From tberg at snf.stanford.edu Mon Feb 2 07:23:50 2004 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 02 Feb 2004 07:23:50 -0800 Subject: Diffusion Morning Report 02/02/04 Message-ID: <401E6B86.5050201@snf.stanford.edu> Good Morning All, We have a few issues this morning. Tystar had a bad TCU board-replaced. SiGe has an intermittant problem with the gate interlock. Tylan 4 is not recognizing the door closed switch. The good news is Nitride seems to be OK. Everything else looking OK. > Diffusion Date: 2/2/2004 > Tube Name/Number Status Comments THICKNESS-Change at > Tylan 1 Up > Tylan 2 Up > Tylan 3 Up > Tylan 4 down Not recognizing door sensor > Tylan 5-BBr3 Up > Tylan 6-POCl3 Up > Tylan 7-TEOS2 down TEOS Conversion > Tylan 8-SiGe yellow gate interlock problem 1.6/30 > Tylan 9-Poly Up 27.9/30 > Tylan 10-Nitride Up particles OK .54/30 > Tylan 11-BPSG-LTO Up 18.8/30 > Tylan 12-FGA Up > Tystar Up Replaced TCU board 17.5/30 > Doped Poly GONE > TEOS yellow running > Tylan 16 N/A > Burn Box Up > ZYGO Up > > GAAS 22 UP > GAAS 23 UP > > SiH4 for furnaces Auto changeover working well Currently 220- > B(c4) on line > -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Feb 3 06:34:38 2004 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 03 Feb 2004 06:34:38 -0800 Subject: Diffusion Morning Report 02/03/04 Message-ID: <401FB17E.7050608@snf.stanford.edu> Good Morning All, Looking pretty good today. TEOS 2 has a pump problem we will be replacing it later this week. we are still moving along. No other issues at this time. Diffusion Date: 2/3/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down TEOS Conversion Tylan 8-SiGe yellow possible gate interlock problem 2.5/30 Tylan 9-Poly Up 27.9/30 Tylan 10-Nitride Up particles OK .63/30 Tylan 11-BPSG-LTO Up 18.8/30 Tylan 12-FGA Up Tystar Up calibration,replaced TCU board 17.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 200- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Feb 4 06:38:55 2004 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 04 Feb 2004 06:38:55 -0800 Subject: Diddusion Morning Report 02/04/04 Message-ID: <402103FF.9020006@snf.stanford.edu> Good Morning All, Looking pretty good this morning. A few particle on Nitride. It would sure be nice to have the surfscan working. SiGe seems to be doing OK but Ge dropped by 12 pounds yesterday. Everything else looking OK. Colby is now working on Wet Ox on the THermcos. TEOS2 is coming along. Diffusion Date: 2/3/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down TEOS Conversion Tylan 8-SiGe yellow gate interlock problem 3.2/30 Tylan 9-Poly Up 27.9/30 Tylan 10-Nitride yellow SOME PARTICLES .77/30 Tylan 11-BPSG-LTO Up 19.09/30 Tylan 12-FGA Up Tystar Up 18.1/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 200- B(c4) on line . -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Feb 5 07:12:29 2004 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 05 Feb 2004 07:12:29 -0800 Subject: Diffusion Morning Report 02/05/04 Message-ID: <40225D5D.5050706@snf.stanford.edu> Diffusion Date: 2/5/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 yellow possible leak problem Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down TEOS Conversion Tylan 8-SiGe Up 3.2/30 Tylan 9-Poly Up 27.9/30 Tylan 10-Nitride yellow SOME PARTICLES .87/30 Tylan 11-BPSG-LTO Up 19.54/30 Tylan 12-FGA Up Tystar Up 18.1/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 180- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Feb 5 07:13:07 2004 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 05 Feb 2004 07:13:07 -0800 Subject: Diffusion Morning Report 02/05/04 Message-ID: <40225D83.7050809@snf.stanford.edu> Diffusion Date: 2/5/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 yellow possible leak problem Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down TEOS Conversion Tylan 8-SiGe Up 3.2/30 Tylan 9-Poly Up 27.9/30 Tylan 10-Nitride yellow SOME PARTICLES .87/30 Tylan 11-BPSG-LTO Up 19.54/30 Tylan 12-FGA Up Tystar Up 18.1/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 180- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Feb 6 06:41:15 2004 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 06 Feb 2004 06:41:15 -0800 Subject: Diffusion Morning Report 02/06/04 Message-ID: <4023A78B.80304@snf.stanford.edu> Good Morning all, Looking pretty good this morning . Had a couple of leak fails yesterday on nitride but leak checked fine manually. TEOS moving along. Everything else looking OK. Poly is getting close to pull and clean. Diffusion Date: 2/6/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down TEOS Conversion Tylan 8-SiGe Up 3.2/30 Tylan 9-Poly Up 27.9/30 Tylan 10-Nitride yellow SOME PARTICLES-possible leak 2.92/30 Tylan 11-BPSG-LTO Up 20.9/30 Tylan 12-FGA Up Tystar Up 21.8/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 170- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Feb 9 06:45:39 2004 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 09 Feb 2004 06:45:39 -0800 Subject: Diffusion Morning Report 02/09/04 Message-ID: <40279D13.9090904@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Some issue with Tylan 4 loader-checking it out. A few particles on Nitride. Everything else looking good. Colby is doing well on Thermco wet ox characterization. TEOS2 is moving along. PO for THERMCO bank 2 install was written to get ready for upcoming move. Stay tuned. Diffusion Date: 2/9/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 yellow boat issue Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down TEOS Conversion Tylan 8-SiGe Up 3.2/30 Tylan 9-Poly Up 27.9/30 Tylan 10-Nitride yellow SOME PARTICLES 3.42/30 Tylan 11-BPSG-LTO Up 26.2/30 Tylan 12-FGA Up Tystar Up 22.1/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 150- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Feb 10 06:49:44 2004 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 10 Feb 2004 06:49:44 -0800 Subject: Diffusion Morning Report 02/10/04 Message-ID: <4028EF88.7010109@snf.stanford.edu> Good Morning All, Looking fair this morning. Nitride has some issues-looking into them. Poly is going down for pul and clean after 10 micron run on Wednesday. Bearings changed on loader on Tylan 4 yesterday. Everything else looking OK. LTO and Tystar getting close to Pull thickness. TEOS2 pump changed yesterday install moving along ok. Diffusion Date: 2/10/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Replaced bearings Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down TEOS Conversion Tylan 8-SiGe Up 3.2/30 Tylan 9-Poly Up 29.9/30 Tylan 10-Nitride down will not pump or vent 4.7/30 Tylan 11-BPSG-LTO Up 26.9/30 Tylan 12-FGA Up Tystar Up 22.1/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 140- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Feb 10 06:59:43 2004 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 10 Feb 2004 06:59:43 -0800 Subject: [Fwd: Diffusion Morning Report 02/10/04] Message-ID: <4028F1DF.20509@snf.stanford.edu> -------- Original Message -------- Subject: Diffusion Morning Report 02/10/04 Date: Tue, 10 Feb 2004 06:49:44 -0800 From: ted berg To: diffusion Good Morning All, Looking fair this morning. Nitride has some issues-looking into them. Poly is going down for pul and clean after 10 micron run on Wednesday. Bearings changed on loader on Tylan 4 yesterday. Everything else looking OK. LTO and Tystar getting close to Pull thickness. TEOS2 pump changed yesterday install moving along ok. Diffusion Date: 2/10/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Replaced bearings Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down TEOS Conversion Tylan 8-SiGe Up 3.2/30 Tylan 9-Poly Up 29.9/30 Tylan 10-Nitride down will not pump or vent 4.7/30 Tylan 11-BPSG-LTO Up 26.9/30 Tylan 12-FGA Up Tystar Up 22.1/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 140- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Feb 10 08:10:21 2004 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 10 Feb 2004 08:10:21 -0800 Subject: [Fwd: [Fwd: Diffusion Morning Report 02/10/04]] Message-ID: <4029026D.2080200@snf.stanford.edu> -------- Original Message -------- Subject: [Fwd: Diffusion Morning Report 02/10/04] Date: Tue, 10 Feb 2004 06:59:43 -0800 From: ted berg To: diffusion -------- Original Message -------- Subject: Diffusion Morning Report 02/10/04 Date: Tue, 10 Feb 2004 06:49:44 -0800 From: ted berg To: diffusion Good Morning All, Looking fair this morning. Nitride has some issues-looking into them. Poly is going down for pul and clean after 10 micron run on Wednesday. Bearings changed on loader on Tylan 4 yesterday. Everything else looking OK. LTO and Tystar getting close to Pull thickness. TEOS2 pump changed yesterday install moving along ok. Diffusion Date: 2/10/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Replaced bearings Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down TEOS Conversion Tylan 8-SiGe Up 3.2/30 Tylan 9-Poly Up 29.9/30 Tylan 10-Nitride down will not pump or vent 4.7/30 Tylan 11-BPSG-LTO Up 26.9/30 Tylan 12-FGA Up Tystar Up 22.1/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 140- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Feb 11 06:37:28 2004 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 11 Feb 2004 06:37:28 -0800 Subject: Diffusion Morning Report 02/11/04 Message-ID: <402A3E28.40805@snf.stanford.edu> Good Morning All, Looking good this morning . Still particle issues on Nitride. TEOS2 in Leak check coming along well. No other problems. Poly will be going down tomorrow for pull and clean after long poly run. LTO and Tystar are getting close to pull thickness. Diffusion Date: 2/11/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down TEOS Conversion Tylan 8-SiGe Up 3.2/30 Tylan 9-Poly Up 29.9/30 Tylan 10-Nitride yellow particles? 4.82/30 Tylan 11-BPSG-LTO Up 26.9/30 Tylan 12-FGA Up Tystar Up 22.4/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 140- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Feb 12 07:03:13 2004 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 12 Feb 2004 07:03:13 -0800 Subject: Diffusion Morning Report 02/12/03 Message-ID: <402B95B1.9010606@snf.stanford.edu> Good Morning All, Looking ok this morning. Poly is down for pull and clean. Nitride still has particle issues. Burn box cleaned this Morning. Everything else looking good. Colby is finishing up the wet ox matrix on THERMCO. TEOS 2 is looking good. Diffusion Date: 2/12/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down TEOS Conversion Tylan 8-SiGe Up 3.2/30 Tylan 9-Poly down pull and clean 0/30 Tylan 10-Nitride yellow particles? 4.82/30 Tylan 11-BPSG-LTO Up 28.5/30 Tylan 12-FGA Up Tystar Up 22.4/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 140- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Fri Feb 13 08:07:29 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Fri, 13 Feb 2004 08:07:29 -0800 Subject: Diffusion Morning Report 2/13/04 Message-ID: <402CF641.430EA940@snf.stanford.edu> Good Morning, Ted is out this morning. There are deposition rate and uniformity issues with Nitride. everything else looks ok. Lot will be going down for a pull and clean the first of next week. Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Yellow Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7 TEOS2 down TEOS conversion Tylan 8-SiGe up 3.02/30 Tylan 9-Poly Up 0/30 Tylan 10-Nitride down uniformity and dep rate issues 6.29/30 Tylan 11-BPSG-LTO up 28.84/30 Tylan 12-FGA Up Tystar Up 22.41/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up Cleaned this morning GAAS 22 UP GAAS 23 UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Fri Feb 13 08:11:13 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Fri, 13 Feb 2004 08:11:13 -0800 Subject: Diffusion Morning Report 2/13/04 Message-ID: <402CF721.E100CBAC@snf.stanford.edu> Good Morning, Ted is out this morning. There are deposition rate and uniformity issues with Nitride. everything else looks ok. LTO will be going down for a pull and clean the first of next week. Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Yellow Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7 TEOS2 down TEOS conversion Tylan 8-SiGe up 3.02/30 Tylan 9-Poly Up 0/30 Tylan 10-Nitride down uniformity and dep rate issues 6.29/30 Tylan 11-BPSG-LTO up 28.84/30 Tylan 12-FGA Up Tystar Up 22.41/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up Cleaned this morning GAAS 22 UP GAAS 23 UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Feb 17 07:05:07 2004 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 17 Feb 2004 07:05:07 -0800 Subject: Diffusion Morning Report 02/17/02 Message-ID: <40322DA3.80802@snf.stanford.edu> Good Morning All, WE have a few issues this morning. Nitride is down pump was off-checking into it. LTO is down for pull and clean. TEOS2 is now on coral and getting close to testing process. Colby just about has Thermco oxides whipped into shape.Everything else looking OK for now. Diffusion Date: 2/17/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down TEOS Conversion Tylan 8-SiGe Up 3.2/30 Tylan 9-Poly Up 4.56/30 Tylan 10-Nitride down particles?pump off, dep rate 6.45/30 Tylan 11-BPSG-LTO down Pull and clean 0/30 Tylan 12-FGA Up Tystar Up 22.4/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 80- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Feb 18 06:41:25 2004 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 18 Feb 2004 06:41:25 -0800 Subject: Diffusion Morning Report 02/18/02 Message-ID: <40337995.9090606@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Nitride seems to be behaving better. LTO has been pulled cleaned and coated. Needs test. TEOS2 coming along..Everything else looking OK. Diffusion Date: 2/18/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down TEOS Conversion Tylan 8-SiGe Up 3.2/30 Tylan 9-Poly Up 5.6/30 Tylan 10-Nitride yellow Pump changed,particles 6.45/30 Tylan 11-BPSG-LTO down Pull & clean completed need test 0/30 Tylan 12-FGA Up Tystar Up 22.4/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 80- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Feb 19 06:43:02 2004 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 19 Feb 2004 06:43:02 -0800 Subject: Diffusion Morning Report 02/19/04 Message-ID: <4034CB76.1000706@snf.stanford.edu> Good Morning all, Looking good this morning. LTO is back up after pull and clean. Nitride is doing OK after pump change. FGA has an issue with Temp. Looking into it. Everything else looking good. TEOS 2 is coming along. Diffusion Date: 2/18/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down TEOS Conversion Tylan 8-SiGe Up 3.44/30 Tylan 9-Poly Up 6.2/30 Tylan 10-Nitride yellow Pump changed,particles 6.45/30 Tylan 11-BPSG-LTO Up .5/30 Tylan 12-FGA down Temp Problem Tystar Up 22.4/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 80- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Feb 20 06:36:51 2004 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 20 Feb 2004 06:36:51 -0800 Subject: Diffusion Morning Report 02/20/04 Message-ID: <40361B83.7090709@snf.stanford.edu> Good Morning All, Looking Pretty good this morning. Still some particles on Nitride. Burn box checked this morning. TEOS2 has some issues with flow controller-investigating. Everything else looking good. Diffusion Date: 2/20/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down TEOS Conversion Tylan 8-SiGe Up 3.44/30 Tylan 9-Poly Up 6.2/30 Tylan 10-Nitride yellow particles 6.45/30 Tylan 11-BPSG-LTO Up 2.1/30 Tylan 12-FGA Up Tystar Up 22.4/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 80- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Feb 23 06:34:28 2004 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 23 Feb 2004 06:34:28 -0800 Subject: Diffusion Morning Report 02/23/04 Message-ID: <403A0F74.3040400@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Nitride still has some particles. TEOS 2 needs a different flow controller than the one we thought would work-it is ordered. Everything else looking ok. Diffusion Date: 2/23/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down TEOS Conversion Tylan 8-SiGe Up 3.44/30 Tylan 9-Poly Up 6.2/30 Tylan 10-Nitride yellow particles 6.45/30 Tylan 11-BPSG-LTO Up 2.25/30 Tylan 12-FGA Up Tystar Up 22.7/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 80- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Feb 24 06:49:05 2004 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 24 Feb 2004 06:49:05 -0800 Subject: Diffusion Morning Report 02/24/04 Message-ID: <403B6461.4050805@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Mixed reports on Nitride particles. GeH4 cylinder for SiGe was changed yesterday as a preventitive measure. Diffusion Dual stack rinser dryer is almost ready to go in. Waiting for TEOS MFC for TEOS2. Diffusion Date: 2/24/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down TEOS Conversion_mfc Tylan 8-SiGe down GeH4 cylinder Change 3.44/30 Tylan 9-Poly Up 6.2/30 Tylan 10-Nitride yellow particles 14.2/30 Tylan 11-BPSG-LTO Up 2.25/30 Tylan 12-FGA Up Tystar Up 22.7/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 60- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Feb 25 06:43:01 2004 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 25 Feb 2004 06:43:01 -0800 Subject: Diffusion Morning Report 02/25/04 Message-ID: <403CB475.50604@snf.stanford.edu> Good Morning all, Looking pretty good this morning Looking into Nitride particle issues. Waiting for TEOS flow controller for TEOS2. Display is dim on tylan1 SRD for WBDIFF is going in on March 11 please plan accordingly. Everything else looking good. Diffusion Date: 2/25/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Yellow Display is dim Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down TEOS Conversion_mfc Tylan 8-SiGe Up GeH4 cylinder Change done 3.44/30 Tylan 9-Poly Up 6.2/30 Tylan 10-Nitride yellow particles 15.2/30?????? Tylan 11-BPSG-LTO Up 2.25/30 Tylan 12-FGA Up Tystar Up 26./30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 60- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Feb 26 08:51:36 2004 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 26 Feb 2004 08:51:36 -0800 Subject: Diffusion Morning Report 02/26/04 Message-ID: <403E2418.70604@snf.stanford.edu> Good Morning All, We have a few issues this morning. Bank 2had a gas alarm last night we are checking burn box lines for a possible leak. Tylan 4 had an mfs alarm don't know for which gas- looking into it. NH3 for Tylan nitride and AG4108 is low and will be changed after the current run. Diffusion Date: 2/26/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 yellow mfs alarm Tylan 5-BBr3 down gas alarm during cycle Tylan 6-POCl3 down gas alarm during cycle Tylan 7-TEOS2 down TEOS Conversion_mfc Tylan 8-SiGe Up 3.44/30 Tylan 9-Poly Up 6.2/30 Tylan 10-Nitride yellow particles 15.54/30?????? Tylan 11-BPSG-LTO Up 2.25/30 Tylan 12-FGA Up Tystar Up 28.7/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up Pressure high ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 50- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Feb 27 08:11:32 2004 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 27 Feb 2004 08:11:32 -0800 Subject: Diffusion Morning Report 02/27/04 Message-ID: <403F6C34.3010503@snf.stanford.edu> Good Morning All, Still a few items this morning. One user put over 10 microns of poly in 1 day, What is up with this? Nh3 cylinder changed yesterday. HCl cylinder changed yesterday. Burn box lines were removed and source of leak located( we think) out for repair. Burn box not cleaned this morning. Poly run still in progress. Everything else looks ok. Diffusion Date: 2/27/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down TEOS Conversion_mfc Tylan 8-SiGe Up 3.66/30 Tylan 9-Poly Up 19.3/30 Tylan 10-Nitride down particles-NH3 Cylinder change 15.54/30?????? Tylan 11-BPSG-LTO Up 2.75/30 Tylan 12-FGA Up Tystar Up 28.7/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up not cleaned ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 680 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: