Diffusion Morning Report 01/09/04

ted berg tberg at snf.stanford.edu
Fri Jan 9 06:43:35 PST 2004

Good Morning All,
    Looking fair this morning.  Detected a leak from the exhaust when 
nitride was running last night looking into it. Dope tubes have
been tested waiting for restivity results. SiGe need a test after pull 
and clean. TEOS 2 moving along.

Diffusion 	Date: 	1/9/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	yellow 	tested 	 
Tylan 6-POCl3 	yellow 	tested 	 
Tylan 7-Dirty Ox 	down 	TEOS Conversion 	 
Tylan 8-SiGe 	down 	needs test 	0/30
Tylan 9-Poly 	Up 	  	12.17/30
Tylan 10-Nitride 	down 	exhaust leak 	16.22/30
Tylan 11-BPSG-LTO 	Up 	  	2.9/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	17.2/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	needs test 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 295- B(c4) 
on line

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