Diffusion Morning Report 10/31/03

ted berg tberg at snf.stanford.edu
Fri Oct 31 07:29:47 PST 2003


Good Morning All,
    Looking  good this morning .  Burn box checked out this morning.  
Tystar is back together and coating.  Epi appears to be working glitch free
Everything else looking good. 

Diffusion 	Date: 	10/31/2003 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-Dirty Ox 	Up 	  	 
Tylan 8-SiGe 	Up 	  	12.6/30
Tylan 9-Poly 	Up 	  	6.35/30
Tylan 10-Nitride 	Up 	  	9.3/30
Tylan 11-BPSG-LTO 	Up 	  	28/30
Tylan 12-FGA 	Up 	  	 
Tystar 	down 	Pull and clean in progress 	0/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	Checked today 	 
ZYGO 	Up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 480- B(c4) 
on line

 

 

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