From tberg at snf.stanford.edu Thu Apr 1 06:57:12 2004 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 01 Apr 2004 06:57:12 -0800 Subject: Diffusion Morning Report 04/01/04 Message-ID: <406C2DC8.4030507@snf.stanford.edu> Good Morning All, Looking good this morning. Still observing Nitride. MFC for TEOS 2 should be here this week. Everything else looking good. Diffusion Date: 4/1/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Waiting for Mfc-3/26 delivery Tylan 8-SiGe Up 5.4/30 Tylan 9-Poly Up 13.8/30 Tylan 10-Nitride yellow particles- 6.77/30 Tylan 11-BPSG-LTO Up 10.11/30 Tylan 12-FGA Up Tystar Up 1.7/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 620 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Apr 2 06:55:55 2004 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 02 Apr 2004 06:55:55 -0800 Subject: Diffusion Morning Report 04/02/04 Message-ID: <406D7EFB.4020801@snf.stanford.edu> Good Morning All, Looking Good this morning. Nitride comment is "Good". Burn box cleaned this morning. TEOS MFC should be here today or Monday. Everything else looking Good. Diffusion Date: 4/2/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Waiting for Mfc-3/26 delivery Tylan 8-SiGe Up 5.4/30 Tylan 9-Poly Up 15.85/30 Tylan 10-Nitride yellow particles- 6.97/30 Tylan 11-BPSG-LTO Up 10.11/30 Tylan 12-FGA Up Tystar Up 1.7/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 620 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Apr 5 06:42:41 2004 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 05 Apr 2004 06:42:41 -0700 Subject: diffusion Morning Report 04/05/04 Message-ID: <40716251.7010707@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Still observing Nitride, Note says good. Epi Has a water leak-investigating Still waiting for TEOS MFC delivery. Everything else looking OK. Diffusion Date: 4/5/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Waiting for Mfc-4/? delivery Tylan 8-SiGe Up 5.4/30 Tylan 9-Poly Up 16.6/30 Tylan 10-Nitride yellow particles-better?? 9.5/30 Tylan 11-BPSG-LTO Up 12.2/30 Tylan 12-FGA Up Tystar Up 1.7/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 620 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Apr 6 06:43:04 2004 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 06 Apr 2004 06:43:04 -0700 Subject: Diffusion Morning Report 04/06/04 Message-ID: <4072B3E8.8050204@snf.stanford.edu> Good Morning All, Looking good this morning. Observing Nitride, Epi is down for tube change and water leak, Still waiting for TEOS 2 MFC. Everything else looking OK. Diffusion Date: 4/6/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Waiting for Mfc-4/? delivery Tylan 8-SiGe Up 5.4/30 Tylan 9-Poly Up 17.2/30 Tylan 10-Nitride yellow particles-better?? 9.5/30 Tylan 11-BPSG-LTO Up 12.2/30 Tylan 12-FGA Up Tystar Up 1.7/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 620 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Apr 7 07:46:14 2004 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 07 Apr 2004 07:46:14 -0700 Subject: Diffusion Morning Report 04/07/04 Message-ID: <40741436.9090402@snf.stanford.edu> Good Morning All, Looking pretty good this morning- Still obseving Nitride, TEOS 2 MFC should be here today. Epi is going back together after tube change and water leak. Everything else is looking OK. Diffusion Date: 4/7/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Waiting for Mfc-Its in the mail Tylan 8-SiGe Up 5.4/30 Tylan 9-Poly Up 17.4/30 Tylan 10-Nitride yellow particles-better??- 9.7/30 Tylan 11-BPSG-LTO Up 12.2/30 Tylan 12-FGA Up Tystar Up 1.7/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 610 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Apr 8 06:46:07 2004 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 08 Apr 2004 06:46:07 -0700 Subject: Diffusion Morning Report 04/08/04 Message-ID: <4075579F.1000609@snf.stanford.edu> Good Morning All, Looking good this morning, Replaced LoNh3 MFC this morning and checked operation. TEOS2 MFC is in and installed needs heat tape installed. Epi is back together and testing (thanks Mike D and Maurice). Everything else looking OK. Diffusion Date: 4/8/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC is hereand installed-need heattape Tylan 8-SiGe Up 5.4/30 Tylan 9-Poly Up 17.45/30 Tylan 10-Nitride yellow particles-better??