Diffusion Morning Report 10/03/03

ted berg tberg at snf.stanford.edu
Fri Oct 3 06:35:02 PDT 2003


Good Morning all,
    All LPs down because of burn box alarm-cleaning and looking into 
alarm. Everything else looking good.

Diffusion 	Date: 	10/3/2003 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-Dirty Ox 	Up 	  	 
Tylan 8-SiGe 	down 	Burn box 	11.6/30
Tylan 9-Poly 	down 	Burn box 	2.3/30
Tylan 10-Nitride 	down 	bubbles- Investigating-burn box 	15.5/30
Tylan 11-BPSG-LTO 	down 	Burn box 	13.3/30
Tylan 12-FGA 	Up 	  	 
Tystar 	down 	Burn box 	21.9/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Burn Box 	down 	alarming this morning-cleaning 	 
ZYGO 	Up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 540- B(c7) 
on line


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