Diffusion Morning Report 01/20/04

ted berg tberg at snf.stanford.edu
Tue Jan 20 07:46:50 PST 2004


Good Morning all,
    Looking good this morning.  Waiting results of POCL3 and BBR. ok to 
run..  LPs thickness moving up quickly.  TEOS2 moving
along  ok see last weeks update.  Everything else looking good.

Diffusion 	Date: 	1/20/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	yellow 	tested waiting results 	 
Tylan 7-Dirty Ox 	down 	TEOS Conversion 	 
Tylan 8-SiGe 	yellow 	tested 	.6/30
Tylan 9-Poly 	Up 	  	19.6/30
Tylan 10-Nitride 	Up 	  	22.6/30
Tylan 11-BPSG-LTO 	Up 	  	14.8/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	17.5/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 280- B(c4) 
on line


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