From tberg at snf.stanford.edu  Wed Dec  1 06:25:37 2004
From: tberg at snf.stanford.edu (Ted Berg)
Date: Wed, 01 Dec 2004 06:25:37 -0800
Subject: Diffusion Morning Report 12/01/04
Message-ID: <41ADD461.1060906@snf.stanford.edu>

Good Morning All,
    Happy December to all. Looking pretty good this morning.  Poly is 
back up and Nitride pull and clean is completed and coated-
waiting for a test. Had problems with epi- HCl cylinder change.  Thermco 
poly and TEOS2 testing.  Everything else looks OK for now.

. 	Date: 	12/1/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	Up 	  	12.88/30
Tylan 9-Poly 	Up 	  	.66/30
Tylan 10-Nitride 	down 	pull and clean 	0/30
Tylan 11-BPSG-LTO 	Up 	  	17.56/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	19.98/30
Doped Poly 	GONE 	  	 
TEOS 	up 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	testing 	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 630 PSI


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From tberg at snf.stanford.edu  Thu Dec  2 06:30:24 2004
From: tberg at snf.stanford.edu (Ted Berg)
Date: Thu, 02 Dec 2004 06:30:24 -0800
Subject: [Fwd: Diffusion Morning Report 12/02/04]
Message-ID: <41AF2700.8010309@snf.stanford.edu>



-------- Original Message --------
Subject: 	Diffusion Morning Report 12/02/04
Date: 	Thu, 02 Dec 2004 06:26:26 -0800
From: 	Ted Berg <tberg at snf.stanford.edu>
To: 	interested furnace people <interested furnace people>



Good Morning All,
    Looking OK this morning.  Tylan  Nitride and Poly are back up after 
pulls and under observation.  Thermco poly is down for a cracked tube
will go out for repair.   Epi's gas panel is being rebuilt.  Everything 
else looks OK for now.

. 	Date: 	12/2/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	Up 	  	12.88/30
Tylan 9-Poly 	Up 	  	.66/30
Tylan 10-Nitride 	Up 	  	0/30
Tylan 11-BPSG-LTO 	Up 	  	17.56/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	19.98/30
Doped Poly 	GONE 	  	 
TEOS 	up 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	down 	Cracked tube 	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 630 PSI


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From tberg at snf.stanford.edu  Fri Dec  3 06:37:05 2004
From: tberg at snf.stanford.edu (Ted Berg)
Date: Fri, 03 Dec 2004 06:37:05 -0800
Subject: Diffusion Morning Report 12/03/04
Message-ID: <41B07A11.9040402@snf.stanford.edu>

Good Morning All,
    Looking Ok this morning after a very busy week,  Thank to Mike who 
did 3 tube pulls this week and Ray who fought with the Epi gas panel.  
Tylan Nitride under observation.  Hopefully Epi will be back up today.  
Ebeam vacum is OK again. Problems reported on LTO-phosphine flow 
-checking it out.  Thermco Poly tube out for repair.  Everything else 
looks ok for now.

. 	Date: 	12/3/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	Up 	  	12.88/30
Tylan 9-Poly 	Up 	  	.74/30
Tylan 10-Nitride 	Up 	  	.25/30
Tylan 11-BPSG-LTO 	Up 	  	17.61/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	19.98/30
Doped Poly 	GONE 	  	 
TEOS 	up 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	down 	Cracked tube 	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 630 PSI


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From nanotech at nsti.org  Sun Dec  5 23:34:54 2004
From: nanotech at nsti.org (BioNano 2005)
Date: Sun, 5 Dec 2004 23:34:54 -0800
Subject: BioNano 2005 Abstract Deadline
Message-ID: <SPARKLIST-6199311-2197698-2004.12.05-23.37.59--diffusion#snf.stanford.edu@spirit.sparklist.com>

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From tberg at snf.stanford.edu  Mon Dec  6 06:48:28 2004
From: tberg at snf.stanford.edu (Ted Berg)
Date: Mon, 06 Dec 2004 06:48:28 -0800
Subject: Diffusion Morning Report 12/06/04
Message-ID: <41B4713C.8050508@snf.stanford.edu>

Good Morning all,
    Looking Good this morning. Had aproblem with the burn box yesterday 
and pressure was high again this morning.  Tylan Nitride under
observation .  Thermco poly tube out for repair.  Teos 2 testing. Ray 
worked on the HCL for epi this weekend and  it seems to be holding. 
Everything else seems to be OK for now.

. 	Date: 	12/6/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	Up 	  	12.88/30
Tylan 9-Poly 	Up 	  	7.4/30
Tylan 10-Nitride 	Up 	  	.25/30
Tylan 11-BPSG-LTO 	Up 	  	19.891/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	19.98/30
Doped Poly 	GONE 	  	 
TEOS 	up 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	down 	Cracked tube 	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 630 PSI


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From tberg at snf.stanford.edu  Tue Dec  7 06:32:06 2004
From: tberg at snf.stanford.edu (Ted Berg)
Date: Tue, 07 Dec 2004 06:32:06 -0800
Subject: Diffusion Morning Report 12/07/04
Message-ID: <41B5BEE6.9050309@snf.stanford.edu>

Good  Morning All,
    Looking  good this morning. Nitride is still under observation.  
Burn box was cleaned yesterday.  THermco poly tube should be back today.
TEOS 2 testing.   Everything else looks OK for now.

. 	Date: 	12/7/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	Up 	  	1.0/30
Tylan 9-Poly 	Up 	  	9.3/30
Tylan 10-Nitride 	yellow 	observation 	1.25/30
Tylan 11-BPSG-LTO 	Up 	  	20.4/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	19.98/30
Doped Poly 	GONE 	  	 
TEOS 	up 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	down 	Cracked tube 	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 630 PSI


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From tberg at snf.stanford.edu  Wed Dec  8 06:58:11 2004
From: tberg at snf.stanford.edu (Ted Berg)
Date: Wed, 08 Dec 2004 06:58:11 -0800
Subject: Diffusion Morning Report 12/08/04
Message-ID: <41B71683.4090304@snf.stanford.edu>

Good Morning All,
    Looking good this morning. Burn box had a drain issue this morning 
but it seems ok now.  THermco poly is back up and coated.
TEOS2 still testing Tylan Nitride is still under observation.  Epi 
Germane pressure is holding so we will turn it back on later this morning.
Everything else looks OK for now.


. 	Date: 	12/8/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	Up 	  	12.33.0/30
Tylan 9-Poly 	Up 	  	9.3/30
Tylan 10-Nitride 	yellow 	observation 	1.5/30
Tylan 11-BPSG-LTO 	Up 	  	22.4/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	19.98/30
Doped Poly 	GONE 	  	 
TEOS 	up 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	Cracked tube replaced and coated 	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 630 PSI


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From tberg at snf.stanford.edu  Thu Dec  9 06:40:35 2004
From: tberg at snf.stanford.edu (Ted Berg)
Date: Thu, 09 Dec 2004 06:40:35 -0800
Subject: Diffusion Morning Report 12/09/04
Message-ID: <41B863E3.6020304@snf.stanford.edu>

Good Morning All,
    Looking good this morning. Tylan Nitride is still under observation 
for particles.  TEOS2 and Thermco Poly are testing.  Everything else looks
OK for now.

. 	Date: 	12/9/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	Up 	  	12.33.0/30
Tylan 9-Poly 	Up 	  	9.4/30
Tylan 10-Nitride 	yellow 	observation 	1.8/30
Tylan 11-BPSG-LTO 	Up 	  	23.4/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	23.3/30
Doped Poly 	GONE 	  	 
TEOS 	up 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	  	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 630 PSI


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From nanotech at nsti.org  Thu Dec  9 16:08:22 2004
From: nanotech at nsti.org (Nano Science and Technology Institute)
Date: Thu, 9 Dec 2004 16:08:22 -0800
Subject: Nanotech Courses - Davos Switzerland - Spring 2005
Message-ID: <SPARKLIST-6199311-2199243-2004.12.09-16.10.50--diffusion#snf.stanford.edu@spirit.sparklist.com>

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From tberg at snf.stanford.edu  Fri Dec 10 06:57:18 2004
From: tberg at snf.stanford.edu (Ted Berg)
Date: Fri, 10 Dec 2004 06:57:18 -0800
Subject: Diffusion Morning Report 12/10/04
Message-ID: <41B9B94E.1000300@snf.stanford.edu>

Good morning All,
    Looking Good this morning.  Burn box clean this morning.  Tylan 
Nitride is still under observation for particles.  Thermco poly and 
TEOS2 still testing.
Everything else looking OK for now.

. 	Date: 	12/10/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	Up 	  	12.33.0/30
Tylan 9-Poly 	Up 	  	9.47/30
Tylan 10-Nitride 	yellow 	observation 	1.91/30
Tylan 11-BPSG-LTO 	Up 	  	23.4/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	23.3/30
Doped Poly 	GONE 	  	 
TEOS 	up 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	  	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	Cleaned this morning 	 
ZYGO 	up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 630 PSI


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From tberg at snf.stanford.edu  Mon Dec 13 08:22:11 2004
From: tberg at snf.stanford.edu (Ted Berg)
Date: Mon, 13 Dec 2004 08:22:11 -0800
Subject: Diffusion Morning Report 12/13/04
Message-ID: <41BDC1B3.3010104@snf.stanford.edu>

Good Morning All,
    Looking good after pump change in LTO  Nitride is still under 
observation. Thermco Poly and TEOS2 testing   Everything else
looks OK for now.

