Diffusion Morning Report 01/15/04

ted berg tberg at snf.stanford.edu
Thu Jan 15 06:32:21 PST 2004


Goood Morning all,
    Looking pretty good this morning. POcl3 is waiting for a test after 
tube change, BBr3 should be ok now. SiGe needs a test after
tube replacement last week.  TEOS2 is coming along.  THERMCO testing is 
moving ahead thanks to Colby.  Everything else looking
good.

Diffusion 	Date: 	1/15/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	down 	leak alarm OK-needs test 	 
Tylan 7-Dirty Ox 	down 	TEOS Conversion 	 
Tylan 8-SiGe 	yellow 	coated-needs test 	0/30
Tylan 9-Poly 	Up 	  	12.17/30
Tylan 10-Nitride 	Up 	  	20/30
Tylan 11-BPSG-LTO 	Up 	  	8.0/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	17.2/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 280- B(c4) 
on line


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