Diffusion Morning Report 10/30/03

[ted berg]

Good Morning All,
    Looking pretty good this morning.  Logs on Nitride and LTO are not 
updated.  Tystar is down for pull and clean.  Epi is still
glitching occasionally.

Diffusion 	Date: 	10/30/2003 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-Dirty Ox 	Up 	  	 
Tylan 8-SiGe 	Up 	  	12.6/30
Tylan 9-Poly 	Up 	  	6.35/30
Tylan 10-Nitride 	Up 	  	8.7/30
Tylan 11-BPSG-LTO 	Up 	  	27/30
Tylan 12-FGA 	Up 	  	 
Tystar 	down 	Pull and clean 	0/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 480- B(c4) 
on line


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