Diffusion Morning Report 10/14/03

ted berg tberg at snf.stanford.edu
Tue Oct 14 06:49:33 PDT 2003

Good Morning All,
    Looking Fair this Morning. Epi is the problem child this morning.  
Burn box has a small water leak and is not reaching temp.
Epi has also had several instances where monitor went blank and recipes 
were lost...  Nitride investigation ongoing.  Everything else looking

Diffusion 	Date: 	10/14/2003 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-Dirty Ox 	Up 	  	 
Tylan 8-SiGe 	Up 	  	11.7/30
Tylan 9-Poly 	Up 	  	3.58/30
Tylan 10-Nitride 	down 	bubbles- Investigating- 	18.3/30
Tylan 11-BPSG-LTO 	Up 	  	16.1/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	21.9/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 520- B(c7) 
on line

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