From tberg at snf.stanford.edu Mon Aug 2 08:34:50 2004 From: tberg at snf.stanford.edu (tberg) Date: Mon, 02 Aug 2004 08:34:50 -0700 Subject: Diffusion Morning Report 08/02/04 Message-ID: <410E5F1A.7030405@snf.stanford.edu> Good Morning all, Looking OK this morning. Nitride is the problem child today. Had pump off on Fri morning, replaced pump would not base, still had a leak in the tube, pulling tube. TEOS 2 still checking,THermco poly looking into leak rate. Parts for ZYGO ordered. EBeam saga continues.everything else looking OK. Diffusion Date: 8/2/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 10.5/30 Tylan 9-Poly Up 24.84/30 Tylan 10-Nitride down Leak-pull and Clean 0/30 Tylan 11-BPSG-LTO Up 11.3/30 Tylan 12-FGA Up Tystar Up 13.72/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO down instrumentation problems-parts ordered GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 180.0 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Aug 3 06:53:35 2004 From: tberg at snf.stanford.edu (tberg) Date: Tue, 03 Aug 2004 06:53:35 -0700 Subject: Diffusion Morning Report 08/03/04 Message-ID: <410F98DF.4000608@snf.stanford.edu> Good Morning all, Looking pretty good this morning. Nitride is in coat after pull and clean will need a test. Zygo waiting for service PO to go through. TEOS 2 observing/testing . Thermco poly cheking lkeak integrity. Everything else looks ok for now. Diffusion Date: 8/3/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 10.5/30 Tylan 9-Poly Up 24.84/30 Tylan 10-Nitride down Pull and clean completed in coat 0/30 Tylan 11-BPSG-LTO Up 11.3/30 Tylan 12-FGA Up Tystar Up 13.92/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO down instrumentation problems-parts ordered GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 180.0 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Aug 4 08:48:19 2004 From: tberg at snf.stanford.edu (tberg) Date: Wed, 04 Aug 2004 08:48:19 -0700 Subject: Diffusion Morning Report 08/04/04 Message-ID: <41110543.4070303@snf.stanford.edu> Good Morning all, Looking good this morning..Nitride test was OK but had trouble pumping down. Mike checked it out and it looked OK. ZYGO P.O is done waiting for Zygo response. Everything else looking OK. Diffusion Date: 8/4/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 10.5/30 Tylan 9-Poly Up 25.09/30 Tylan 10-Nitride Up door not closing 1.1/30 Tylan 11-BPSG-LTO Up 11.5/30 Tylan 12-FGA Up Tystar Up 13.92/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO down instrumentation problems-parts ordered GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 180.0 PSI . . -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Aug 5 07:28:28 2004 From: tberg at snf.stanford.edu (tberg) Date: Thu, 05 Aug 2004 07:28:28 -0700 Subject: Diffusion Morning Report 08/05/04 Message-ID: <4112440C.6000508@snf.stanford.edu> Good Morning All, Looking OK this morning. Problems with nitride venting-looking into it. Tystar having problems crossing over to hard pump-investigating. TEOS 2 MFC is a battle. Zygo PO is placed and they should be ordering parts.. Poly will be going down next Wed. 8-11 for pull and clean. Everything else seems to be ok. Diffusion Date: 8/5/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 10.5/30 Tylan 9-Poly Up 25.09/30 Tylan 10-Nitride yellow will not vent 2.25/30 Tylan 11-BPSG-LTO Up 11.5/30 Tylan 12-FGA Up Tystar Up 14.11/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO down instrumentation problems-parts ordered GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 170.0 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Aug 6 06:51:51 2004 From: tberg at snf.stanford.edu (tberg) Date: Fri, 06 Aug 2004 06:51:51 -0700 Subject: Diffusion Morning Report 08/06/04 Message-ID: <41138CF7.2080304@snf.stanford.edu> Good Morning All, Looking Pretty good this morning. LTO has issues with dep rate-looking into it. TEOS 2 investigating, Thermco poly cheking system. Zygo Po Placed waiting for FS. Everything else is ok. Diffusion Date: 8/6/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 10.5/30 Tylan 9-Poly Up 26.95/30 Tylan 10-Nitride Up 3.05/30 Tylan 11-BPSG-LTO down No dep 12.5/30 Tylan 12-FGA Up Tystar Up 14.11/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO down instrumentation problems-parts ordered GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 160.0 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Aug 9 06:30:17 2004 From: tberg at snf.stanford.edu (tberg) Date: Mon, 09 Aug 2004 06:30:17 -0700 Subject: Diffusion Morning Report 