Diffusion Morning Report 10/22/03

ted berg tberg at snf.stanford.edu
Wed Oct 22 07:29:29 PDT 2003


Good Morning All,
    Epi has various issues including broken wafers inside chamber, 
floppies not working and the glitch iss.  Boards have been ordered
to hopefully address Glitch and floppy issues.  They should be here next 
week.  Nitride seems to be ok.  Everything else looking  good.

Diffusion 	Date: 	10/22/2003 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-Dirty Ox 	Up 	  	 
Tylan 8-SiGe 	Up 	  	11.7/30
Tylan 9-Poly 	Up 	  	4.3/30
Tylan 10-Nitride 	yellow 	bubbles- Investigating 	3.1/30+
Tylan 11-BPSG-LTO 	Up 	  	18.2/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	25.6/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 515- B(c7) 
on line


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