Diffusion Morning Report 06/01/04
tberg at snf.stanford.edu
Tue Jun 1 06:40:40 PDT 2004
Good Morning All,
Wecome baclk from the Holiday. Looking Pretty good this morning.
Cantilever sheaths on BPSG broken again-changing investigating.
Observing Nitride. TEOS2 testing Germain cylinder change on EPI today.
Diffusion Date: 6/1/2004
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-TEOS2 down Qual testing to begin
Tylan 8-SiGe Up 6.6/30
Tylan 9-Poly Up 2.6/30
Tylan 10-Nitride Up Particles? 13.05/30
Tylan 11-BPSG-LTO down broken sheaths 8.4/30
Tylan 12-FGA Up
Tystar Up 13.22/30
Doped Poly GONE
TEOS yellow running
Tylan 16 N/A
Burn Box Up
GAAS 22 UP
GAAS 23 UP
SiH4 for furnaces Auto changeover working well A on line 480 PSI
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