-LoNH3 mfc replaced 9.7/30 Tylan 11-BPSG-LTO Up 12.9/30 Tylan 12-FGA Up Tystar Up 1.7/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 610 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Apr 9 07:37:27 2004 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 09 Apr 2004 07:37:27 -0700 Subject: Diffusion Morning Report 04/09/04 Message-ID: <4076B527.10004@snf.stanford.edu> Good Morning All, Looking OK this morning. Had to reinstall old LonH3 mfc in nitride, new one died. Epi is still testing. Burn box cleaned this morning. TEOS 2 line being heat taped. Everything else looking OK. Diffusion Date: 4/10/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC is hereand installed-heattape in Tylan 8-SiGe Up 5.4/30 Tylan 9-Poly Up 17.45/30 Tylan 10-Nitride yellow particles-better??-LoNH3 mfc replaced again 9.7/30 Tylan 11-BPSG-LTO Up 13.47/30 Tylan 12-FGA Up Tystar Up 1.7/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up Cleaned this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 610 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Apr 12 07:08:54 2004 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 12 Apr 2004 07:08:54 -0700 Subject: Diffusion Morning Report 04/12/04 Message-ID: <407AA2F6.7060101@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Epi is back up, TEOS 2 MFC is installed and heat taped-we are testing today. Nitride is still under observation and waiting for a new LoNH3 mfc. Replaced generator on old TEOS on Friday. Everything else looking Good. Diffusion Date: 4/12/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down testing Tylan 8-SiGe Up 5.4/30 Tylan 9-Poly Up 17.75/30 Tylan 10-Nitride yellow particles-better??- 11.2/30 Tylan 11-BPSG-LTO Up 14.2/30 Tylan 12-FGA Up Tystar Up 1.7/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 610 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Apr 13 06:36:59 2004 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 13 Apr 2004 06:36:59 -0700 Subject: Diffusion Morning Report 04/13/04 Message-ID: <407BECFB.7060606@snf.stanford.edu> Good Morning All, Looking good this morning. Nitride , loNH3 mfc was replaced yesterday. TEOS 2 flow has issues(cannot get full flow). Burn box pressure is high, cleaning this morning. Everything else looking ok. Diffusion Date: 4/13/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down testing-flow issue Tylan 8-SiGe Up 5.4/30 Tylan 9-Poly Up 17.75/30 Tylan 10-Nitride yellow particles-better??-LoNH3 mfc changed 12.2/30 Tylan 11-BPSG-LTO Up 14.2/30 Tylan 12-FGA Up Tystar Up 1.7/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up Pressure high ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 610 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Apr 14 06:34:02 2004 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 14 Apr 2004 06:34:02 -0700 Subject: Diffusion Morning Report 04/14/04 Message-ID: <407D3DCA.5020308@snf.stanford.edu> Good Morning All, Looking good this morning. Unfortunately TEOS Mfc had to go back to the vendor-it couldn't make the flow so we are back in wait mode. Nitride is still under observation. Everything else looking OK. Diffusion Date: 4/14/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down testing-MFC returned to vendor Tylan 8-SiGe Up 5.4/30 Tylan 9-Poly Up 17.75/30 Tylan 10-Nitride yellow particles-better??- 12.4/30 Tylan 11-BPSG-LTO Up 15.2/30 Tylan 12-FGA Up Tystar Up 1.7/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 610 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Apr 15 06:43:54 2004 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 15 Apr 2004 06:43:54 -0700 Subject: diffusion Morning Report 04/15/04 Message-ID: <407E919A.6090909@snf.stanford.edu> Good Morning all, Happy tax day. looking pretty good , still observing Nitride. TEOS mfc is back at vendor for check out. Everything else looking good. Diffusion Date: 4/15/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down testing-MFC returned to vendor Tylan 8-SiGe Up 5.4/30 Tylan 9-Poly Up 17.75/30 Tylan 10-Nitride yellow particles-better??- 12.4/30 Tylan 11-BPSG-LTO Up 15.4/30 Tylan 12-FGA Up Tystar Up 4.7/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 610 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Apr 16 06:35:09 2004 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 16 Apr 2004 06:35:09 -0700 Subject: Diffusion Morning Report 04/16/04 Message-ID: <407FE10D.1070401@snf.stanford.edu> Good Morning All, Looking good this morning. Still observing nitride-not much to watch since no one is running it. TEOS 2 mfc still getting checked out. Burn box cleaned this morning. Everything else looking OK. Diffusion Date: 4/16/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down testing-MFC returned to vendor Tylan 8-SiGe Up 5.4/30 Tylan 9-Poly Up 18.05/30 Tylan 10-Nitride yellow particles-better??- 12.4/30 Tylan 11-BPSG-LTO Up 16.3/30 Tylan 12-FGA Up Tystar Up 4.7/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 600 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From gt10065lowkx at yahoo.com Fri Apr 16 06:56:39 2004 From: gt10065lowkx at yahoo.com (Procurement) Date: Fri, 16 Apr 2004 12:56:39 -0100 Subject: Special on toner. Message-ID: <8f6101c423ba$a3ba20b0$712dba75@gt10065lowkx> An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Apr 19 06:35:38 2004 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 19 Apr 2004 06:35:38 -0700 Subject: Diffusion Morning Report 04/19/04 Message-ID: <4083D5AA.8070604@snf.stanford.edu> Good Morning All, Looking good this morning. Still observing nitride. MFC for TEOS 2 should be back on Wed or Thurs of this week.Everything else looking OK Diffusion Date: 4/19/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC returned to vendor-back Wed. Tylan 8-SiGe Up 5.4/30 Tylan 9-Poly Up 18.17/30 Tylan 10-Nitride yellow particles-better??- 12.4/30 Tylan 11-BPSG-LTO Up 17.24/30 Tylan 12-FGA Up Tystar Up 4.7/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 600 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Apr 20 06:45:04 2004 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 20 Apr 2004 06:45:04 -0700 Subject: Diffusion Morning Report 04/20/04 Message-ID: <40852960.9000006@snf.stanford.edu> Good Morning All, Looking good this morning. Tystar element breaker was off reset-observing. Replaced softpump valve on nitride. TEOS 2 mfc Should be back this week. Burn box pressure high this morning. Everything else looks OK. Diffusion Date: 4/20/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC returned to vendor-back Wed. Tylan 8-SiGe Up 6.0/30 Tylan 9-Poly Up 19.8/30 Tylan 10-Nitride yellow particles-better??- 13.7/30 Tylan 11-BPSG-LTO Up 17.24/30 Tylan 12-FGA Up Tystar ? Element breaker tripped 4.7/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up Pressure High ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 600 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Apr 21 06:36:55 2004 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 21 Apr 2004 06:36:55 -0700 Subject: Diffusion Morning Report 04/21/04 Message-ID: <408678F7.5040002@snf.stanford.edu> Good Morning All, Looking good this morning. Observing Nitride. TEOS 2 MFC should be back this week and we can then move on. Open House seems to be going well. Looking at WBDIFF dryer doesn't seem to be drying too well. Everything else looks good. Diffusion Date: 4/21/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC returned to vendor-back this week? Tylan 8-SiGe Up 6.0/30 Tylan 9-Poly Up 21.57/30 Tylan 10-Nitride yellow particles-better??- 13.7/30 Tylan 11-BPSG-LTO Up 17.67/30 Tylan 12-FGA Up Tystar Up 4.7/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 600 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Apr 22 06:41:12 2004 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 22 Apr 2004 06:41:12 -0700 Subject: Diffusion Morning Report 04/22/04 Message-ID: <4087CB78.2020702@snf.stanford.edu> Good Morning All, Looking Pretty good this Morning. Observing Nitride. Waiting for TEOS 2 MFC. HCl for Epi is getting close to change. Everything else is looking pretty good. Diffusion Date: 4/22/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC returned to vendor-back this week? Tylan 8-SiGe Up 6.61/30 Tylan 9-Poly Up 23.8/30 Tylan 10-Nitride yellow particles-better??- 14.0/30 Tylan 11-BPSG-LTO Up 22.2/30 Tylan 12-FGA Up Tystar Up 4.7/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 580 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Apr 23 06:48:13 2004 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 23 Apr 2004 06:48:13 -0700 Subject: Diffusion Morning Report 04/23/04 Message-ID: <40891E9D.8090000@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Observing Nitride. Waiting for MFC for TEOS2. Burn box cleaned this morning. Everything else looking good. Diffusion Date: 4/23/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC returned to vendor-back this week? Tylan 8-SiGe Up 6.6/30 Tylan 9-Poly Up 23.8/30 Tylan 10-Nitride yellow particles-better??- 14.0/30 Tylan 11-BPSG-LTO Up 22.7/30 Tylan 12-FGA Up Tystar Up 7.7/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up Cleaned this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 580 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From jhampton at CMIServices.biz Fri Apr 23 11:57:33 2004 From: jhampton at CMIServices.biz (CMI) Date: Fri, 23 Apr 2004 18:57:33 GMT Subject: Online registration for your reunion in less than 10 minutes and for only $9.95? Message-ID: Interested in setting up online registration for your reunion in less than 10 minutes and for only $9.95? 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URL: From tberg at snf.stanford.edu Mon Apr 26 06:41:29 2004 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 26 Apr 2004 06:41:29 -0700 Subject: Diffusion Morning Report 04/26/04 Message-ID: <408D1189.7000602@snf.stanford.edu> Good Morning All, Looking pretty good thismorning. TEOS 2 mfc should be here Wed. Still observing nitride. Reset slave computer on Tylan 1. Saw no problem with Tylan 4 will observe. Everything else looks ok. > Diffusion Date: 4/26/2004 > Tube Name/Number Status Comments THICKNESS-Change at > Tylan 1 Up > Tylan 2 Up > Tylan 3 Up > Tylan 4 Up > Tylan 5-BBr3 Up > Tylan 6-POCl3 Up > Tylan 7-TEOS2 down MFC returned to vendor-back this week? > Tylan 8-SiGe Up 6.6/30 > Tylan 9-Poly Up 23.8/30 > Tylan 10-Nitride yellow particles-better??- 16.6/30 > Tylan 11-BPSG-LTO Up 23.06/30 > Tylan 12-FGA Up > Tystar Up 11.1/30 > Doped Poly GONE > TEOS yellow running > Tylan 16 N/A > Burn Box Up High pressure this morning cleaned > ZYGO Up > > GAAS 22 UP > GAAS 23 UP > > SiH4 for furnaces Auto changeover working well A on line 580 PSI > -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Apr 27 07:11:00 2004 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 27 Apr 2004 07:11:00 -0700 Subject: Diffusion Morning Report 04/27/04 Message-ID: <408E69F4.2060203@snf.stanford.edu> Good Morning All, Looking Ok this Morning Tylan 1 down for i/o error checking it out Nitride still under observation. Put original SRD back in WBdiff TEOS 2 mfc should be back this week. Everything else looking OK. Diffusion Date: 4/27/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 down I/O error Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC returned to vendor-back this week? Tylan 8-SiGe Up 6.6/30 Tylan 9-Poly Up 23.8/30 Tylan 10-Nitride yellow particles-better??- 16.6/30 Tylan 11-BPSG-LTO Up 23.06/30 Tylan 12-FGA Up Tystar Up 11.1/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 580 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Apr 28 07:15:53 2004 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 28 Apr 2004 07:15:53 -0700 Subject: Diffusion Morning Report 04/28/04 Message-ID: <408FBC99.90703@snf.stanford.edu> Good Morning All, Several issues this morning. Nitride not venting again-soft pump change-still working on Heater issues. Tylan 1 still has I/O error Tylan4 has a cracked cantileversheath-replacing. Tylan3 has thickness issues-investigating. TEOS 2 MFC still not here. Everything else looking OK. Diffusion Date: 4/28/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 down I/O error Tylan 2 Up Tylan 3 yellow thickness issues Tylan 4 down cracked cantilever sheath Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC returned to vendor-back this week? Tylan 8-SiGe Up 6.6/30 Tylan 9-Poly Up 25.08/30 Tylan 10-Nitride yellow particles-better??-won't vent 16.6/30 Tylan 11-BPSG-LTO Up 23.06/30 Tylan 12-FGA Up Tystar Up 11.1/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 580 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Apr 29 07:33:35 2004 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 29 Apr 2004 07:33:35 -0700 Subject: Diffusion Morning Report 04/29/04 Message-ID: <4091123F.60906@snf.stanford.edu> Good Morning All, Looking Ok this morning. A few issues. Tylan 1 down for I/o error. still investigating. Tylan 3 has bad uniformity but is being run so we cannot work on it. TEOS 2 MFC is supposed to be back tomorrow. Epi is back up after EPROM change. Everything else seems to be ok. Diffusion Date: 4/29/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 down I/O error Tylan 2 Up Tylan 3 yellow thickness issues Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC returned to vendor-back this week? Tylan 8-SiGe Up 6.6/30 Tylan 9-Poly Up 25.08/30 Tylan 10-Nitride yellow particles-better??; 19/30 Tylan 11-BPSG-LTO Up 23.06/30 Tylan 12-FGA Up Tystar Up 11.1/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 580 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Apr 30 06:39:04 2004 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 30 Apr 2004 06:39:04 -0700 Subject: Diffusion Morning Report 04/30/04 Message-ID: <409256F8.1070501@snf.stanford.edu> Good Morning All, Looking ok this morning. TEOS2 mfc is back and being installed. Nitride won't vent-replacing soft pump and applying heater. Tylan3 taking apart door and replacing injector for dep rate issues. Tylan 1 still down for I/O error. Everything else looking OK. Diffusion Date: 4/30/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 down I/O error Tylan 2 Up Tylan 3 down thickness issues-checking it out Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC is back being installed Tylan 8-SiGe Up 6.6/30 Tylan 9-Poly Up 25.08/30 Tylan 10-Nitride yellow particles-better??; 19.5/30 Tylan 11-BPSG-LTO Up 24.4/30 Tylan 12-FGA Up Tystar Up 11.1/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up cleaned this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 580 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Apr 30 06:39:48 2004 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 30 Apr 2004 06:39:48 -0700 Subject: Diffusion Morning Report 04/30/04 Message-ID: <40925724.2070806@snf.stanford.edu> Good Morning All, Looking ok this morning. TEOS2 mfc is back and being installed. Nitride won't vent-replacing soft pump and applying heater. Tylan3 taking apart door and replacing injector for dep rate issues. Tylan 1 still down for I/O error. Everything else looking OK. Diffusion Date: 4/30/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 down I/O error Tylan 2 Up Tylan 3 down thickness issues-checking it out Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC is back being installed Tylan 8-SiGe Up 6.6/30 Tylan 9-Poly Up 25.08/30 Tylan 10-Nitride yellow particles-better??; 19.5/30 Tylan 11-BPSG-LTO Up 24.4/30 Tylan 12-FGA Up Tystar Up 11.1/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up cleaned this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 580 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: