Difffusion Morning Report01/30/04

ted berg tberg at snf.stanford.edu
Fri Jan 30 07:23:31 PST 2004

Good Morning All,
    Looking pretty good this morning. Time delay for soft pump was a bit 
long so it did't maske the pump down in 3 minutes-adjusted.
Teos2 is coming along well, we have it pumped down and are checking 
interlocks.   Burn box checked.

Diffusion 	Date: 	1/30/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	TEOS Conversion 	 
Tylan 8-SiGe 	yellow 	testing 	1.6/30
Tylan 9-Poly 	Up 	  	25.8/30
Tylan 10-Nitride 	yellow 	Still a few particles after P&C 	.15/30
Tylan 11-BPSG-LTO 	Up 	  	16.6/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	17.5/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	Checked this morning 	 
ZYGO 	Up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 220- B(c4) 
on line

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