Diffusion Morning Report 06/01/04

ted berg tberg at snf.stanford.edu
Tue Jun 1 06:40:40 PDT 2004

Good Morning All,
    Wecome baclk from the Holiday. Looking Pretty good this morning.  
Cantilever sheaths on BPSG broken again-changing investigating.
  Observing Nitride.  TEOS2 testing Germain cylinder change on EPI today.

Diffusion 	Date: 	6/1/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing to begin 	 
Tylan 8-SiGe 	Up 	  	6.6/30
Tylan 9-Poly 	Up 	  	2.6/30
Tylan 10-Nitride 	Up 	Particles? 	13.05/30
Tylan 11-BPSG-LTO 	down 	broken sheaths 	8.4/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	13.22/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 480 PSI

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