Diffusion Morning REport 10/20/03

ted berg tberg at snf.stanford.edu
Mon Oct 20 09:35:29 PDT 2003


Good Morning All,
    Looking Fair this morning.  Epi has multiple issues.  Checked 
Nitride base and leak rate look Ok- increased pump down time slightly.
It is back up after tube change last week.

Diffusion 	Date: 	10/20/2003 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-Dirty Ox 	Up 	  	 
Tylan 8-SiGe 	Up 	  	11.7/30
Tylan 9-Poly 	Up 	  	3.9/30
Tylan 10-Nitride 	yellow 	bubbles- Investigating-Checked leak rate
	1.0/30
Tylan 11-BPSG-LTO 	Up 	  	17.5/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	21.9/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	 Pressure is high-cleaned this morning 	 
ZYGO 	Up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 515- B(c7) 
on line


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