08/09/04 Message-ID: <41177C69.6050901@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Long Run in Poly already at 35 microns. TEOS 2 still looking into TEOS flow issues. Zygo waiying for FS Everything else is looking OK for now. > Diffusion Date: 8/9/2004 > Tube Name/Number Status Comments THICKNESS-Change at > Tylan 1 Up > Tylan 2 Up > Tylan 3 Up > Tylan 4 Up > Tylan 5-BBr3 Up > Tylan 6-POCl3 Up > Tylan 7-TEOS2 down Qual testing-reoreinted MFC > Tylan 8-SiGe Up 10.79/30 > Tylan 9-Poly Up 35.28/30 > Tylan 10-Nitride Up 3.35/30 > Tylan 11-BPSG-LTO Up 17.5/30 > Tylan 12-FGA Up > Tystar Up 14.47/30 > Doped Poly GONE > TEOS yellow running > Tylan 16 N/A > Burn Box Up > ZYGO down instrumentation problems-parts ordered > > GAAS 22 UP > GAAS 23 UP > > SiH4 for furnaces Auto changeover working well A on line 120.0 PSI > -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Aug 10 07:07:47 2004 From: tberg at snf.stanford.edu (tberg) Date: Tue, 10 Aug 2004 07:07:47 -0700 Subject: Diffusion Morning Report 08/10/04 Message-ID: <4118D6B3.1010508@snf.stanford.edu> Good Morning All, Looking pretty ghood this morning. Still waiting for ZYGO FS. Poly at 35+ microns pull tomorrow. TEOS 2 investigating. Tylan 3 had H2 flow issues. Added oil to Epi pump. Everything else looking OK. Diffusion Date: 8/10/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 yellow H2/O2 flow issue Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 10.79/30 Tylan 9-Poly Up 35.4/30 Tylan 10-Nitride Up 3.82/30 Tylan 11-BPSG-LTO Up 18.5/30 Tylan 12-FGA Up Tystar Up 14.47/30 Doped Poly GONE TEOS up running Tylan 16 N/A Burn Box Up ZYGO down instrumentation problems-parts ordered GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 120.0 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Aug 11 06:56:18 2004 From: tberg at snf.stanford.edu (tberg) Date: Wed, 11 Aug 2004 06:56:18 -0700 Subject: Diffusion Morning Report 08/11/04 Message-ID: <411A2582.4020308@snf.stanford.edu> Good Morning All, Looking good this morning. Poly is down for pull and clean. Zygo is still down waiting for the board and FS. TEOS 2 still problems with TEOS flow. Everything else looking ok for now. Diffusion Date: 8/11/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 10.79/30 Tylan 9-Poly down scheduled pull and clean 0/30 Tylan 10-Nitride Up 4.02/30 Tylan 11-BPSG-LTO Up 18.95/30 Tylan 12-FGA Up Tystar Up 14.52/30 Doped Poly GONE TEOS up running Tylan 16 N/A Burn Box Up ZYGO down instrumentation problems-parts ordered GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 100.0 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Aug 12 06:56:08 2004 From: tberg at snf.stanford.edu (tberg) Date: Thu, 12 Aug 2004 06:56:08 -0700 Subject: Diffusion Morning Report 08/12/04 Message-ID: <411B76F8.3050709@snf.stanford.edu> Good morning all, Looking pretty good this morning. Poly is coating and will need a test after tube change. Zygo is working for now, i put the old Power supply back in Zygo is trying to figure out where the board we ordered is. TEOS 2 investigating TEOS flow. Thermco poly testing. Everything else looks OK. Diffusion Date: 8/11/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 11.55/30 Tylan 9-Poly down coat and test-after P & C 0/30 Tylan 10-Nitride Up 6.16/30 Tylan 11-BPSG-LTO Up 19.7/30 Tylan 12-FGA Up Tystar Up 14.52/30 Doped Poly GONE TEOS up Tylan 16 N/A Burn Box Up ZYGO yellow re-installed old PS- working for now GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 100.0 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Aug 13 06:34:21 2004 From: tberg at snf.stanford.edu (tberg) Date: Fri, 13 Aug 2004 06:34:21 -0700 Subject: Diffusion Morning Report 08/13/04 Message-ID: <411CC35D.3050908@snf.stanford.edu> Good Morning All, Looking good this morning. TEOS2 flow under investigation. Burn box cleaned this morning. Everything else looking OK for now. Diffusion Date: 8/12/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 11.55/30 Tylan 9-Poly Up .18/30 Tylan 10-Nitride Up 6.26/30 Tylan 11-BPSG-LTO Up 19.7/30 Tylan 12-FGA Up Tystar Up 14.52/30 Doped Poly GONE TEOS up Tylan 16 N/A Burn Box Up Cleaned this morning ZYGO yellow re-installed old PS- working for now GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 80.0 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Aug 16 06:36:09 2004 From: tberg at snf.stanford.edu (tberg) Date: Mon, 16 Aug 2004 06:36:09 -0700 Subject: Diffusion Morning Report 08/16/04 Message-ID: <4120B849.4080902@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Zygo is back down-FS in Friday should be back today with the board. TEOS 2 evaluating, THermco poly-testing, massaging recipes. Everything else looking OK for now. Diffusion Date: 8/13/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 11.55/30 Tylan 9-Poly Up .33/30 Tylan 10-Nitride Up 6.26/30 Tylan 11-BPSG-LTO Up 19.8/30 Tylan 12-FGA Up Tystar Up 14.52/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly Down Testing Thermco Nitride Down Waiting Burn Box Up ZYGO down FS should be back today GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 75.0 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Aug 17 06:44:52 2004 From: tberg at snf.stanford.edu (tberg) Date: Tue, 17 Aug 2004 06:44:52 -0700 Subject: Diffusion Morning Report 08/17/04 Message-ID: <41220BD4.9020805@snf.stanford.edu> Good Morning All, Looking Good This Morning. Testing Thermco Poly. Evaluating TEOS 2. Everything else loooking OK for now. SiH4 switched over last night as planned. Diffusion Date: 8/17/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 11.55/30 Tylan 9-Poly Up .33/30 Tylan 10-Nitride Up 7.22/30 Tylan 11-BPSG-LTO Up 20.71/30 Tylan 12-FGA Up Tystar Up 20.52/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly Down Testing Thermco Nitride Down Waiting Burn Box Up ZYGO down FS has board should be back today GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 730 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtang at snf.stanford.edu Tue Aug 17 07:21:24 2004 From: mtang at snf.stanford.edu (Mary Tang) Date: Tue, 17 Aug 2004 07:21:24 -0700 Subject: Diffusion Morning Report 08/17/04 References: <41220BD4.9020805@snf.stanford.edu> Message-ID: <41221464.885DEADF@snf.stanford.edu> Hi all -- I forgot to send a note out yesterday.... There's been a call to cancel morning meetings today, because several of us will be prepping for the BBQ. However, if the rest of you would still like to meet, then by all means, please do. (Ted, Dick, Paul, Ed - cancellations include the beam tools meeting.(!??!)) Mary -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From tberg at snf.stanford.edu Wed Aug 18 06:28:44 2004 From: tberg at snf.stanford.edu (tberg) Date: Wed, 18 Aug 2004 06:28:44 -0700 Subject: Diffusion Morming Report 08/18/04 Message-ID: <4123598C.3050109@snf.stanford.edu> Good Morning All, Looking good this morning. TEOS 2 is under observation. Ran another test in THermco poly yesterday that turned out ok. Phosphine cylinder change tomorrow will effect LTO and Tystar- no doped runs non doped OK. Everything else looks OK for now. Zygo is back up after board swap. Diffusion Date: 8/18/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 11.55/30 Tylan 9-Poly Up .33/30 Tylan 10-Nitride Up 7.54/30 Tylan 11-BPSG-LTO Up 21.61/30 Tylan 12-FGA Up Tystar Up 20.52/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly Down Testing Thermco Nitride Down Waiting Burn Box Up ZYGO Up board changed looks good GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 720 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Aug 19 07:04:16 2004 From: tberg at snf.stanford.edu (tberg) Date: Thu, 19 Aug 2004 07:04:16 -0700 Subject: Diffusion Morning Report 08/19/04 Message-ID: <4124B360.2060308@snf.stanford.edu> Good Morning All, Looking Good this morning. Phosphine cylinder change no doped recipes on LTO or Poly. TEOS 2 under observation. Testing Thermco Poly. Everything else looks OK for now. Diffusion Date: 8/19/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 11.55/30 Tylan 9-Poly Up .33/30 Tylan 10-Nitride Up 8.6/30 Tylan 11-BPSG-LTO Up 22.11/30 Tylan 12-FGA Up Tystar Up 23.52/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly Down Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 720 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Aug 20 07:17:49 2004 From: tberg at snf.stanford.edu (tberg) Date: Fri, 20 Aug 2004 07:17:49 -0700 Subject: Diffusion Morning Report 08/20/04 Message-ID: <4126080D.2040207@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Burn box cleaned this morning. Testing TEOS 2 again. Thermco Poly testing. No problem found on Tylan 4. Everything else looks ok for now. Diffusion Date: 8/20/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 11.99/30 Tylan 9-Poly Up .5/30 Tylan 10-Nitride Up 9.28/30 Tylan 11-BPSG-LTO Up 22.625/30 Tylan 12-FGA Up Tystar Up 23.72/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly Down Testing Thermco Nitride Down Waiting Burn Box Up Cleaned this morning ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 720 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Aug 23 06:46:21 2004 From: tberg at snf.stanford.edu (tberg) Date: Mon, 23 Aug 2004 06:46:21 -0700 Subject: Diffusion Morning Report 08/23/04 Message-ID: <4129F52D.7050105@snf.stanford.edu> Good Morning All, Looking pretty good this morning. TEOS2 tests last week looking better. Thermco poly testing. No other problems at this time. Diffusion Date: 8/23/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 11.99/30 Tylan 9-Poly Up 4.6/30 Tylan 10-Nitride Up 10.5/30 Tylan 11-BPSG-LTO Up 22.625/30 Tylan 12-FGA Up Tystar Up 23.82/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly Down Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 700 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Aug 24 06:27:55 2004 From: tberg at snf.stanford.edu (tberg) Date: Tue, 24 Aug 2004 06:27:55 -0700 Subject: Diffusion Morning Report 08/24/04 Message-ID: <412B425B.5080209@snf.stanford.edu> Good Morning all, Looking pretty good this morning, Testing TEOS 2 . Cleaning TEOS 1 tube output.. Thermco poly testing. Everything else looks OK for now. Diffusion Date: 8/24/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 11.99/30 Tylan 9-Poly Up 4.6/30 Tylan 10-Nitride Up 10.63/30 Tylan 11-BPSG-LTO Up 22.745/30 Tylan 12-FGA Up Tystar Up 26.82/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly Down Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 700 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Aug 25 06:35:53 2004 From: tberg at snf.stanford.edu (tberg) Date: Wed, 25 Aug 2004 06:35:53 -0700 Subject: Diffusion Morning Report 08/25/04 Message-ID: <412C95B9.7070609@snf.stanford.edu> Good Morning All, Looking pretty good this morning. TEOS 2 testing is moving along, ran a 2 hour test yesterday. THermco Poly waiting. Tystar getting close to pull it is at 27 microns. Diffusion Date: 8/25/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 11.99/30 Tylan 9-Poly Up 4.72/30 Tylan 10-Nitride Up 10.88/30 Tylan 11-BPSG-LTO Up 23.54/30 Tylan 12-FGA Up Tystar Up 27.11/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly Down Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 680 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From up at glass04house.com Wed Aug 25 18:08:12 2004 From: up at glass04house.com (University of Phoenix) Date: Wed, 25 Aug 2004 20:08:12 -0500 Subject: Looking for an edge? Message-ID: <1093478892.5737@host119.glass04house.com> An HTML attachment was scrubbed... URL: From up at glasshouse01.com Thu Aug 26 00:52:13 2004 From: up at glasshouse01.com (University of Phoenix) Date: Thu, 26 Aug 2004 02:52:13 -0500 Subject: Discover the most flexible degree format available Message-ID: <1093503133.2936@host115.glasshouse01.com> An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Aug 26 07:37:19 2004 From: tberg at snf.stanford.edu (tberg) Date: Thu, 26 Aug 2004 07:37:19 -0700 Subject: Diffusion Morning Report 08/26/04 Message-ID: <412DF59F.2060608@snf.stanford.edu> Good Morning All, Looking OK this morning. LTO pumped down fine this morning and leak rate was good maybe wet wafers? TEOS 2 testing . Thermco Poly waiting. Diffusion Date: 8/26/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 11.99/30 Tylan 9-Poly Up 4.88/30 Tylan 10-Nitride Up 10.88/30 Tylan 11-BPSG-LTO Up won't pump down-checked OK this morning 24.89/30 Tylan 12-FGA Up Tystar Up 27.11/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly Down Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 680 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From vpn at discovery04wind.com Thu Aug 26 09:46:05 2004 From: vpn at discovery04wind.com (VPN) Date: Thu, 26 Aug 2004 08:46:05 -0800 Subject: Guaranteed $5,000 Credit Line for all Life's Needs Message-ID: <1093535165.3641@host126.discovery04wind.com> An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Aug 27 07:11:00 2004 From: tberg at snf.stanford.edu (tberg) Date: Fri, 27 Aug 2004 07:11:00 -0700 Subject: Diffusion Morning Report 08/27/04 Message-ID: <412F40F4.2060100@snf.stanford.edu> Good Morning All, Looking good this morning. LTO down for pull and clean. Burn box cleaned this morning. TEOS 2 testing. Thermco Poly waiting. Epi gold is burned and will be replaced. No other issues at this time. Diffusion Date: 8/27/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 11.99/30 Tylan 9-Poly Up 5.05/30 Tylan 10-Nitride Up 10.88/30 Tylan 11-BPSG-LTO down pull and clean 0/30 Tylan 12-FGA Up Tystar Up 27.11/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly Down Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 680 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From niceman1251 at gawab.com Fri Aug 27 21:56:41 2004 From: niceman1251 at gawab.com (Man) Date: Sat, 28 Aug 2004 07:56:41 +0300 Subject: What Is Islam Message-ID: Please forgive us for any disturbance, but we have an important subject to address to you regarding FAITH, and we Don't intend to overload your email with unnecessary messages... What Is Islam Oneness of God Islam enjoins faith in the oneness and sovereignty of God, which creates an awareness of the unity and meaningfulness of the universe and of man's place in it. This belief frees him from all fears and superstitions by making him conscious of the presence of the Almighty God and of man's obligations to Him. But this realization must be expressed and tested in action. Faith alone is not enough. Belief in one God requires that we look upon all humanity as one family under the universal omnipotence of God - the Creator and Nourisher of all. Islam rejects the idea that there is a "chosen people" making pure intention, faith in God, and good deeds the only way to heaven. Thus a direct relationship is established with God, open to all alike, without any discrimination or intercession. The Qur'an and Hadith The Qur'an is the last revealed word of God and the basic source of Islamic teachings and laws. It deals with a variety of subjects including the basic beliefs of Islam, morality, worship, knowledge, wisdom, God-and-man relationships, and relations among human beings. Comprehensive teachings on which sound systems of social justice, politics, economics, legislation, jurisprudence, law and international relations can be built from an important part of the Holy Qur'an. Though Prophet Muhammad did not receive a formal education, the Qur'an, as soon as it was revealed to him in the spoken word, was committed to writing by his secretaries. In this way every word was written down and preserved during his lifetime by his companions. The original and complete text of the Qur'an is in Arabic and translations of its meaning in most known languages are available in major libraries and bookstores. Hadith, the teachings, sayings and actions of Prophet Muhammad, accurately reported and collected by his devoted companions, explain and elaborate the Qur'anic verses. Concept of Worship Islam does not teach ritualism. It places great emphasis on intention and action. To worship God is to love him and to act upon His commands in every aspect of life, to enjoin goodness and forbid wrong-doing and oppression, to practice charity and justice and to serve Him by serving mankind. The Qur'an presents this sublime concept in the following manner: "It is not righteousness that you turn your faces to the East or West, but righteous is he who believes in Allah and the Last Day and the Angels and the Scripture and the Prophets; and gives his wealth for love of Him to kinsfolk and to orphans and the needy and the wayfarer and to those who ask, and sets slaves free; and observes proper worship and pays the Zakah. And those who keep their treaty when they make one, and the patient in tribulation and adversity and time of stress; such are those who are sincere. Such are the Godfearing". Qur'an 2:177. Man, A Free Agent Man is the highest creation of God and he has a free will to make his own decisions. God has shown him the right path, and the life of Prophet Muhammad provides a perfect example for achieving success and salvation. Islam stands for the sanctity of human personality and confers equal rights on all without distinction of race, nationality or sex. The law of God set down in the Qur'an and exemplified in the life of the Prophet is supreme in all cases. It applies equally to the prince and the pauper, the ruler and the ruled, the saint and the sinner. Man's Accountability to God Man's life is not limited to the short span of earthly existence. On the day of judgement the entire human race will be resurrected; everyone will appear before the Almighty God and face the consequences of his deeds in this life. Thus, life in the Hereafter is a continuation of the earthly life. Belief in man's accountability to God gives a sense and meaning to life and differentiates human beings from animals and inanimate objects. It serves as a reminder against crime, corruption, immorality, and injustice. Human Rights Islam protects all noble values and human rights. Freedom, equality, justice, and the right to life, liberty, and security of person are of prime concern in Islamic law. "Whosoever kills a human being for other than manslaughter or corruption in the earth, it shall be as if he had killed all mankind, and whosoever saves the life of one, it shall be as if he had saved the life of all mankind..." Qur'an 5:32. Islam places great emphasis on social justice. It opposes all those who exploit, oppress and deal unjustly with people. " O ye who believe: Be steadfast witnesses for Allah in equity and let not hatred of any people seduce you that you deal not justly. Be just; that is nearer to piety". Qur'an 5:8. Science and Technology Islam encourages the use of science and the scientific method. Acquisition of knowledge is obligatory on every Muslim, male and female. In Islam, science and technology should be used for moral ends and serve all legitimate needs of mankind. Moreover, both are viewed as yet another means to understand and see the power and glory of God. "He it is Who created for you all that is in the earth." Qur'an 2:29. "It is your Lord, the Most Bounteous, Who taught by the pen, taught man that which he knew not..." Qur'an 96:2- 5. "We shell show them our Signs on the horizons and within themselves until it will be manifest unto them that it is the Truth..." Qur'an 41:53. Islam: The Cure for Modern Ailments Racism is a major problem in many materially advanced countries. Prejudice and discrimination against racial groups is common phenomenon even today. For 1400 years Islam has shown in practice how racism can be ended. The Islamic social scene, particularly during the Hajj, is a unique example of the brotherhood of men of all races and nations under One God. Similarly, the family, the basic unit of civilization has also become something of a problem in the West. It is in visible decay. The family system of Islam brings the rights of husband, wife, children, and relatives into a fine equilibrium. Islam nourishes generosity in the family and holds it together under the clear Qur'anic laws and teachings of the Prophet Muhammad, peace be upon him. Some Misconceptions About Islam It is unfortunate that some teachings of Islam have been distorted and misrepresented in the West and the communist world. The main distortions relate to the status of women, marriage and divorce, jihad or so-called "holy war", the authenticity of the prophethood of Muhammad (peace be upon him), and the distinction between the Qur'an and the Hadith. The accurate teachings of Islam on these matters can be obtained only from authentic Islamic writings. For more information about Islam http://www.geocities.com/fares2457/1.html -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Mon Aug 30 08:15:47 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Mon, 30 Aug 2004 08:15:47 -0700 Subject: Diffusion Morning Report Message-ID: <413344A3.4D603637@snf.stanford.edu> Good Morning All, Ted is on vacation this week and a couple of days next week. LTO is down, waiting for test/results. Epi is down IR reflectors order submitted to purchasing. Will need tube clean. Everything else looks good. Diffusion Date: 8/30/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Down Qual testing-reoreinted MFC Tylan 8-SiGe Up 11.99/30 Tylan 9-Poly Up 5.31/30 Tylan 10-Nitride Up 10.88/30 Tylan 11-BPSG-LTO Down Pull and clean 0.7/30 Tylan 12-FGA Up Tystar Up 27.11/30 Doped Poly GONE TEOS Up Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 700 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From up at glass04house.com Mon Aug 30 13:27:32 2004 From: up at glass04house.com (University of Phoenix) Date: Mon, 30 Aug 2004 15:27:32 -0500 Subject: Discover the most flexible degree format available Message-ID: <1093894052.7789@host104.glass04house.com> An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Tue Aug 31 08:40:12 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Tue, 31 Aug 2004 08:40:12 -0700 Subject: Diffusion Morning Report Message-ID: <41349BDC.73C3D408@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Poly had to be pulled and cleaned due to brown deposits. It is heating up at this time and headed for a coat/test. Everything except EPI is up and running. Diffusion Date: 8/31/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Down Qual testing-reoreinted MFC Tylan 8-SiGe Up 11.99/30 Tylan 9-Poly Down Tube pull and clean 5.57/30 Tylan 10-Nitride Up 10.915/30 Tylan 11-BPSG-LTO Up 0.7/30 Tylan 12-FGA Up Tystar Up 27.11/30 Doped Poly GONE TEOS Up Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 690 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: