From seymour at snf.stanford.edu Tue Sep 2 08:26:27 2003 From: seymour at snf.stanford.edu (Ray Seymour) Date: Tue, 02 Sep 2003 08:26:27 -0700 Subject: Diffusion Morning Report 9/2/03 Message-ID: <3F54B6A3.F1A3F13C@snf.stanford.edu> Date: 9/2/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 UP Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 21.83/30 Tylan 10-Nitride yellow Process Testing 20.09/30 Tylan 11-BPSG-LTO Up 1.085/30 Tylan 12-FGA Up Tystar Up 9.34/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 650- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Sep 3 07:53:11 2003 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 03 Sep 2003 07:53:11 -0700 Subject: Diffusion Morning Report 09/03/03 Message-ID: <3F560057.7040008@snf.stanford.edu> Good Morning all, Looking good. Leak checked nitride found no leaks on mfcs back to normal. Everything else looking good. Diffusion Date: 9/2/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 23.3/30 Tylan 10-Nitride yellow Process testing-leak checking this morning0 20.3/30 Tylan 11-BPSG-LTO Up 3.2/30 Tylan 12-FGA Up Tystar Up 9.3/30 Doped Poly GONE TEOS yellow Temperature issues Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 640- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Sep 4 06:52:22 2003 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 04 Sep 2003 06:52:22 -0700 Subject: Diffusion Morning report 09/04/03 Message-ID: <3F574396.8060404@snf.stanford.edu> Good Morning all, Things are looking good this morning. Nitride is going down on Monday for cylinder change(DCS) and pull and clean. Diffusion Date: 9/4/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 23.3/30 Tylan 10-Nitride yellow Process testing 20.8/30 Tylan 11-BPSG-LTO Up 5.8/30 Tylan 12-FGA Up Tystar Up 9.3/30 Doped Poly GONE TEOS yellow Temperature issues Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 640- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From mw1200 at naver.com Fri Sep 5 10:08:50 2003 From: mw1200 at naver.com (곽미화) Date: Fri, 05 Sep 2003 11:08:50 -0600 Subject: (광고)"온가족이 모여 즐거운 명절을........ Message-ID: An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Sep 5 06:31:10 2003 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 05 Sep 2003 06:31:10 -0700 Subject: Diffusion Morning Report 09/05/03 Message-ID: <3F58901E.9060302@snf.stanford.edu> Good Morning All, Looking good this morning. Nitride is going down on Monday for DCS cylinder change and Pull and clean. Burn box cleaned this morning. Everything else looking good. Diffusion Date: 9/5/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 23.4/30 Tylan 10-Nitride yellow Process testing 21.5/30 Tylan 11-BPSG-LTO Up 5.8/30 Tylan 12-FGA Up Tystar Up 9.3/30 Doped Poly GONE TEOS yellow Temperature issues Tylan 16 N/A Burn Box Up Cleaned this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 620- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From Info at Ausschreibungs-Monitor.de Sat Sep 6 05:28:58 2003 From: Info at Ausschreibungs-Monitor.de (Ausschreibungs-Monitor) Date: Sat, 6 Sep 2003 14:28:58 +0200 Subject: Neue Druckauftraege Message-ID: <200309061228.h86CLVjo028797@delfin.onsite.org> An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Sep 8 06:28:31 2003 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 08 Sep 2003 06:28:31 -0700 Subject: Diffusion Morning Report 09/08/03 Message-ID: <3F5C83FF.4010200@snf.stanford.edu> Good Morning all, Looking good this morning, Nitride is down for pull and clean and DCS cylinder Change. Everything else looking good. Diffusion Date: 9/8/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 24.1/30 Tylan 10-Nitride down Pull and clean-DCS cylinder Change 0/30 Tylan 11-BPSG-LTO Up 5.8/30 Tylan 12-FGA Up Tystar Up 9.3/30 Doped Poly GONE TEOS yellow Temperature issues Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 620- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Sep 9 07:02:27 2003 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 09 Sep 2003 07:02:27 -0700 Subject: Diffusion Morning Report 09/09/03 Message-ID: <3F5DDD73.8030002@snf.stanford.edu> Good Morning all, Not looking terrific in LP land. BPSG is going back together after quartz change. Nitride is in coat after pull and clean and DCS cylinder Change. Everything else lookiing good. Time card meeting at 10:00 this may preempt our morning meeting. stay tuned. Diffusion Date: 9/9/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow H2 LED Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 24.1/30 Tylan 10-Nitride down Pull and clean,DCS cylinder Changecompleted 0/30 Tylan 11-BPSG-LTO down Quartz replacement 0/30 Tylan 12-FGA Up Tystar Up 9.9/30 Doped Poly GONE TEOS yellow Temperature issues Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 620- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From academic-software2005 at yahoo.com Tue Sep 9 13:05:07 2003 From: academic-software2005 at yahoo.com (Jeriameth) Date: Tue, 9 Sep 2003 20:05:07 GMT Subject: Super Software Savings Message-ID: ****** BACK-TO-SCHOOL SOFTWARE SPECIALS ********* ***** FREE SHIPPING WITH BELOW CODE *********** Adobe Acrobat 6.0 Standard at 70% OFF! 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From tberg at snf.stanford.edu Wed Sep 10 06:57:38 2003 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 10 Sep 2003 06:57:38 -0700 Subject: Diffusion Morning Report 09/10/03 Message-ID: <3F5F2DD2.8030609@snf.stanford.edu> Good Morning All , Looking good this morning. Nitride apparently still has bubbles. LTO came up ok. We are changing Germane for EPI this morning. I will be modifying the THermco recipes per Jims instructions so we can move ahead. Everything else looking good. Diffusion Date: 9/10/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow H2 LED Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 24.1/30 Tylan 10-Nitride yellow bubbles .2/30 Tylan 11-BPSG-LTO Up .3/30 Tylan 12-FGA Up Tystar Up 9.9/30 Doped Poly GONE TEOS yellow Temperature issues Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 620- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Sep 10 07:02:32 2003 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 10 Sep 2003 07:02:32 -0700 Subject: Diffusion Morning Report 09/10/03 Message-ID: <3F5F2EF8.5010308@snf.stanford.edu> Good Morning All , Looking good this morning. Nitride apparently still has bubbles. LTO came up ok. We are changing Germane for EPI this morning. I will be modifying the THermco recipes per Jims instructions so we can move ahead. Everything else looking good. Diffusion Date: 9/10/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow H2 LED Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 24.1/30 Tylan 10-Nitride yellow bubbles .2/30 Tylan 11-BPSG-LTO Up .3/30 Tylan 12-FGA Up Tystar Up 9.9/30 Doped Poly GONE TEOS yellow Temperature issues Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 620- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Sep 11 06:38:43 2003 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 11 Sep 2003 06:38:43 -0700 Subject: Diffusion Morning Report 09/11/03 Message-ID: <3F607AE3.9060901@snf.stanford.edu> Good Morning All, Looking good this morning. Cleaning TEOS exhaust this morning. Addressed most of Jim M's concerns about the THERMCOS Everything else looking good. Diffusion Date: 9/11/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up H2 LED-taped out- with Comment Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 24.2/30 Tylan 10-Nitride yellow bubbles 2.4/30 Tylan 11-BPSG-LTO Up .9/30 Tylan 12-FGA Up Tystar Up 9.9/30 Doped Poly GONE TEOS yellow cleaning exhaust Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 620- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Sep 12 07:02:36 2003 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 12 Sep 2003 07:02:36 -0700 Subject: Diffusion Morning Report 09/12/03 Message-ID: <3F61D1FC.3030204@snf.stanford.edu> Good Morning all, Things are looking pretty good this morning. SiGe has some issues with Temp fluctuations. Cleaning burn box this morning. Everything else looking good. Diffusion Date: 9/12/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 10.5/30 Tylan 9-Poly Up 24.3/30 Tylan 10-Nitride yellow bubbles 2.4/30 Tylan 11-BPSG-LTO Up 1.6/30 Tylan 12-FGA Up Tystar Up 9.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 620- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Sep 15 06:28:16 2003 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 15 Sep 2003 06:28:16 -0700 Subject: Diffusion Morning Report 09/15/03 Message-ID: <3F65BE70.7030908@snf.stanford.edu> Good Morning All, Everything looking prtty good this morning. Looking into temp fluctuations on SiGe. Nitride still has issues. everything else looking good. Diffusion Date: 9/15/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe yellow temp issues 10.5/30 Tylan 9-Poly Up 24.3/30 Tylan 10-Nitride yellow bubbles 4.5/30 Tylan 11-BPSG-LTO Up 2.3/30 Tylan 12-FGA Up Tystar Up 15.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 620- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Sep 16 06:58:19 2003 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 16 Sep 2003 06:58:19 -0700 Subject: Diffusion Morning Report 09/16/03 Message-ID: <3F6716FB.7090808@snf.stanford.edu> Good Morning all, Looking pretty good this morning. Performing TCU cal on SiGe-, still issues with Nitride. Everything else is ok. Diffusion Date: 9/16/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe yellow temp issues-performing calibration 10.5/30 Tylan 9-Poly Up 25.6/30 Tylan 10-Nitride yellow bubbles 5.7/30 Tylan 11-BPSG-LTO Up 2.6/30 Tylan 12-FGA Up Tystar Up 15.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 600- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Sep 17 06:26:04 2003 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 17 Sep 2003 06:26:04 -0700 Subject: Diffusion Morning Report 09/17/03 Message-ID: <3F6860EC.90801@snf.stanford.edu> Good Morning all, Everything looking good this morning. Stiil trying to do temp cal on SiGe. Nitride investigation ongoing. Rolling ladder for THERMCO ordered. Diffusion Date: 9/17/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe yellow temp issues-performing calibration 10.5/30 Tylan 9-Poly Up 25.6/30 Tylan 10-Nitride yellow bubbles 5.7/30 Tylan 11-BPSG-LTO Up 2.6/30 Tylan 12-FGA Up Tystar Up 15.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 590- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Sep 18 06:58:41 2003 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 18 Sep 2003 06:58:41 -0700 Subject: Diffusion Morning report 09/18/03 Message-ID: <3F69BA11.7030802@snf.stanford.edu> Good Morning Group, Looking pretty good this morning. Still calibrating the SiGe temps the low temps take longer to settle in. Nitride investigation still ongoing. Everything else looking good. Diffusion Date: 9/18/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe yellow temp issues-performing calibration 10.5/30 Tylan 9-Poly Up 25.6/30 Tylan 10-Nitride yellow bubbles- Investigating 5.7/30 Tylan 11-BPSG-LTO Up 3.1/30 Tylan 12-FGA Up Tystar Up 15.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 590- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Sep 19 06:38:47 2003 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 19 Sep 2003 06:38:47 -0700 Subject: Diffusion Morning Report 09/19/03 Message-ID: <3F6B06E7.7060807@snf.stanford.edu> Good Morning all, Looking good this morning. Temp cal and nitride investigation still ongoing. Burn box being serviced this morning. TYlan bank one was totally off yesterday morning-no explaination! although highly concidental with floor work- we will observe. Everything else looking good. Diffusion Date: 9/19/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe yellow temp issues-performing calibration 10.5/30 Tylan 9-Poly Up 25.6/30 Tylan 10-Nitride yellow bubbles- Investigating 5.7/30 Tylan 11-BPSG-LTO Up 3.6/30 Tylan 12-FGA Up Tystar Up 18.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up Cleaning and replacing liner this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 575- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Sep 22 06:35:22 2003 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 22 Sep 2003 06:35:22 -0700 Subject: Diffusion Morning report 09/22/03 Message-ID: <3F6EFA9A.3070000@snf.stanford.edu> Good Morning All, Things are looking pretty good this morning. Nitride still has issues, Trying to complete temp cal on SiGe. Everything else looks preetty good. Diffusion Date: 9/22/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe yellow temp issues-performing calibration 10.5/30 Tylan 9-Poly Up 25.6/30 Tylan 10-Nitride yellow bubbles- Investigating 5.7/30 Tylan 11-BPSG-LTO Up 3.9/30 Tylan 12-FGA Up Tystar Up 18.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 575- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Sep 23 07:38:51 2003 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 23 Sep 2003 07:38:51 -0700 Subject: Diffusion Morning Report 09/23/03 Message-ID: <3F705AFB.9030203@snf.stanford.edu> Good Morning all, Looking pretty godd this morning. Still fighting the Temp cal on SiGe nitride still has issues. THERMCO and epi breaker BP4 was tripped this morning. Temp had dropped about 150 degrees at 6:20 so it had not been off too long. Diffusion Date: 9/23/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe yellow temp issues-performing calibration 10.5/30 Tylan 9-Poly Up 25.6/30 Tylan 10-Nitride yellow bubbles- Investigating 7.4/30 Tylan 11-BPSG-LTO Up 4.7/30 Tylan 12-FGA Up Tystar Up 18.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 575- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Sep 24 07:51:20 2003 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 24 Sep 2003 07:51:20 -0700 Subject: Diffusion Morning Report 09/24/03 Message-ID: <3F71AF68.2070000@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Poly is down for pull and clean, Nitride still has issues. Working on temp cal for SiGe. Reset TCU and CPU on Tylan 2 looks fine now. Diffusion Date: 9/23/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Reset TCU and CPU looks fine now Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe yellow temp issues-performing calibration 10.5/30 Tylan 9-Poly down Pull and clean 0/30 Tylan 10-Nitride yellow bubbles- Investigating 8.7/30 Tylan 11-BPSG-LTO Up 4.7/30 Tylan 12-FGA Up Tystar Up 18.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 575- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Sep 25 08:00:09 2003 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 25 Sep 2003 08:00:09 -0700 Subject: Diffusion Morning Report 09/25/03 Message-ID: <3F7302F9.8060508@snf.stanford.edu> Good Morning all, Looking OK this morning. Poly has been pulled, cleaned and coated- iguess no test was run?? Nitride had an issue with lonh3 flow related to the mfc connector-run after was reported as good?? Finished the temp cal on SiGE and loaded pump program. Diffusion Date: 9/25/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe up temp issues-cal completed 10.5/30 an 9-Poly down Pull,clean and coat completed-needs test 0/30 Tylan 10-Nitride yellow bubbles- Investigating 9.8/30 Tylan 11-BPSG-LTO Up 5.2/30 Tylan 12-FGA Up Tystar Up 18.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 575- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Sep 26 07:32:15 2003 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 26 Sep 2003 07:32:15 -0700 Subject: Diffusion Morning Report 09/26/03 Message-ID: <3F744DEF.80501@snf.stanford.edu> Good Morning All, THings are looking good this morning. Burn box cleaned, TYlan 5 High O2 alarm-adjusted zero. Epi had a few glitches yesterday where recipes were lost. Nitride stuff is the only other issue issue. Diffusion Date: 9/26/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 10.5/30 Tylan 9-Poly Up .4/30 Tylan 10-Nitride yellow bubbles- Investigating 9.8/30 Tylan 11-BPSG-LTO Up 5.6/30 Tylan 12-FGA Up Tystar Up 18.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 575- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Sep 29 06:42:55 2003 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 29 Sep 2003 06:42:55 -0700 Subject: Diffusion Morning Report 09/29/03 Message-ID: <3F7836DF.1090702@snf.stanford.edu> Good Morning all, Everything is looking good this morning. Nitride still has issues. Diffusion Date: 9/29/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 10.5/30 Tylan 9-Poly Up 1.2/30 Tylan 10-Nitride yellow bubbles- Investigating 11.1/30 Tylan 11-BPSG-LTO Up 8.3/30 Tylan 12-FGA Up Tystar Up 21.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 550- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Sep 30 06:53:35 2003 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 30 Sep 2003 06:53:35 -0700 Subject: Diffusion Morning Report 09/30/03 Message-ID: <3F798ADF.4000809@snf.stanford.edu> Good Morning all, Looking good this morning. Nitride meeting after the normal 9:30 meeting to look at issuse and possible solutions. Diffusion Date: 9/30/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 10.9/30 Tylan 9-Poly Up 1.2/30 Tylan 10-Nitride yellow bubbles- Investigating 11.1/30 Tylan 11-BPSG-LTO Up 9.2/30 Tylan 12-FGA Up Tystar Up 21.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 540- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: