Diffusion Morning Report 10/14/03

ted berg tberg at snf.stanford.edu
Tue Oct 14 06:49:33 PDT 2003


Good Morning All,
    Looking Fair this Morning. Epi is the problem child this morning.  
Burn box has a small water leak and is not reaching temp.
Epi has also had several instances where monitor went blank and recipes 
were lost...  Nitride investigation ongoing.  Everything else looking
OK.

Diffusion 	Date: 	10/14/2003 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-Dirty Ox 	Up 	  	 
Tylan 8-SiGe 	Up 	  	11.7/30
Tylan 9-Poly 	Up 	  	3.58/30
Tylan 10-Nitride 	down 	bubbles- Investigating- 	18.3/30
Tylan 11-BPSG-LTO 	Up 	  	16.1/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	21.9/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 520- B(c7) 
on line


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