Diffusion Morning Report

Ray Seymour seymour at snf.stanford.edu
Thu Oct 23 08:29:48 PDT 2003


Date:10/23/03
Tube Name/Number
Status
Comments
THICKNESS-Change at
Tylan 1 Up
Tylan 2 UP
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan
8-SiGe
11.7/30
Tylan 9-Poly
Up
5.03/30
Tylan 10-Nitride yellow
Bubbles
Investaging
3.45/30
Tylan 11-BPSG-LTO down                                         Broken
loader sheath, replaced and pumping now             18.57/30
Tylan 12-FGA Up
Tystar
Up
25.69/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up

GAAS 22 UP
GAAS 23 UP


Silane for furnaces                                               Auto
Changeover working well
Currently 500 B(c7) on line
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