Diffusion Morning Report 1/16/04

ted berg tberg at snf.stanford.edu
Fri Jan 16 06:45:18 PST 2004


Good Morning All,
    Everyone looking forward to a long weekend??  Things are looking 
good today.  POCl3 and SiGe were tested yesterday. Burn box
checked this morning.  TEOS2 is coming along-see update to teos users.  
John S and Jim H hard at work on  the Implanter.  Everything else looking
good. Colby is taming the THermcos.

Diffusion 	Date: 	1/16/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	yellow 	tested yesterday 	 
Tylan 7-Dirty Ox 	down 	TEOS Conversion 	 
Tylan 8-SiGe 	yellow 	tested yesterday 	0/30
Tylan 9-Poly 	Up 	  	12.17/30
Tylan 10-Nitride 	Up 	  	20/30
Tylan 11-BPSG-LTO 	Up 	  	8.8/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	17.2/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 280- B(c4) 
on line


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