Diffusion Morning Report 10/28/03

ted berg tberg at snf.stanford.edu
Tue Oct 28 06:34:17 PST 2003


Good Morning All,
    Looking pretty good this morning.  Nitride issue still under 
investigation.  Epi boards should be here this week.   GeH4 cylinder arrived
yesterday and was changed. Everything else looking good.

> Diffusion 	Date: 	10/28/2003 	 
> Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
> Tylan 1 	Up 	  	 
> Tylan 2 	Up 	  	 
> Tylan 3 	Up 	  	 
> Tylan 4 	Up 	  	 
> Tylan 5-BBr3 	Up 	  	 
> Tylan 6-POCl3 	Up 	  	 
> Tylan 7-Dirty Ox 	Up 	  	 
> Tylan 8-SiGe 	down 	Cylinder Change-GeH4 	12.5/30
> Tylan 9-Poly 	Up 	  	5.13/30
> Tylan 10-Nitride 	yellow 	bubbles- Investigating 	6.5/30
> Tylan 11-BPSG-LTO 	Up 	Vacuumed Flakes yesterday 	24.9/30
> Tylan 12-FGA 	Up 	  	 
> Tystar 	Up 	  	28.7/30
> Doped Poly 	GONE 	  	 
> TEOS 	yellow 	  	 
> Tylan 16 	N/A 	  	 
> Burn Box 	Up 	  	 
> ZYGO 	Up 	  	 
>   	  	  	 
> GAAS 22 	UP 	  	 
> GAAS 23 	UP 	  	 
>   	  	  	 
> SiH4 for furnaces 	  	Auto changeover working well 	Currently 500- 
> B(c4) on line
>

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