From tberg at snf.stanford.edu Tue Jun 1 06:40:40 2004 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 01 Jun 2004 06:40:40 -0700 Subject: Diffusion Morning Report 06/01/04 Message-ID: <40BC8758.50808@snf.stanford.edu> Good Morning All, Wecome baclk from the Holiday. Looking Pretty good this morning. Cantilever sheaths on BPSG broken again-changing investigating. Observing Nitride. TEOS2 testing Germain cylinder change on EPI today. Diffusion Date: 6/1/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing to begin Tylan 8-SiGe Up 6.6/30 Tylan 9-Poly Up 2.6/30 Tylan 10-Nitride Up Particles? 13.05/30 Tylan 11-BPSG-LTO down broken sheaths 8.4/30 Tylan 12-FGA Up Tystar Up 13.22/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 480 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jun 2 06:19:19 2004 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 02 Jun 2004 06:19:19 -0700 Subject: Diffusion Morning Report 06/02/04 Message-ID: <40BDD3D7.3000406@snf.stanford.edu> Good Morning All, Looking good this morning. TEOS 2 testing recipes. Nitride -observing. Everything else looks ok for now. Diffusion Date: 6/2/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 6.6/30 Tylan 9-Poly Up 3.7/30 Tylan 10-Nitride Up Particles? 13.2/30 Tylan 11-BPSG-LTO Up 9.3/30 Tylan 12-FGA Up Tystar Up 13.22/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 480 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jun 3 07:12:27 2004 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 03 Jun 2004 07:12:27 -0700 Subject: Diffusion Morning Report 06/03/04 Message-ID: <40BF31CB.2040700@snf.stanford.edu> Good Morning All, Several issues this morning. LTO had low growth rate-don't know flows so its hard to duplicate-pressure looks fine. Nitride had DCS fault-pressure is fine 2 hours left in dep when i saw it-reset. Tylan 1 had bad uniformity-replaced injector and adjusted door-needs test. Tylan 3 had b by TCs reseated TCs cleared errors. Other than the above things look OK. > Diffusion Date: 6/3/2004 > Tube Name/Number Status Comments THICKNESS-Change at > Tylan 1 yellow bad uniformity-replaced injector-adj door > Tylan 2 Up > Tylan 3 Up > Tylan 4 Up > Tylan 5-BBr3 Up > Tylan 6-POCl3 Up > Tylan 7-TEOS2 down Qual testing-generator noise issues > > Tylan 8-SiGe Up 6.6/30 > Tylan 9-Poly Up 3.7/30 > Tylan 10-Nitride yellow Particles? 15.4/30 > Tylan 11-BPSG-LTO yellow Low dep rate 10.0/30 > Tylan 12-FGA Up > Tystar Up 12.8/30 > Doped Poly GONE > TEOS yellow running > Tylan 16 N/A > Burn Box Up > ZYGO Up > > GAAS 22 UP > GAAS 23 UP > > SiH4 for furnaces Auto changeover working well A on line 460 PSI > -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jun 4 06:30:15 2004 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 04 Jun 2004 06:30:15 -0700 Subject: Diffusion Morning Report 06/04/04 Message-ID: <40C07967.9080400@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Burn box cleaned this morning. Looking into Tylan1 loader problem. Nitride and LTO under observation. TEOS 2 recipe testing progressing. Everything else looking OK. Diffusion Date: 6/4/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow bad uniformity-loader problems Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 6.6/30 Tylan 9-Poly Up 3.7/30 Tylan 10-Nitride yellow Particles? 15.4/30 Tylan 11-BPSG-LTO yellow Low dep rate 10.0/30 Tylan 12-FGA Up Tystar Up 13.25/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up cleaned this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 460 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Jun 7 07:19:47 2004 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 07 Jun 2004 07:19:47 -0700 Subject: Diffusion Morning Report 06/07/04 Message-ID: <40C47983.8070208@snf.stanford.edu> Good Morning Alll, Looking Ok this morning. Burn box pressure was high this morning-cleaning. Epi HCl cylinder change this morning. Several nitride runs with no problems on flows. LTO run with no problems. Still issues with Tylan 1 and 2 uniformity?? TEOS 2 has run several runs with no problems- testing continues. Everything else seems to be OK. Diffusion Date: 6/7/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow bad uniformity-bearings changed Tylan 2 Up bad uniformity baffle changed Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-recipe issues resolved Tylan 8-SiGe Up 6.95/30 Tylan 9-Poly Up 3.8/30 Tylan 10-Nitride yellow Particles? 15.4/30 Tylan 11-BPSG-LTO yellow Low dep rate? 10.0/30 Tylan 12-FGA Up Tystar Up 13.25/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up cleaned this morning- ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 460 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Jun 8 06:27:27 2004 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 08 Jun 2004 06:27:27 -0700 Subject: Diffusion Morning Report 06/08/04 Message-ID: <40C5BEBF.8010305@snf.stanford.edu> Good Morning All, Looking good this morning. Still observing Nitride. uniformity is good on tylans 1 and 2. LTO has had no further problems. TEOS 2 is testing. Everything else looking OK Diffusion Date: 6/8/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-recipe issues resolved Tylan 8-SiGe Up 6.95/30 Tylan 9-Poly Up 3.8/30 Tylan 10-Nitride yellow Particles? 15.4/30 Tylan 11-BPSG-LTO up 11.02/30 Tylan 12-FGA Up Tystar Up 13.25/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 460 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jun 9 06:20:05 2004 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 09 Jun 2004 06:20:05 -0700 Subject: Diffusion Morning Report 06/09/04 Message-ID: <40C70E85.9070200@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Nitride seems to be running OK. TEOS 2 a few issues still as testing progresses. Everything else seems to be calm for now. Diffusion Date: 6/9/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-recipe issues Tylan 8-SiGe Up 6.95/30 Tylan 9-Poly Up 3.8/30 Tylan 10-Nitride yellow Particles? 17.08/30 Tylan 11-BPSG-LTO Up 11.02/30 Tylan 12-FGA Up Tystar Up 13.25/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 460 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jun 10 06:49:13 2004 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 10 Jun 2004 06:49:13 -0700 Subject: Diffusion Morning Report 06/10/04 Message-ID: <40C866D9.1030006@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Another long run in Nitride-burn box very positive so we are cleaning it this morning. A problem was recorded not able to run pump program on nitride-ran pump program fine leak rate 6mT/ min base 11 mT. cxould not duplicate problem. TEOS 2 testing ongoing. Everything else seems fine for now. Diffusion Date: 6/10/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-recipe issues Tylan 8-SiGe Up 6.95/30 Tylan 9-Poly Up 3.8/30 Tylan 10-Nitride yellow Particles? 19.08/30 Tylan 11-BPSG-LTO Up 12.54/30 Tylan 12-FGA Up Tystar Up 13.25/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up High pressure cleaned this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 460 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jun 11 06:29:41 2004 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 11 Jun 2004 06:29:41 -0700 Subject: Diffusion Morning Report 06/11/04 Message-ID: <40C9B3C5.1000001@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Nitride seems to be running OK. TEOS 2 testing. Tylan 1 and 3 are TCA, Tylan 2 and 4 are TRANS-LC all will be going to trans as TCA is depleted. Burn box cleaned this morning. Everything else looking OK. Diffusion Date: 6/11/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-recipe issues Tylan 8-SiGe Up 7.29/30 Tylan 9-Poly Up 3.8/30 Tylan 10-Nitride yellow Particles? 19.29/30 Tylan 11-BPSG-LTO Up 12.54/30 Tylan 12-FGA Up Tystar Up 13.25/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up cleaned this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 440 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Jun 14 06:33:28 2004 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 14 Jun 2004 06:33:28 -0700 Subject: Diffusion Morning Report 06/14/01 Message-ID: <40CDA928.1050501@snf.stanford.edu> Good Morning All. Looking Pretty good this morning. Heated Gate valve was installed and tested FRiday. Nitide still under observation. TEOS 2 is testing. Everything else looking OK for now. ted Diffusion Date: 6/14/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-recipe issues Tylan 8-SiGe Up 7.29/30 Tylan 9-Poly Up 5.19/30 Tylan 10-Nitride yellow Particles? 19.35/30 Tylan 11-BPSG-LTO Up 13.24/30 Tylan 12-FGA Up Tystar Up 13.25/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 440 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Jun 15 06:24:21 2004 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 15 Jun 2004 06:24:21 -0700 Subject: Diffusion Morning Report 06/15/04 Message-ID: <40CEF885.20508@snf.stanford.edu> Good Morning All, Loooking Good this morning. Nitride under observation.. TEOS 2 testing- possible RF interference. Everything else looking good for now. Diffusion Date: 6/15/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-recipe issues Tylan 8-SiGe Up 7.29/30 Tylan 9-Poly Up 5.37/30 Tylan 10-Nitride yellow Particles? 19.35/30 Tylan 11-BPSG-LTO Up 14.4/30 Tylan 12-FGA Up Tystar Up 13.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 440 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jun 16 07:23:25 2004 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 16 Jun 2004 07:23:25 -0700 Subject: Diffusion Morning Report 06/16/04 Message-ID: <40D057DD.6080900@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Nitride is still under observation. LTO has possible contamination. TYstar will not pump down-investigating. TEOS2 is testing. Tylan 1 checked out -loader worked fine. Everything else seems to be ok. Diffusion Date: 6/16/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-recipe issues Tylan 8-SiGe Up 7.29/30 Tylan 9-Poly Up 5.53/30 Tylan 10-Nitride yellow Particles? 19.7/30 Tylan 11-BPSG-LTO yellow Possible contamination 16.5/30 Tylan 12-FGA Up Tystar down will not pump down 13.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 440 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jun 17 06:57:24 2004 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 17 Jun 2004 06:57:24 -0700 Subject: Diffusion Morning report 06/17/04 Message-ID: <40D1A344.50509@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Nitride under observation. TEOS 2 testing. Tylan 4 has a door interlock display issue-looking into it. Everything else seems to be OK. Diffusion Date: 6/17/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 yellow Door interlock display issue Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-recipe issues Tylan 8-SiGe Up 7.83/30 Tylan 9-Poly Up 5.53/30 Tylan 10-Nitride yellow Particles? 19.7/30 Tylan 11-BPSG-LTO Up 17.5/30 Tylan 12-FGA Up Tystar Up 13.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 430 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jun 18 06:27:41 2004 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 18 Jun 2004 06:27:41 -0700 Subject: Diffusion Morning Report 6/18/04 Message-ID: <40D2EDCD.2010605@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Lots of LTO run yesterday. Nitride under observation. TEOS2 testing. Tylan 4-still looking at door interlock problem. Burn box cleaned this morning. Everything else looking OK for now. Diffusion Date: 6/18/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 yellow Door interlock problems Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-recipe issues Tylan 8-SiGe Up 7.83/30 Tylan 9-Poly Up 6.61/30 Tylan 10-Nitride yellow Particles? 20.56/30 Tylan 11-BPSG-LTO Up 21.12/30 Tylan 12-FGA Up Tystar Up 13.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up cleaned this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 420 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Mon Jun 21 08:02:50 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Mon, 21 Jun 2004 08:02:50 -0700 Subject: Diffusion Morning Report Message-ID: <40D6F89A.20798C9A@snf.stanford.edu> Good Morning all, Ted is in Texas learning to love our new EPI. We are looking pretty good this morning. Tube 4 has a door interlock issue that I am working on with support from Tystar. Ted ran a recipe on the TEOS 2 with no control issues. He asked Barbara to run in with internal setpoint if she had and problems. Diffusion Date: 6/21/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Down Door interlock problems Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 DOWN Qual testing-recipe issues Tylan 8-SiGe Up 7.83/30 Tylan 9-Poly Up 7.47/30 Tylan 10-Nitride yellow Particles? 24.07/30 Tylan 11-BPSG-LTO Up 21.57/30 Tylan 12-FGA Up Tystar Up 13.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 400 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Mon Jun 21 09:28:25 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Mon, 21 Jun 2004 09:28:25 -0700 Subject: Diffusion Morning Report Message-ID: <40D70CA8.C56616A1@snf.stanford.edu> Good Morning all, Ted is in Texas learning to love our new EPI. We are looking pretty good this morning. Tube 4 has a door interlock issue that I am working on with support from Tystar. Ted ran a recipe on the TEOS 2 with no control issues. He asked Barbara to run in with internal setpoint if she had and problems. Diffusion Date: 6/21/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Down Door interlock problems Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 DOWN Qual testing-recipe issues 7.47/30 Tylan 8-SiGe Up 7.83/30 Tylan 9-Poly Up 7.47/30 Tylan 10-Nitride yellow Particles? 24.07/30 Tylan 11-BPSG-LTO Up 21.57/30 Tylan 12-FGA Up Tystar Up 13.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 400 PSI From seymour at snf.stanford.edu Tue Jun 22 08:37:27 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Tue, 22 Jun 2004 08:37:27 -0700 Subject: Diffusion Morning Report Message-ID: <40D85237.28E1022E@snf.stanford.edu> Good Morning, Most of the area equipment is behaving very well. The Burnbox pressure is a little to the positive pressure side of the input manifold. Tubes are being run at this time, so I will keep a close eye on it and espically around 1 pm when we have a chance to do a quick clean. Tube 4 door interlock issue has not been resolved yet. Everything else looking good. Diffusion Date: 6/22/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Down Door interlock problems Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-recipe issues Tylan 8-SiGe Up 7.83/30 Tylan 9-Poly Up 7.52/30 Tylan 10-Nitride yellow Particles? 24.23/30 Tylan 11-BPSG-LTO Up 21.57/30 Tylan 12-FGA Up Tystar Up 13.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 400 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Thu Jun 24 08:37:52 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Thu, 24 Jun 2004 08:37:52 -0700 Subject: Diffusion Morning Report Message-ID: <40DAF550.DA4D463F@snf.stanford.edu> Morning All; Looking good this morning with only tube 4 down with the door interlock not working. Nitride is getting close to a pull and clean probably on Monday or Tuesday. Diffusion Date: 6/24/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Down Door interlock problem Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-recipe issues Tylan 8-SiGe Up 7.83/30 Tylan 9-Poly Up 7.85/30 Tylan 10-Nitride yellow Particles? 27.97/30 Tylan 11-BPSG-LTO Up 22.31/30 Tylan 12-FGA Up Tystar Up 13.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 400 PSI From seymour at snf.stanford.edu Fri Jun 25 08:03:10 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Fri, 25 Jun 2004 08:03:10 -0700 Subject: Diffusion Morning Report Message-ID: <40DC3EAE.7118CCC1@snf.stanford.edu> Diffusion Date: 6/25/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Down Door interlock problems Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-recipe issues Tylan 8-SiGe Up 7.83/30 Tylan 9-Poly Up 7.56/30 Tylan 10-Nitride yellow Particles? 28.17/30 Tylan 11-BPSG-LTO Up 22.13/30 Tylan 12-FGA Up Tystar Up 13.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 400 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Mon Jun 28 08:02:07 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Mon, 28 Jun 2004 08:02:07 -0700 Subject: Diffusion Morning Report Message-ID: <40E032EE.47244EE@snf.stanford.edu> Morning all, Bank 5 Tylans have some problems this morning. I will change the opamp for N2 on tube 1. And keep an eye on tube 2 as there is no indication of which gas had the problem. I am getting close to having tube 4 up, working around the other tubes is a problem. Nitride is going down for a pull and clean tomorrow. Tylan BPSG will be going down on Thursday for the same. Diffusion Date: 6/28/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Down N2 unstable zero Tylan 2 problem MFS alarm? Tylan 3 Up Tylan 4 Down Door interlock problems Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-recipe issues Tylan 8-SiGe Up 8.57/30 Tylan 9-Poly Up 10.0/30 Tylan 10-Nitride yellow Particles? 30.72/30 Tylan 11-BPSG-LTO Up 28.72/30 Tylan 12-FGA Up Tystar Up 13.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 360 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Tue Jun 29 08:24:26 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Tue, 29 Jun 2004 08:24:26 -0700 Subject: Diffusion Morning Report Message-ID: <40E189A9.10BF4FD8@snf.stanford.edu> Morning All, Tube 1 slave computer locked up this morning during a Wet1050 run. I had to reset the tube computer to silence the alarm. Tube 4 came up yesterday. The door interlock is working fine now. Tylannitride is being cleaned. Tylanbpsg will be going down for a pull and clean on Thursday morning. No more MFS alarm on tube 2, but I will keep an eye on it. Epi HCL is about 10 lbs form change, possible on Thursday also. Diffusion Date: 6/29/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 problem Slave computer lockup during run Tylan 2 problem Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-recipe issues Tylan 8-SiGe Up 8.57/30 Tylan 9-Poly Up 10.6/30 Tylan 10-Nitride Down Pull and clean 0/30 Tylan 11-BPSG-LTO Up 29.4/30 Tylan 12-FGA Up Tystar Up 13.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 360 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Wed Jun 30 10:08:12 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Wed, 30 Jun 2004 10:08:12 -0700 Subject: Diffusion Morning Report June 30, 2004 Message-ID: <40E2F37C.EA2FE9BF@snf.stanford.edu> Morning all, BPSG and Nitride are both down for pull and clean. tube 1 was ran yesterday afternoon and no problems found, but I will leave the problem on it for a while. Epi HCL to be changed in a little while. All else is looking good at this time. Diffusion Date: 6/30/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 problem Ran ok yesterday afternoon Tylan 2 problem Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-recipe issues Tylan 8-SiGe Up 8.57/30 Tylan 9-Poly Up 10.82/30 Tylan 10-Nitride Down Pull and clean 0/30 Tylan 11-BPSG-LTO Up Pull and clean 0/30 Tylan 12-FGA Up Tystar Up 13.5/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 360 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: