investigation. Epi boards should be here this week. GeH4 cylinder arrived yesterday and was changed. Everything else looking good. > Diffusion Date: 10/28/2003 > Tube Name/Number Status Comments THICKNESS-Change at > Tylan 1 Up > Tylan 2 Up > Tylan 3 Up > Tylan 4 Up > Tylan 5-BBr3 Up > Tylan 6-POCl3 Up > Tylan 7-Dirty Ox Up > Tylan 8-SiGe down Cylinder Change-GeH4 12.5/30 > Tylan 9-Poly Up 5.13/30 > Tylan 10-Nitride yellow bubbles- Investigating 6.5/30 > Tylan 11-BPSG-LTO Up Vacuumed Flakes yesterday 24.9/30 > Tylan 12-FGA Up > Tystar Up 28.7/30 > Doped Poly GONE > TEOS yellow > Tylan 16 N/A > Burn Box Up > ZYGO Up > > GAAS 22 UP > GAAS 23 UP > > SiH4 for furnaces Auto changeover working well Currently 500- > B(c4) on line > -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Oct 29 06:31:18 2003 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 29 Oct 2003 06:31:18 -0800 Subject: Diffusion Morning Report 10/29/03 Message-ID: <3F9FCF36.805@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Any feedback on Nitride recently?? Still observing. Replaced boards in EPI-observing. Tystar is going down tomorrow for pull and clean. Everything else looking good. Diffusion Date: 10/29/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 12.5/30 Tylan 9-Poly Up 5.24/30 Tylan 10-Nitride yellow bubbles- Investigating 7.01/30 Tylan 11-BPSG-LTO Up 26/30 Tylan 12-FGA Up Tystar Up Going down tomorrow for Pull& clean 29.1/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 500- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Oct 30 06:59:34 2003 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 30 Oct 2003 06:59:34 -0800 Subject: Diffusion Morning Report 10/30/03 Message-ID: <3FA12756.4010808@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Logs on Nitride and LTO are not updated. Tystar is down for pull and clean. Epi is still glitching occasionally. Diffusion Date: 10/30/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 12.6/30 Tylan 9-Poly Up 6.35/30 Tylan 10-Nitride Up 8.7/30 Tylan 11-BPSG-LTO Up 27/30 Tylan 12-FGA Up Tystar down Pull and clean 0/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 480- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Oct 31 07:29:47 2003 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 31 Oct 2003 07:29:47 -0800 Subject: Diffusion Morning Report 10/31/03 Message-ID: <3FA27FEB.4080603@snf.stanford.edu> Good Morning All, Looking good this morning . Burn box checked out this morning. Tystar is back together and coating. Epi appears to be working glitch free Everything else looking good. Diffusion Date: 10/31/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 12.6/30 Tylan 9-Poly Up 6.35/30 Tylan 10-Nitride Up 9.3/30 Tylan 11-BPSG-LTO Up 28/30 Tylan 12-FGA Up Tystar down Pull and clean in progress 0/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up Checked today ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 480- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: