Diffusion Morning Report 06/04/04

ted berg tberg at snf.stanford.edu
Fri Jun 4 06:30:15 PDT 2004

Good Morning All,
    Looking pretty good this morning.  Burn box cleaned this morning.  
Looking into Tylan1 loader problem. Nitride and LTO under observation.
TEOS 2 recipe testing progressing. Everything else looking OK.

Diffusion 	Date: 	6/4/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	yellow 	bad uniformity-loader problems 	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	Up 	  	6.6/30
Tylan 9-Poly 	Up 	  	3.7/30
Tylan 10-Nitride 	yellow 	Particles? 	15.4/30
Tylan 11-BPSG-LTO 	yellow 	Low dep rate 	10.0/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	13.25/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	cleaned this morning 	 
ZYGO 	Up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 460 PSI

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