Diffusion Morning Report 06/04/04
tberg at snf.stanford.edu
Fri Jun 4 06:30:15 PDT 2004
Good Morning All,
Looking pretty good this morning. Burn box cleaned this morning.
Looking into Tylan1 loader problem. Nitride and LTO under observation.
TEOS 2 recipe testing progressing. Everything else looking OK.
Diffusion Date: 6/4/2004
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 yellow bad uniformity-loader problems
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-TEOS2 down Qual testing
Tylan 8-SiGe Up 6.6/30
Tylan 9-Poly Up 3.7/30
Tylan 10-Nitride yellow Particles? 15.4/30
Tylan 11-BPSG-LTO yellow Low dep rate 10.0/30
Tylan 12-FGA Up
Tystar Up 13.25/30
Doped Poly GONE
TEOS yellow running
Tylan 16 N/A
Burn Box Up cleaned this morning
GAAS 22 UP
GAAS 23 UP
SiH4 for furnaces Auto changeover working well A on line 460 PSI
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