From seymour at snf.stanford.edu Thu Jul 1 08:06:34 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Thu, 01 Jul 2004 08:06:34 -0700 Subject: Diffusion Morning report 6?30/04 Message-ID: <40E4287A.70A98E0C@snf.stanford.edu> Morning all, Looking better today. Nitride and BPSG will get tested soon and should be up later today. Everything else is looking good. Ted and I will be out tomorrow. Have a nice holiday Diffusion Date: 6/30/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1up No further problems with the tube Tylan 2 problem Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-recipe issues Tylan 8-SiGe Up 8.57/30 Tylan 9-Poly Up 18.8/30 Tylan 10-Nitride Down coating at this time 0/30 Tylan 11-BPSG-LTO Up being tested at this time 0/30 Tylan 12-FGA Up Tystar Up 13.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 360 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Thu Jul 1 09:33:13 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Thu, 01 Jul 2004 09:33:13 -0700 Subject: Diffusion Morning Report 7/1/04 Message-ID: <40E43CC9.915D5564@snf.stanford.edu> Morning all, Sorry about the wrong date on the first report. Looking better today. Nitride and BPSG will get tested soon and should be up later today. Everything else is looking good. Ted and I will be out tomorrow. Have a nice holiday Diffusion Date: 7/1/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1up No further problems with the tube Tylan 2 problem Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-recipe issues Tylan 8-SiGe Up 8.57/30 Tylan 9-Poly Up 18.8/30 Tylan 10-Nitride Down Not flowing process gas 0/30 Tylan 11-BPSG-LTO Up being tested at this time 0/30 Tylan 12-FGA Up Tystar Up Won't run dpolyvar 13.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 360 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Jul 6 06:49:59 2004 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 06 Jul 2004 06:49:59 -0700 Subject: Diffusion Morning Report 07/06/04 Message-ID: <40EAAE07.803@snf.stanford.edu> Good Morning All, Wecome back . Things are looking pretty good today. there was a problem with Nitride, the soft pump pneumatic line had come loose. It is ok now. no other problems that I know of at this time. Diffusion Date: 7/6/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-recipe issues Tylan 8-SiGe Up 8.57/30 Tylan 9-Poly Up 14.43/30 Tylan 10-Nitride yellow Particles? 1.0/30 Tylan 11-BPSG-LTO Up 2.02/30 Tylan 12-FGA Up Tystar Up 13.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 340 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jul 7 06:48:15 2004 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 07 Jul 2004 06:48:15 -0700 Subject: Diffusion Morning Report 06/07/04 Message-ID: <40EBFF1F.9050605@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Ray replaced the fitting on the gate valve soft pump yesterday afternoon on Nitride-system had a DCS fault when i came in this morning don't know how long it had been off it was an 8 hour dep and had 1.5 hrs to go. I reset it and flow returned. LTO test yesterday was fine. Temp cal on Tystar was completed. I will replace a couple of sagging lamps on EPI this morning. Everything else looks ok Diffusion Date: 7/7/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-recipe issues Tylan 8-SiGe Up 8.57/30 Tylan 9-Poly Up 14.43/30 Tylan 10-Nitride yellow Particles? DCS flow issue 1.0/30 Tylan 11-BPSG-LTO Up 3.12/30 Tylan 12-FGA Up Tystar Up 13.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 340 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jul 8 07:20:13 2004 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 08 Jul 2004 07:20:13 -0700 Subject: Diffusion Morning Report 07/08/04 Message-ID: <40ED581D.7090302@snf.stanford.edu> Good Morning All, Looking Good this morning. Burn box pressure was high-cleaning this morning. Ran EPI startup with no problem-it looks like we have a house cooling water issue. Zygo has problems with initialization-looking into it. No other issues at this time. Diffusion Date: 7/8/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 8.57/30 Tylan 9-Poly Up 15.2/30 Tylan 10-Nitride yellow Particles? 2.7/30 Tylan 11-BPSG-LTO Up 8.1/30 Tylan 12-FGA Up Tystar Up 13.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up Pressure a bit high-cleaning this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 340 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jul 9 06:49:46 2004 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 09 Jul 2004 06:49:46 -0700 Subject: Diffusion Morning Report 07/09/04 Message-ID: <40EEA27A.6060206@snf.stanford.edu> Good Morning All. Looking pretty good this morning. Checked out Epi water flow and it is set to trip at 9 GPM and we are currently flowing about 11 so it should be fine for now but if we have water fluctuations it could trip. Ran TEOS2 test yesterday it ran fine. Tystar is having problems with the dpoly var recipeyet pump program works fine-investigating. Watching Nitride. An amorphous run came out thin out of poly don't know why.. Everything else seems ok for now. Diffusion Date: 7/9/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 8.57/30 Tylan 9-Poly Up 15.6/30 Tylan 10-Nitride yellow Particles? 2.7/30 Tylan 11-BPSG-LTO Up 13.6/30 Tylan 12-FGA Up Tystar down Leak fail on dpoly var 13.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up Cleaned yesterday ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 340 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Jul 12 08:21:21 2004 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 12 Jul 2004 08:21:21 -0700 Subject: Diffusion Morning Report 07/12/04 Message-ID: <40F2AC71.90308@snf.stanford.edu> Good Morning All, Not Looking great this morning. Nitride will not pump to base, Poly has thickness issues, Tystar failed leak check last week. TEOS 2 testing . Burn box was high and cleaned this morning. Ebeam work not going well. Everything else looks ok for now. Diffusion Date: 7/12/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 8.57/30 Tylan 9-Poly yellow thin dep? 15.6/30 Tylan 10-Nitride yellow Particles?won't pump to base 6.3/30 Tylan 11-BPSG-LTO Up 18.9/30 Tylan 12-FGA Up Tystar yellow failed leak 13.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up Cleaned this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 280.0 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Tue Jul 13 08:36:32 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Tue, 13 Jul 2004 08:36:32 -0700 Subject: Diffusion Morning Report Message-ID: <40F40180.5F15995F@snf.stanford.edu> Morning All, Looking good this morning. Poly has thickness issues. And Tystar Base failed leak check last week. Everything else is running ok with the exception of the particle issue with Nitride Diffusion Date: 7/13/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 8.57/30 Tylan 9-Poly yellow Thin Dep 15.53/30 Tylan 10-Nitride yellow Particles 6.3/30 Tylan 11-BPSG-LTO Up 18.9/30 Tylan 12-FGA Up Tystar Up Failed leakcheck 13.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 275 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jul 14 06:50:30 2004 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 14 Jul 2004 06:50:30 -0700 Subject: Diffusion Morning Report 07/14/04 Message-ID: <40F53A26.3080409@snf.stanford.edu> Good Morning All, Not looking too swift this morning. Poly has possible thickness issues, Nitride has possible particle issues, Tystar had leak fails last week, Epi has problems, Zygo is down. Ebeam is down. Other than that things are OK. Diffusion Date: 7/14/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 8.57/30 Tylan 9-Poly yellow thin dep? 18.6/30 Tylan 10-Nitride yellow Particles? 12.2/30 Tylan 11-BPSG-LTO Up 23.16/30 Tylan 12-FGA Up Tystar yellow failed leak 13.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO down Frame grabber errors GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 270.0 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jul 15 06:44:46 2004 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 15 Jul 2004 06:44:46 -0700 Subject: Diffusion Morning Report 07/15/04 Message-ID: <40F68A4E.4020508@snf.stanford.edu> Good Morning All, Looking OK this morning. LPCVD logs are still not all being updated correctly. Nitride under observation. TEOS2 testing. Ebeam is back up SiGe is down for cylinder change. Zygo apparently still has problems. Not sure what is going on with epi. The rest looks OK. Diffusion Date: 7/15/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe down GeH4 cylinder change 9.31/30 Tylan 9-Poly Up 18.6/30 Tylan 10-Nitride yellow Particles? 14.47/30 Tylan 11-BPSG-LTO Up 23.16/30 Tylan 12-FGA Up Tystar Up 13.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO down Frame grabber errors GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 260.0 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jul 16 06:51:17 2004 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 16 Jul 2004 06:51:17 -0700 Subject: Diffusion Morning Report 07/16/04 Message-ID: <40F7DD55.6060609@snf.stanford.edu> GoodMorning All, Looking pretty good this morning. Had to do a burn box clean yesterday pressure was up to 5 pounds of pressure. Nitride is under observation. Zygo is not functional called Zygo but no one was home. TEOS 2 testing. Everything else looking OK. Diffusion Date: 7/16/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up GeH4 cylinder change yesterday 9.31/30 Tylan 9-Poly Up 20.6/30 Tylan 10-Nitride yellow Particles? 15.6/30 Tylan 11-BPSG-LTO Up 24.3/30 Tylan 12-FGA Up Tystar Up 13.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up cleaned yesterday ZYGO down Frame grabber errors GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 260.0 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Jul 19 06:33:33 2004 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 19 Jul 2004 06:33:33 -0700 Subject: Diffusion Morning Report 07/19/04 Message-ID: <40FBCDAD.2080600@snf.stanford.edu> Good Morning All, Looking Ok this morning. Nitride under observation, TEOS 2 testing, THermco POLY testing. ZYGO having Big problems- investigating. AMAT EPI to show up tomorrow. Ebeam has disk B problems. Everything else looking OK. Diffusion Date: 7/19/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 9.31/30 Tylan 9-Poly Up 21.2/30 Tylan 10-Nitride yellow Particles? 16.7/30 Tylan 11-BPSG-LTO Up 25.97/30 Tylan 12-FGA Up Tystar Up 13.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO down Frame grabber errors GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 260.0 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Jul 20 06:27:40 2004 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 20 Jul 2004 06:27:40 -0700 Subject: Diffusion Morning Report 07/20/04 Message-ID: <40FD1DCC.1@snf.stanford.edu> Good Morning All, Looking Pretty good this morning. Nitride still under observation, TEOS 2 testing, Thermco Poly testing. Zygo is back up and functional. Ebeam is still having disk B issues, we are working on possible solutions. AMAT Epi is moving in today. Bets on when it will be started up? LTO is getting close to pull and clean thickness. Everything else looking ok for now. Diffusion Date: 7/20/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 9.31/30 Tylan 9-Poly Up 21.2/30 Tylan 10-Nitride yellow Particles? 16.7/30 Tylan 11-BPSG-LTO Up 26.95/30 Tylan 12-FGA Up Tystar Up 13.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up Reset system GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 260.0 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jul 21 06:56:16 2004 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 21 Jul 2004 06:56:16 -0700 Subject: Diffusion Morning Report 07/21/04 Message-ID: <40FE7600.6090202@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Epi moved in well yesterday, it is not small. Nitride is under observation. TEOS 2 testing. LTO will be going down early next week for pull and clean. Ebeam -still trying to restore B drive data to SCSI.. Tylan 1 has loader issues-looking into it. Everything else looks ok. Diffusion Date: 7/21/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Yellow Loader issues Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 9.31/30 Tylan 9-Poly Up 21.2/30 Tylan 10-Nitride yellow Particles? 18.32/30 Tylan 11-BPSG-LTO Up 27.95/30 Tylan 12-FGA Up Tystar Up 13.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 250.0 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jul 22 06:51:26 2004 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 22 Jul 2004 06:51:26 -0700 Subject: Diffusion Morning Report 07/22/04 Message-ID: <40FFC65E.7030705@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Nitride under observation, Tylan 1 loader being checked out. SiGe had some temp issues. Zygo is down again, I will check it out this morning. LTO is getting close to pull and clean will take it down on Monday for pull and clean. We lost a fab wide air compressor yesterday and it caused several machines to go down, implanter, STS etch and maybe others-backup compressor was put on line yesterday afternoon. Cooling water drop on Epi yesterday-recovered after a few minutes. Everything else seems to be OK. Diffusion Date: 7/22/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow loader Issues Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 9.31/30 Tylan 9-Poly Up 21.2/30 Tylan 10-Nitride yellow Particles? 18.32/30 Tylan 11-BPSG-LTO Up 28.03/30 Tylan 12-FGA Up Tystar Up 13.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO down instrumentation problems GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 250.0 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jul 23 09:06:24 2004 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 23 Jul 2004 09:06:24 -0700 Subject: Diffusion Morning Report 7/23/04 Message-ID: <41013780.7020801@snf.stanford.edu> Good Morning All, Looking OK this morning. TEOS 2 is testing, zygo has problems, Implanter is down in regen because of House air problems. Reset Epi this morning after problems last night. Still tring to fix e-beam. Burn box cleaned this morning. Everything else looks OK. Diffusion Date: 7/23/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 9.31/30 Tylan 9-Poly Up 21.56/30 Tylan 10-Nitride Up 18.32/30 Tylan 11-BPSG-LTO Up 28.03/30 Tylan 12-FGA Up Tystar Up 13.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO down instrumentation problems GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 250.0 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Jul 26 07:29:05 2004 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 26 Jul 2004 07:29:05 -0700 Subject: Diffusion Morning Report 07/26/04 Message-ID: <41051531.6030306@snf.stanford.edu> Good Morning All, Looking OK this morning. LTO is down for scheduled clean, Parts ordered for Zygo, re-oriented TOES2 MFC will test again.. Ebeam still has issues. Everything else seems to be OK. Diffusion Date: 7/26/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 9.31/30 Tylan 9-Poly Up 22.15/30 Tylan 10-Nitride Up 18.32/30 Tylan 11-BPSG-LTO down Scheduled Pull and clean 0/30 Tylan 12-FGA Up Tystar Up 13.72/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO down instrumentation problems-parts ordered GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 240.0 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Jul 27 06:25:09 2004 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 27 Jul 2004 06:25:09 -0700 Subject: Diffusion Morning Report 07/27/04 Message-ID: <410657B5.8010003@snf.stanford.edu> Good Morning All, Looking OK this morning. LTO had an issue with a leak after pull and clean-looking into it, TEOS 2 waiting for Valve and testing, Parts for Zygo ordered, E beam still has issues. Everyting else looks OK. > Diffusion Date: 7/27/2004 > Tube Name/Number Status Comments THICKNESS-Change at > Tylan 1 Up > Tylan 2 Up > Tylan 3 Up > Tylan 4 Up > Tylan 5-BBr3 Up > Tylan 6-POCl3 Up > Tylan 7-TEOS2 down Qual testing-reoreinted MFC > Tylan 8-SiGe Up 9.8/30 > Tylan 9-Poly Up 22.15/30 > Tylan 10-Nitride Up 18.32/30 > Tylan 11-BPSG-LTO down Scheduled Pull and clean 0/30 > Tylan 12-FGA Up > Tystar Up 13.72/30 > Doped Poly GONE > TEOS yellow running > Tylan 16 N/A > Burn Box Up > ZYGO down instrumentation problems-parts ordered > > GAAS 22 UP > GAAS 23 UP > > SiH4 for furnaces Auto changeover working well A on line 240.0 PSI > -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jul 28 07:14:49 2004 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 28 Jul 2004 07:14:49 -0700 Subject: Diffusion Morning Report 07/28/04 Message-ID: <4107B4D9.2030809@snf.stanford.edu> Good Morning All, Looking OK this morning. LTO is back up quick job by Mike. Zygo is still down, replaced power supply and still has errors, Instrumentation board is $3800 are we going to spend the money? Ebeam is still having issues. Working with consultant. POCL3 changed on Tylan 6 needs test? TEOS 2 waitng for a valve. Everything else looking OK. Diffusion Date: 7/28/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 yellow POCl3 changed Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 10.34/30 Tylan 9-Poly Up 22.41/30 Tylan 10-Nitride Up 19.46/30 Tylan 11-BPSG-LTO Up P & C completed 1.27/30 Tylan 12-FGA Up Tystar Up 13.72/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO down instrumentation problems-parts ordered GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 230.0 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jul 29 07:08:50 2004 From: tberg at snf.stanford.edu (tberg) Date: Thu, 29 Jul 2004 07:08:50 -0700 Subject: Diffusion Morning Report 07/29/04 Message-ID: <410904F2.3090007@snf.stanford.edu> Good Morning All, Looking OK this morning. Another long run in Nitride. TEOS 2 and Thermco Poly testing. Zygo still down. Ebeam still down. Everything else looks OK Diffusion Date: 7/29/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 10.34/30 Tylan 9-Poly Up 22.41/30 Tylan 10-Nitride Up 19.46/30 Tylan 11-BPSG-LTO Up 5.48/30 Tylan 12-FGA Up Tystar Up 13.72/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO down instrumentation problems-parts ordered GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 210.0 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jul 30 07:15:14 2004 From: tberg at snf.stanford.edu (tberg) Date: Fri, 30 Jul 2004 07:15:14 -0700 Subject: Diffusion Morning Report 07/30/04 Message-ID: <410A57F2.40401@snf.stanford.edu> Good Morning All, Cleaning Burn box this morning, pressure was quite high> 3.0. Nitride pump was off this morning -looking into it. Zygo is still down. Looking into high leak rate on Thermco poly. TEOS 2 investigating. Everything else looks OK. Diffusion Date: 7/30/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 10.5/30 Tylan 9-Poly Up 24.05/30 Tylan 10-Nitride Up 22.5/30 Tylan 11-BPSG-LTO Up 5.48/30 Tylan 12-FGA Up Tystar Up 13.72/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO down instrumentation problems-parts ordered GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 210.0 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: