Diffusion Morning Report 06/03/04

ted berg tberg at snf.stanford.edu
Thu Jun 3 07:12:27 PDT 2004


Good Morning All,
    Several issues this morning.  LTO had low growth rate-don't know 
flows so its hard to duplicate-pressure looks fine.  Nitride had
DCS fault-pressure is fine 2 hours left in dep when i saw it-reset. 
Tylan 1 had bad uniformity-replaced injector and adjusted door-needs
 test.  Tylan 3 had   b by TCs reseated TCs cleared errors. Other than 
the above things look OK.

> Diffusion 	Date: 	6/3/2004 	 
> Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
> Tylan 1 	yellow 	bad uniformity-replaced injector-adj door 	 
> Tylan 2 	Up 	  	 
> Tylan 3 	Up 	  	 
> Tylan 4 	Up 	  	 
> Tylan 5-BBr3 	Up 	  	 
> Tylan 6-POCl3 	Up 	  	 
> Tylan 7-TEOS2 	down 	Qual testing-generator noise issues
> 	 
> Tylan 8-SiGe 	Up 	  	6.6/30
> Tylan 9-Poly 	Up 	  	3.7/30
> Tylan 10-Nitride 	yellow 	Particles? 	15.4/30
> Tylan 11-BPSG-LTO 	yellow 	Low dep rate 	10.0/30
> Tylan 12-FGA 	Up 	  	 
> Tystar 	Up 	  	12.8/30
> Doped Poly 	GONE 	  	 
> TEOS 	yellow 	 running 	 
> Tylan 16 	N/A 	  	 
> Burn Box 	Up 	  	 
> ZYGO 	Up 	  	 
>   	  	  	 
> GAAS 22 	UP 	  	 
> GAAS 23 	UP 	  	 
>   	  	  	 
> SiH4 for furnaces 	  	Auto changeover working well 	A on line 460 PSI
>

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