Diffusion Morning Report 1/13/04

ted berg tberg at snf.stanford.edu
Tue Jan 13 06:32:01 PST 2004


Good Morning All,
    A few issues this morning.  Still trying to find POCl3 alarm during 
cycle.  BBr3 source controller has issues. TEOS has a leak.
Phosphine for LTO was changed yesterday.  TEOS2 is coming along. SiGe 
needs a test.  Everything else looks ok.

Diffusion 	Date: 	1/13/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	down 	problem with source controller 	 
Tylan 6-POCl3 	down 	leak alarm 	 
Tylan 7-Dirty Ox 	down 	TEOS Conversion 	 
Tylan 8-SiGe 	down 	needs test 	0/30
Tylan 9-Poly 	Up 	  	12.17/30
Tylan 10-Nitride 	Up 	  	18.36/30
Tylan 11-BPSG-LTO 	Up 	  	4.9/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	17.2/30
Doped Poly 	GONE 	  	 
TEOS 	down 	leak 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 285- B(c4) 
on line


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