Diffusion Morning Report 01/07/04

ted berg tberg at snf.stanford.edu
Wed Jan 7 06:54:42 PST 2004

Good Morning all,
    Looking good this morning . THanks to Mike D. for getting the STS 
burn box up .  Bank 2 still has SiGe down and new TEOS is
moving ahead. Dope tubes need test after pull and clean.  Everything 
else looking good.

Diffusion 	Date: 	1/7/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	down 	needs test 	 
Tylan 6-POCl3 	down 	needs test 	 
Tylan 7-Dirty Ox 	down 	TEOS Conversion 	 
Tylan 8-SiGe 	down 	bank 2 conversion 	0/30
Tylan 9-Poly 	Up 	  	12.17/30
Tylan 10-Nitride 	Up 	  	14.3/30
Tylan 11-BPSG-LTO 	Up 	  	0/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	16.9/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	needs test 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 295- B(c4) 
on line

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