. 	Date: 	12/13/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	Up 	  	12.33.0/30
Tylan 9-Poly 	Up 	  	9.76/30
Tylan 10-Nitride 	yellow 	observation 	1.91/30
Tylan 11-BPSG-LTO 	Up 	Replaced pump This morning
	24.9/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	23.3/30
Doped Poly 	GONE 	  	 
TEOS 	up 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	  	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	Cleaned this morning 	 
ZYGO 	up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 630 PSI


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From tberg at snf.stanford.edu  Tue Dec 14 06:26:43 2004
From: tberg at snf.stanford.edu (Ted Berg)
Date: Tue, 14 Dec 2004 06:26:43 -0800
Subject: Diffusion Morning Report 12/14/04
Message-ID: <41BEF823.1080003@snf.stanford.edu>

Good Morning All,
    Looking prttty good this morning.  LTO is moving quickly toward pull 
and clean. Tylan Nitride stiill under observation. Thermco poly
and TEOS2 testing.  Epi has loader issues.  Everything else looks OK for 
now.

. 	Date: 	12/14/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	Up 	  	12.33.0/30
Tylan 9-Poly 	Up 	  	9.76/30
Tylan 10-Nitride 	yellow 	observation 	1.91/30
Tylan 11-BPSG-LTO 	Up 	  	26.52/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	23.3/30
Doped Poly 	GONE 	  	 
TEOS 	up 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	  	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 630 PSI


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From seymour at snf.stanford.edu  Wed Dec 15 07:44:04 2004
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Wed, 15 Dec 2004 07:44:04 -0800
Subject: Diffusion Morning Report
Message-ID: <41C05BC4.2A39C2E@snf.stanford.edu>

Morning,
Ted is out this morning. Everything looking pretty good. Nitride is
under observation . All else is looking good.

Diffusion                          Date:
12/15/2004
Tube Name/Number       Status
Comments                            THICKNESS-Change at
Tylan 1                           Up
Tylan 2                           Up
Tylan 3                           Up
Tylan 4                           Up
Tylan 5-BBr3                 Up
Tylan 6-POCl3               Up
Tylan 7-TEOS2              Down                             Qual
testing
Tylan 8-SiGe
Up
12.33/30
Tylan 9-Poly
Up
9.76/30
Tylan 10-Nitride             Up
observation                             1.91/30
Tylan 11-BPSG-LTO
Up
26.52/30
Tylan 12-FGA                Up
Tystar
Up
23.3/30
Doped Poly                    GONE
TEOS                             Up
Tylan 16 N/A
Yhermco 1                      UP
Thermco 1                      UP
Thermco Poly                Yellow
Thermco Nitride             Down                                Waiting

Burn Box                       Up

ZYGO                          Up

GAAS 22                     UP
GAAS 23                     UP

SiH4 for furnaces                                      Auto changeover
working well  A on line 630 PSI


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From nanotech at nsti.org  Wed Dec 15 22:50:00 2004
From: nanotech at nsti.org (NSTI Nanotech Ventures)
Date: Wed, 15 Dec 2004 22:50:00 -0800
Subject: Nanotech Ventures 2005 - Tokyo & California
Message-ID: <SPARKLIST-6199311-2201670-2004.12.15-22.54.12--diffusion#snf.stanford.edu@spirit.sparklist.com>

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From tberg at snf.stanford.edu  Thu Dec 16 06:33:50 2004
From: tberg at snf.stanford.edu (Ted Berg)
Date: Thu, 16 Dec 2004 06:33:50 -0800
Subject: Diffusion Morning Report 12/16/04
Message-ID: <41C19CCE.20207@snf.stanford.edu>

Good Morning all,
    Getting ready for the Holiday shutdown tomorrow morning.  LTO is at 
29.? and will be changed  during the shutdown. Nitride still
under observation.  Thermco poly is testing doped. TEOS 2 is testing.  
Everything else looks OK for now.

. 	Date: 	12/16/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	Up 	  	12.33.0/30
Tylan 9-Poly 	Up 	  	9.76/30
Tylan 10-Nitride 	yellow 	observation 	2.28/30
Tylan 11-BPSG-LTO 	Up 	  	29.16/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	23.3/30
Doped Poly 	GONE 	  	 
TEOS 	up 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	testing doped 	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 620 PSI


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