Diffusion Morning Report 10/29/03

ted berg tberg at snf.stanford.edu
Wed Oct 29 06:31:18 PST 2003

Good Morning All,
    Looking pretty good this morning.  Any feedback on Nitride 
recently?? Still observing.  Replaced boards in EPI-observing.
Tystar is going down tomorrow for pull and clean. Everything else 
looking good.

Diffusion 	Date: 	10/29/2003 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-Dirty Ox 	Up 	  	 
Tylan 8-SiGe 	Up 	  	12.5/30
Tylan 9-Poly 	Up 	  	5.24/30
Tylan 10-Nitride 	yellow 	bubbles- Investigating 	7.01/30
Tylan 11-BPSG-LTO 	Up 	  	26/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	 Going down tomorrow for Pull& clean
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 500- B(c4) 
on line

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