Diffusion Morning Report 01/22/04

ted berg tberg at snf.stanford.edu
Thu Jan 22 07:21:49 PST 2004

Good Morning all,
     Looking pretty good this morning. TEOS2 is moving along well. 
Everything else looking good. Colby is still beating on the
 THERMCOS and we are waiting for them to be on Coral. 

Diffusion 	Date: 	1/22/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	TEOS Conversion 	 
Tylan 8-SiGe 	yellow 	leak n2/ar-reset zero 	.6/30
Tylan 9-Poly 	Up 	  	23.7/30
Tylan 10-Nitride 	Up 	  	25.0/30
Tylan 11-BPSG-LTO 	Up 	  	14.8/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	17.5/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 280- B(c4) 
on line

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